The present invention relates to microelectronic packaging and more particularly relates to fold packages for microelectronic elements, methods of making such packages and methods of testing the same.
Microelectronic elements such as semiconductor chips commonly are provided in packages which protect the chip or other element from physical damage, and which facilitate mounting of the chip on a circuit panel or other element. One type of microelectronic package includes a substrate, also referred to as a “tape” incorporating a dielectric layer such as a layer of a polyimide, BT resin or other polymeric material with electrically conductive features such as terminals on the dielectric element. The chip is mounted on the substrate so that a face of the chip confronts the substrate, typically with a layer of a die attach adhesive between the chip and the substrate. The terminals are exposed at an outer surface of the substrate, but are electrically connected to contacts on the die itself. A protective material commonly referred to as an overmolding may surround the die itself, but desirably does not cover the terminals. Such a package can be mounted on a circuit board with the outer surface of the substrate facing toward the circuit board, and with the terminals aligned with contact pads on the circuit board. Conductive bonding materials such as solder balls can be used to bond the terminals to the contact pads, so as to physically mount the package in place on the board and connect the terminals to the circuitry of the board, thereby connecting the die to the circuitry. When the package is mounted to the circuit board, the substrate lies beneath the die, between the die and the circuit board.
As disclosed, for example, in co-pending, commonly assigned U.S. patent application Ser. Nos. 10/077,388; 10/281,550; 10/654,375; 60/408,644 and 60/443,438, the disclosures of which are hereby incorporated by reference herein, and in commonly assigned PCT International Application PCT/US03/25256, the disclosure of which is also incorporated by reference herein, a package referred to herein as a “fold” package incorporates a generally similar substrate or tape. However, the substrate or tape in a fold package is folded around the die so as to define a pair of opposed runs extending in generally parallel planes. One such run extends below the die, in the position occupied by the substrate of the conventional package, whereas the other run extends above the die, with the die disposed between the runs. The bottom run typically bears terminals used to mount the package to a circuit panel or other larger substrate. In some variants of the fold package, electrically conductive components on the top run include terminals exposed at the outer surface (the surface facing upwardly away from the die and away from the bottom run), so that other packaged or unpackaged microelectronic elements can be mounted on the top run of the fold package. Fold packages of this type can be stacked, one on top of the other. The features on the top run are interconnected with the terminals or other electrically-conductive features on the bottom run by traces extending along the dielectric element. These traces extend around the fold formed in the dielectric element.
In a further variant, two or more microelectronic elements such as two or more semiconductor chips are mounted in the space between the top and bottom runs.
Still other fold packages combine these approaches, so that two or more microelectronic elements are disposed in the space between the top and bottom runs of the package, and the package has exposed terminals on both the top run and the bottom run, and hence can be stacked or otherwise combined with additional packages of the same or different types and/or with additional microelectronic elements.
Fold packages provide certain significant advantages. The traces which extend between the top and bottom runs can be formed in the normal tape-fabrication process at little additional cost, so as to provide low-cost, reliable interconnections between the two runs.
However, fabrication of foldover packages presents certain additional challenges, particularly under mass-production conditions. The folding process should be controlled so as to provide a repeatable, controlled alignment between electrically conductive features on the top run of a package and features on the bottom run of the same package, and should make the top and bottom runs parallel to one another. Also, the folding process should be relatively simple.
Moreover, the package must have high reliability. In particular, the traces on the tape must remain continuous after folding and after exposure to repeated stresses in service and/or in assembly processes using the package, such as reflow soldering of the package to the circuit board and reflow soldering of other elements to the package. As described, for example, in the aforementioned Ser. No. 10/654,375 application, it has been proposed to fold the tape using a fixture such as a die having a preselected radius so as to form folds of a constant, predetermined shape and size. This makes a fold with a predetermined height. Where the fold is precisely semicircular, the height of the fold (the distance between the top and bottom runs at the fold) is equal to twice the radius of the fold.
However, the collection of elements mounted between the runs, referred to herein as the “internal unit,” tends to vary in height. For example, the internal unit typically includes a layer of a die attach adhesive between a die and the bottom run and a layer of encapsulant or adhesive covering a die surface facing the top run. In other variants, the internal unit may include two or more dies with two or more layers of adhesive or encapsulant. Factors such as differences in the thickness of the dies and differences in the thickness of the layers of encapsulant can cause variations in the height of the internal unit. Where the fold is formed by a process which bends the tape using a die or other tool to provide a predetermined bend radius, variations in internal unit height can cause a mismatch between the internal unit height and the bend radius.
