involving a beam of energy

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H05G2/008

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Parent Industries

HELECTRICITY H05Electric techniques H05GX-RAY TECHNIQUE H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Current Industry

H05G2/008involving a beam of energy

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser system for source material conditioning in an EUV light source
- Patent number 12,369,244
- Issue date Jul 22, 2025
- ASML Netherlands B.V.
- Igor Vladimirovich Fomenkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation system including maximizing droplet velocity change t...
- Patent number 12,363,818
- Issue date Jul 15, 2025
- ASML Netherlands B.V.
- Gijs Dingemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 12,347,997
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
- Patent number 12,332,571
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source system and method of operation
- Patent number 12,328,806
- Issue date Jun 10, 2025
- xLight Inc.
- David Douglas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source device and protection method for r...
- Patent number 12,321,107
- Issue date Jun 3, 2025
- USHIO DENKI KABUSHIKI KAISHA
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 12,309,908
- Issue date May 20, 2025
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
- Patent number 12,302,484
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hybrid droplet generator for extreme ultraviolet light sources in l...
- Patent number 12,295,088
- Issue date May 6, 2025
- ASML Netherlands B.V.
- Benjamin Andrew Sams
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for controlling extreme ultraviolet light
- Patent number 12,282,262
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation method, extreme ultraviolet li...
- Patent number 12,284,745
- Issue date Apr 22, 2025
- Gigaphoton Inc.
- Yoshiyuki Honda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target delivery system
- Patent number 12,273,986
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source device and plasma gas recycling system for high-de...
- Patent number 12,250,763
- Issue date Mar 11, 2025
- ESOL Inc.
- Dong Gun Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source apparatus
- Patent number 12,250,762
- Issue date Mar 11, 2025
- Ushio Denki Kabushiki Kaisha
- Yusuke Teramoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical isolation module
- Patent number 12,245,350
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source target metrology
- Patent number 12,238,848
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Robert Jay Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for performing lithography process, light source, and EUV li...
- Patent number 12,235,594
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser amplification device and extreme ultraviolet light generation...
- Patent number 12,230,936
- Issue date Feb 18, 2025
- Mitsubishi Electric Corporation
- Yuzuru Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robust fluid coupling apparatus
- Patent number 12,222,050
- Issue date Feb 11, 2025
- ASML Netherlands B.V.
- Benjamin Andrew Sams
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method to remove debris from an extreme ultraviolet (EUV...
- Patent number 12,216,413
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Han Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet lithography system with heated tin vane bucket...
- Patent number 12,207,381
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply system, extreme ultraviolet light generation apparatu...
- Patent number 12,207,382
- Issue date Jan 21, 2025
- Gigaphoton Inc.
- Nozomu Oue
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus for efficient high harmonic generation
- Patent number 12,196,688
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,193,136
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV vessel perimeter flow auto adjustment
- Patent number 12,189,298
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Che-Chang Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV light generation apparatus, electronic device manufacturing met...
- Patent number 12,185,449
- Issue date Dec 31, 2024
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor manufacturing apparatus and operating method thereof
- Patent number 12,185,450
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration system for an extreme ultraviolet light source
- Patent number 12,174,550
- Issue date Dec 24, 2024
- ASML Netherlands B.V.
- Daniel Jason Riggs
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for monitoring a plasma
- Patent number 12,171,053
- Issue date Dec 17, 2024
- ASML Netherlands B.V.
- Michael Anthony Purvis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source with a beam positioning device
- Patent number 12,171,054
- Issue date Dec 17, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing SE
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ROTATIONAL DISK STRUCTURE FOR EUV LIGHT SOURCE DEVICE
- Publication number 20250234446
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHIELD-INTEGRATED ROTATIONAL DISK EUV LIGHT SOURCE DEVICE INCLUDING...
- Publication number 20250234447
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20250234445
- Publication date Jul 17, 2025
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ON-AXIS TYPE EUV LIGHT SOURCE DEVICE WITH TARGET MATERIAL SUPPLY CH...
- Publication number 20250234448
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH PRESSURE COUPLING ASSEMBLY
- Publication number 20250227834
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Rahul Sunil Kapadia
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
BEAM DIAPHRAGM, EUV LIGHT SOURCE, AND METHOD FOR OPERATING AN EUV L...
- Publication number 20250203746
- Publication date Jun 19, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV Light Source Target Metrology
- Publication number 20250185147
- Publication date Jun 5, 2025
- ASML NETHERLANDS B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PERFORMANCE RECOVERY METHOD FOR EUV LIGHT GENERATION SYSTEM, EUV LI...
- Publication number 20250176090
- Publication date May 29, 2025
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEANING APPARATUS, EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, AND MET...
- Publication number 20250147439
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Han LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONI...
- Publication number 20250126699
- Publication date Apr 17, 2025
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20250126697
- Publication date Apr 17, 2025
- Gigaphoton Inc.
- Yoshiyuki HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV RADIATION GENERATION FOLLOWING LASER BEAM ROTATION
- Publication number 20250113427
- Publication date Apr 3, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SAPPHIRE LAMP FOR LASER SUSTAINED PLASMA BROADBAND LIGHT SOURCE
- Publication number 20250106973
- Publication date Mar 27, 2025
- KLA Corporation
- Sergei Gluchko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20250106974
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE SYSTEM AND METHOD OF OPERATION
- Publication number 20250098056
- Publication date Mar 20, 2025
- xLight Inc.
- David Douglas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION-MONITORED LASER OPTICAL UNIT
- Publication number 20250093197
- Publication date Mar 20, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- G01 - MEASURING TESTING
Information Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250089150
- Publication date Mar 13, 2025
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20250085641
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Daniel Jason Riggs
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...
- Publication number 20250076776
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- SEUNGPYO HONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
- Publication number 20250076770
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Chang HSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Light Source Using Pre-Ionization
- Publication number 20250081319
- Publication date Mar 6, 2025
- Hamamatsu Photonics K. K.
- Frederick Marvin Niell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20250081320
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Injae LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
- Publication number 20250071880
- Publication date Feb 27, 2025
- Gigaphoton Inc.
- Masaki NAKANO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE SYSTEM AND METHOD OF OPERATION
- Publication number 20250056704
- Publication date Feb 13, 2025
- xLight Inc.
- David Douglas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE AND METHOD
- Publication number 20250031294
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Roger Anton Marie TIMMERMANS
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE
- Publication number 20250021026
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- William Peter VAN DRENT
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
AN ASSEMBLY FOR A LASER-OPERATED LIGHT SOURCE AND METHOD OF USE
- Publication number 20250021009
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Ferry ZIJP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR GENERATING ISOLATED ULTRASHORT ELECTROMAGNETI...
- Publication number 20250024579
- Publication date Jan 16, 2025
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Henri VINCENTI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE
- Publication number 20250008634
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Andrey Sergeevich TYCHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Acoustic Xenon Droplet Generator
- Publication number 20240431012
- Publication date Dec 26, 2024
- KLA Corporation
- Sherman Seelinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

