Number | Date | Country | Kind |
---|---|---|---|
7-79954 | Mar 1995 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4146774 | Fraas | Mar 1979 | |
4592924 | Kuppers et al. | Jun 1986 | |
4923715 | Matsuda et al. | May 1990 | |
5000113 | Wang et al. | Mar 1991 | |
5201990 | Chang et al. | Apr 1993 | |
5254171 | Hayakawa et al. | Oct 1993 | |
5366585 | Robertson et al. | Nov 1994 | |
5482749 | Telford et al. | Jan 1996 | |
5578131 | Ye et al. | Nov 1996 | |
5616208 | Lee | Apr 1997 | |
5833854 | Ito et al. | Nov 1998 |
Number | Date | Country |
---|---|---|
61-243176 | Oct 1986 | JPX |
62-189725 | Aug 1987 | JPX |
1-159368 | Jun 1989 | JPX |
3-21358 | Jan 1991 | JPX |
3-29324 | Feb 1991 | JPX |
4-17672 | Jan 1992 | JPX |
7-102366 | Apr 1995 | JPX |
Entry |
---|
Pierson, Handbook of Chemical Vapor Deposition, Noyes Publications, Park Ridge, New Jersey, pp. 149-151 and 225-226 (No Month), 1992. |
English Abstract for Japanese Laid-Open Patent Publication (KOKAI) No. 1-59368, No date. |
English Abstract for Japanese Laid-Open Patent Publication (KOKAI) No. 3-29324, no date. |
English Abstract for Japanese Laid-Open Patent Publication (KOKAI) No. 4-17672, no date. |
English Abstract for Japanese Laid-Open Patent Publication (KOKAI) No. 7-102366, no date. |