One aspect of the present invention incorporates the realization that such a mismatch can reduce the reliability of the package. Although the present invention is not limited by any theory of operation, it is believed that when a tape is formed to a controlled bend radius and hence to a controlled height and the internal unit height is greater than the height of the fold, small, localized bends will be formed at the edges of the internal unit, typically in close proximity to relatively sharp edges on the die or dies. It is believed that such bends and the proximity of the die edges to these bends contribute to premature failure of the traces under conditions involving thermal cycling. If the internal unit height is substantially less than the fold height, it is believed that there will also be small, localized bends in each of the top and bottom runs adjacent the edges of the internal unit. Localized bends of this type are believed to cause high stress levels in the adhesive which bonds the runs of the tape to the internal unit. This, in turn, can lead to premature failure of the bond between the adhesive and the tape runs, or in the bond between the adhesive and the die. Also, where the internal unit height does not match the fold height, the top and bottom runs tend to be non-planar, so that they bulge or droop in the regions between the internal unit and the fold.
One aspect of the present invention provides a manufacturing process which meets the needs for a controlled configuration and controlled alignment between the runs, but which avoids these difficulties. A related aspect of the invention provides assemblages of plural fold packages.
Moreover, it would be desirable to provide a simple method for testing the adhesion between the folded tape and the internal unit. Yet another aspect of the invention provides such a test.
These and other features and advantages of the present invention will be more readily apparent from the detailed description set forth below, taken in conjunction with the accompanying drawings.
A process in accordance with one embodiment of the invention utilizes a tape 10 having a first mounting region 12, a second mounting region 14 and a fold region 16 disposed between these end regions. The term “lengthwise direction” is used herein as referring to the direction along the tape between mounting regions 12 and 14, i.e., the direction L from one mounting region to the other across fold region 16. The “widthwise direction” as referred to herein is the direction transverse to the lengthwise direction. Although the terms lengthwise and widthwise are used herein as referring to these directions, this does not imply that the dimension of the tape in the lengthwise direction L must be greater than the dimension of the tape in the widthwise direction.
The tape includes a dielectric layer having an inner side 18, visible in
As used in this disclosure, when a conductive feature or tape is said to be “on” a dielectric element, the conductive element need not be disposed on a surface of the dielectric, but instead, may be disposed within the dielectric. That is, the word “on” does not imply location at a surface of a dielectric. The particular embodiment of the tape depicted in
The terminals in set 22 are exposed at the outer surface 20 of the dielectric layer through holes 28 aligned with the terminals, and the terminals of set 24 are exposed at surface 20 through similar holes 30. As used in this disclosure, a terminal or other conductive feature is regarded as “exposed at” a surface of a dielectric element where the terminal is arranged so that all or part of the conductive feature can be seen by looking at such surface. Thus, a conductive feature which is exposed at a surface of a dielectric element may project from such surface; may be flush with such surface; or may be recessed from such surface and exposed through an opening extending entirely or partially through the dielectric element.
The tape may be fabricated in a conventional manner using procedures commonly employed for making flexible circuit panels as, for example, by providing a lamination including a sheet of metal and the dielectric layer and selectively etching the metal sheet so as to leave the traces and other conductive features, or by an additive process in which some or all of the traces or conductive features are formed by electroplating or other deposition processes. The traces and conductive features may be formed from one or more metals, as, for example, copper or copper alloys and gold. Most typically, the metallic traces and features are about 5-25 microns thick, although any thickness compatible with the bending procedures discussed below may be used.
Tape 10 has registration features 32 in the first mounting region 12. These registration features lie in a predetermined spatial relationship to the conductive features 22 of the first set. That is, the locations of the conductive features 22 in the lengthwise and widthwise directions along the tape are fixed during the manufacturing process and controlled to within a reasonable tolerance. A second set of registration features 34 is provided in the second end region 14, these features being in a predetermined spatial relationship with the conductive features 24 of the second set. In the particular embodiment illustrated, registration features 32 and 24 are rows of sprocket holes 32 and 34. Where tape 10 is formed as part of a larger tape, the sprocket holes may be used to feed such larger tape or sheet through the various steps of the fabrication process. For example, the larger tape may have numerous sections, each corresponding to one tape 10, these regions being disposed side-by-side with one another, so that the widthwise directions W of adjacent sections extend along the length of the larger tape and hence the rows of sprocket holes 32 and 34 also extend along the length of the larger tape.
In a manufacturing process according to one embodiment of the invention, a set of interior elements is mounted to the inner side of the tape. The interior elements in this embodiment include a semiconductor chip 36. Chip 36 overlies first mounting region 12 and is electrically connected to the conductive features 22 of the first set, and hence to traces 26, in any suitable manner. Merely for purposes of illustration, the chip is depicted as directly connected to the terminals in set 22 by bonding the contacts 40 of the chip directly to the terminals. However, any suitable way of electrically connecting the chip to the electrically conductive features and/or to the traces may be employed. The chip can be connected to the traces or to other electrically conductive features by leads formed integrally with the traces or other features; by wire bonds; by solder bonds; by a layer of an anisotropic conductive adhesive; or in any other suitable manner.
