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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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G03F7/70033
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for and method of monitoring droplets in a droplet stream
Patent number
12,339,214
Issue date
Jun 24, 2025
ASML Netherlands B.V.
Joshua Mark Lukens
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High-performance EUV microscope with free form illumination system
Patent number
12,332,188
Issue date
Jun 17, 2025
ESOL, Inc.
Dong Gun Lee
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic system provided with a deflection apparatus for changi...
Patent number
12,332,570
Issue date
Jun 17, 2025
ASML Holding N.V.
Ronald Peter Albright
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
Patent number
12,332,571
Issue date
Jun 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Ya Cheng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target supply system, extreme ultraviolet light generation apparatu...
Patent number
12,332,575
Issue date
Jun 17, 2025
Gigaphoton Inc.
Fumio Iwamoto
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Optical component
Patent number
12,326,663
Issue date
Jun 10, 2025
Carl Zeiss SMT GmbH
Valentin Jonatan Bolsinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for forming a patterned layer of material
Patent number
12,325,911
Issue date
Jun 10, 2025
ASML Netherlands B.V.
Tamara Druzhinina
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for and method of controlling droplet generator performance
Patent number
12,324,084
Issue date
Jun 3, 2025
ASML Netherlands B.V.
Pooriya Beyhaghi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source device and protection method for r...
Patent number
12,321,107
Issue date
Jun 3, 2025
USHIO DENKI KABUSHIKI KAISHA
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for generating EUV radiation
Patent number
12,321,099
Issue date
Jun 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Sheng-Min Wang
G02 - OPTICS
Information
Patent Grant
Correcting apparatus of extreme ultraviolet (EUV) photomask and cor...
Patent number
12,313,979
Issue date
May 27, 2025
Samsung Electronics Co., Ltd.
Sanguk Park
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
12,309,908
Issue date
May 20, 2025
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method of manufacturing integrated circuit device
Patent number
12,300,490
Issue date
May 13, 2025
Samsung Electronics Co., Ltd.
Sookyung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
Patent number
12,302,484
Issue date
May 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chih Lai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Width adjustment of EUV radiation beam
Patent number
12,292,687
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insert for a source chamber of an EUV radiation source
Patent number
12,292,690
Issue date
May 6, 2025
Carl Zeiss SMT GmbH
Michael Hagg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hybrid droplet generator for extreme ultraviolet light sources in l...
Patent number
12,295,088
Issue date
May 6, 2025
ASML Netherlands B.V.
Benjamin Andrew Sams
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Low-temperature direct growth method of multilayer graphene, pellic...
Patent number
12,287,568
Issue date
Apr 29, 2025
Korea Electronics Technology Institute
Hyeong Keun Kim
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method for operating an EUV lithography apparatus, and EUV lithogra...
Patent number
12,287,588
Issue date
Apr 29, 2025
Carl Zeiss SMT GmbH
Moritz Becker
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method for controlling extreme ultraviolet light
Patent number
12,282,262
Issue date
Apr 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,272,554
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Jia-Lin Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target delivery system
Patent number
12,273,986
Issue date
Apr 8, 2025
ASML Netherlands B.V.
Georgiy Olegovich Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,265,336
Issue date
Apr 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G02 - OPTICS
Information
Patent Grant
Solution, solution storage body, actinic ray-sensitive or radiation...
Patent number
12,253,801
Issue date
Mar 18, 2025
FUJIFILM Corporation
Tetsuya Kamimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
EUV photolithography system fuel source and methods of operating th...
Patent number
12,235,586
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Cheng-Hao Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for performing lithography process, light source, and EUV li...
Patent number
12,235,594
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation conduit
Patent number
12,235,585
Issue date
Feb 25, 2025
ASML Netherlands B.V.
Remco Johannes Elisa Heijmans
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of forming an enhanced unexposed photoresist layer
Patent number
12,222,644
Issue date
Feb 11, 2025
ASM IP Holding B.V.
Jan Willem Maes
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device and method to remove debris from an extreme ultraviolet (EUV...
Patent number
12,216,413
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Han Lin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Reticle cleaning device and method of use
Patent number
12,210,295
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY...
Publication number
20250207247
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20250208511
Publication date
Jun 26, 2025
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV LIGHT SOURCE, EUV LITHOGRAPHY APPARATUS, AND METHOD FOR GENERAT...