involving a beam of energy

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser system for source material conditioning in an EUV light source

EUV radiation system including maximizing droplet velocity change t...

Methods and systems for aligning master oscillator power amplifier...

Target control in extreme ultraviolet lithography systems using abe...

Light source system and method of operation

Extreme ultraviolet light source device and protection method for r...

Extreme ultraviolet light generation apparatus and electronic devic...

Droplet generator and method of servicing extreme ultraviolet imagi...

Hybrid droplet generator for extreme ultraviolet light sources in l...

Method for controlling extreme ultraviolet light

Extreme ultraviolet light generation method, extreme ultraviolet li...

Target delivery system

EUV light source device and plasma gas recycling system for high-de...

Light source apparatus

Optical isolation module

EUV light source target metrology

Method for performing lithography process, light source, and EUV li...

Laser amplification device and extreme ultraviolet light generation...

Robust fluid coupling apparatus

Device and method to remove debris from an extreme ultraviolet (EUV...

Extreme ultraviolet lithography system with heated tin vane bucket...

Target supply system, extreme ultraviolet light generation apparatu...

Method and apparatus for efficient high harmonic generation

Apparatus and method for generating extreme ultraviolet radiation

EUV vessel perimeter flow auto adjustment

EUV light generation apparatus, electronic device manufacturing met...

Semiconductor manufacturing apparatus and operating method thereof

Calibration system for an extreme ultraviolet light source

System for monitoring a plasma

EUV light source with a beam positioning device

Patents Applicationslast 30 patents

ROTATIONAL DISK STRUCTURE FOR EUV LIGHT SOURCE DEVICE

SHIELD-INTEGRATED ROTATIONAL DISK EUV LIGHT SOURCE DEVICE INCLUDING...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

ON-AXIS TYPE EUV LIGHT SOURCE DEVICE WITH TARGET MATERIAL SUPPLY CH...

HIGH PRESSURE COUPLING ASSEMBLY

BEAM DIAPHRAGM, EUV LIGHT SOURCE, AND METHOD FOR OPERATING AN EUV L...

EUV Light Source Target Metrology

PERFORMANCE RECOVERY METHOD FOR EUV LIGHT GENERATION SYSTEM, EUV LI...

CLEANING APPARATUS, EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, AND MET...

CHAMBER, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONI...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

EUV RADIATION GENERATION FOLLOWING LASER BEAM ROTATION

SAPPHIRE LAMP FOR LASER SUSTAINED PLASMA BROADBAND LIGHT SOURCE

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

LIGHT SOURCE SYSTEM AND METHOD OF OPERATION

VIBRATION-MONITORED LASER OPTICAL UNIT

EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...

NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT

Light Source Using Pre-Ionization

EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...

LIGHT SOURCE SYSTEM AND METHOD OF OPERATION

APERTURE AND METHOD

APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE

AN ASSEMBLY FOR A LASER-OPERATED LIGHT SOURCE AND METHOD OF USE

METHOD AND DEVICE FOR GENERATING ISOLATED ULTRASHORT ELECTROMAGNETI...

OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE

Acoustic Xenon Droplet Generator