Chip 36 is a solid body having a front or contact-bearing face 42 having contacts 40 thereon; a rear face 44 opposite to the front face; and edges extending between these faces. The chip may include an overmold compound (not shown) covering the actual semiconductor element at the rear face and edges. The chip is mounted on the tape so that a first edge 46 of the chip extends in the widthwise direction W (
The internal elements also include a layer of adhesive 48 disposed between chip 36 and the tape, as well as another layer of adhesive 50 disposed in the second region of the tape. As discussed below, adhesive layer 50 ultimately will be engaged with the rear surface 44 of chip 36. In an alternate arrangement, adhesive layer 50 may be applied on the rear surface 44 of the chip.
In the next stage of the process, the tape is folded generally around a widthwise folding axis 52 overlying the fold region 16 of the tape, so as to form fold region 16 into a bend or bight 16′ extending around this axis, and so as to provide a first or bottom run 12′ incorporating the first mounting region of the tape and a second or top run 14′ incorporating the second mounting region. As used in this disclosure, directional terms such as “vertical,” “horizontal,” “up” and “down” should be understood as referring to the frame of reference of the elements constituting the package, rather than to the normal gravitational frame of reference.
During this step, the two runs are brought into a predetermined alignment with one another in the horizontal directions (the directions to the left and right, and into and out of the plane of the drawing in
In the next stage of the process (
During the flattening and curing process, the fold or bight 16′ is not constrained. In effect, the fold “finds” its appropriate bend configuration and bend radius compatible with the flattened runs. Variations in the chip 36; in the adhesive layers 48 and 50; and, in some cases, variations in the height of the bonds connecting the chip contacts with the conductive elements, will cause some variation in the height Hs of the internal unit in the as-cured condition. These variations in the height of the internal unit will not affect the flatness of the runs. Instead, these variations in internal unit height will be reflected as variations in the distance DF between the edge of the internal unit and the fold. Stated another way, the radius of fold 16′ will vary depending upon the internal unit height HS. Because only a fixed amount of material is available to form the fold and to form those portions of the runs extending between the edge of the internal unit and the fold, such variations will be reflected as changes in DF. Thus, as the internal unit height increases, DF will decrease and vice versa.
The process produces fold packages with substantially flat runs at least in the vicinity of the first edge and the fold, and substantially free of localized deformations at the edge of the internal unit. Although the present invention is not limited by any theory of operation, it is believed that the enhanced flatness in the areas adjacent the edge of the internal unit, and the absence of localized deformations in this area, tends to increase reliability. In particular, units formed in the manner tend to resist breakage or peeling of the adhesive bonds 48 and 50 and also tend to resist breakage of the traces at the edge of the internal unit. Although the process according to this aspect of the present invention improves the reliability of the adhesive bonds, other factors which contribute to making a reliable adhesive bond should not be neglected. For example, as in any adhesive bonding process, the elements to be joined should be cleaned thoroughly. For example, where the chip has an overmold layer, such layer may be contaminated by mold release compounds used in the molding process used to form such a layer. A plasma cleaning process using, for example, repeated or prolonged exposure to an argon and oxygen plasma converts such contaminants to ash, which can then be removed by washing with liquids such as methyl ethyl ketone and water under ultrasonic agitation. Also, the adhesives should be selected to provide good bond strength. Suitable adhesives include those sold under the designation HS 232 by the Hitachi Chemical Company. Other suitable adhesives include those sold under the designations Dexter QMI 536 and Ablestick. The time and temperature conditions used in the tacking step and during final cure will depend on the adhesive used; the HS 232 material develops some surface tack when the tape is pressed against the adhesive at room temperature under a pressure of 200 pounds per square inch (psi) for 30 seconds. A stronger tack is developed at 93° C. using the same temperature and time. Final cure can be achieved in 15-60 minutes at 200 psi and a curing temperature of about 175° C.
Moreover, the flat configuration of the runs facilitates handling of the packages in production operation and, particularly, stacking of the packages on one another so as to form a larger assembly. This effect is illustrated schematically in
A further aspect of the present invention provides methods of testing the adhesive bonds and other features in a fold package. In
The particular fixture shown in
The features described above have been illustrated with reference to fold packages incorporating only one fold. However, the present invention may be employed with packages having plural folds as, for example, a package 302 (
As these and other variations of the features discussed above may be employed, the foregoing description of the preferred embodiments should be taken by way of illustration rather than as limiting the present invention.
The present application claims the benefit of the filing date of U.S. Provisional Patent Application 60/515,313, filed Oct. 29, 2004, the disclosure of which is hereby incorporated herein by reference.
Number | Date | Country | |
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60515313 | Oct 2003 | US |