Number | Date | Country | Kind |
---|---|---|---|
56/44132 | Mar 1981 | JPX | |
56/44133 | Mar 1981 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3501393 | Wehner et al. | Mar 1970 | |
4049857 | Hammer | Sep 1977 | |
4158589 | Keller et al. | Jun 1979 | |
4162954 | Morrison | Jul 1979 | |
4180450 | Morrison | Dec 1979 | |
4198283 | Class et al. | Apr 1980 | |
4200510 | O'Connell | Apr 1980 | |
4239611 | Morrison | Dec 1980 | |
4299678 | Meckel | Nov 1981 |
Entry |
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Chapin, The Planar Magnetism, Vacuum Technology, Technical Publishing Company, Research, Development, Jan. 1974, pp. 37-40. |
Vorous, Planar Magnetron Sputtering, A New Industrial Coating Technique, Vac-Tec Systems, Boulder, Colorado, pp. 62-66. |