Publication number
20250208513
Publication date
Jun 26, 2025
Samsung Electronics Co., Ltd.
Kyungwan YOO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACIDIC SPIN-ON CARBON (SOC) LAYER FOR EUV LITHOGRAPHY
Publication number
20250208517
Publication date
Jun 26, 2025
Brewer Science, Inc.
Si Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE EQUIPMENT
Publication number
20250208519
Publication date
Jun 26, 2025
Samsung Electronics Co., Ltd.
Jisu KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION ARRANGEMENT FOR A METROLOGY DEVICE AND ASSOCIATED METHOD
Publication number
20250207978
Publication date
Jun 26, 2025
ASML NETHERLANDS B.V.
Theodorus Thomas Marinus VAN SCHAIJK
G01 - MEASURING TESTING
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20250208512
Publication date
Jun 26, 2025
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PATTERNS AND METHOD OF MANUFACTURING INTEGRATED C...
Publication number
20250201577
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Jiyeon YI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROELECTROMECHANICAL DEVICE
Publication number
20250199414
Publication date
Jun 19, 2025
ROBERT BOSCH GmbH
Ralf NOLTEMEYER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RINSE MATERIAL COMPOSITION FOR PATTERNING PROCESS USING LITHOGRAPHY...
Publication number
20250197782
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION, SOLUTION STORAGE BODY, ACTINIC RAY-SENSITIVE OR RADIATION...
Publication number
20250189887
Publication date
Jun 12, 2025
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
Publication number
20250189893
Publication date
Jun 12, 2025
Tokyo Ohka Kogyo Co., Ltd.
Yosuke SUZUKI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMI...
Publication number
20250172875
Publication date
May 29, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION, RESIST PATTERN FORMING METHOD, COMPOUND, AND AC...
Publication number
20250164875
Publication date
May 22, 2025
Tokyo Ohka Kogyo Co., Ltd.
KhanhTin NGUYEN
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20250164878
Publication date
May 22, 2025
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20250164882
Publication date
May 22, 2025
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20250164886
Publication date
May 22, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION PROCESS FOR PATTERNING EDGE PLACEMENT ERROR IMPROVEMENT
Publication number
20250166994
Publication date
May 22, 2025
Applied Materials, Inc.
Zhiyu HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATION-SENSITIVE COMPOSITION AND PATTERN FORMING METHOD
Publication number
20250164883
Publication date
May 22, 2025
JSR Corporation
Motohiro SHIRATANI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20250164889
Publication date
May 22, 2025
Gigaphoton Inc.
Kotaro MIYASHITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION CONDUIT
Publication number
20250155820
Publication date
May 15, 2025
ASML NETHERLANDS B.V.
Remco Johannes Elisa HEIJMANS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD AND FILM FORMING...
Publication number
20250157817
Publication date
May 15, 2025
Canon Kabushiki Kaisha
MASAHIRO TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN COMPOUND, TIN COMPOSITION, PRODUCING METHODS THEREOF, RESIST SO...
Publication number
20250155798
Publication date
May 15, 2025
MITSUBISHI CHEMICAL CORPORATION
Yuta Hioki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20250155800
Publication date
May 15, 2025
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
OPTICAL INSPECTION DEVICE
Publication number
20250155380
Publication date
May 15, 2025
Carl Zeiss SMT GMBH
Maximilian Henning
G01 - MEASURING TESTING
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20250155801
Publication date
May 15, 2025
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PATTE...
Publication number
20250155799
Publication date
May 15, 2025
Samsung SDI Co., Ltd.
Soobin LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Radiation-Sensitive Composition and Method for Forming Resist Pattern
Publication number
20250155802
Publication date
May 15, 2025
JSR Corporation
Ken MARUYAMA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
PHOTOSENSITIVE POLYMER, PHOTORESIST COMPOSITION INCLUDING THE SAME,...
Publication number
20250155810
Publication date
May 15, 2025
Samsung Electronics Co., Ltd.
Jiyup KIM
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
OPTICAL APPARATUS AND CONTROL METHOD OF OPTICAL APPARATUS
Publication number
20250155823
Publication date
May 15, 2025
Lasertec Corporation
Ko GONDAIRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY