Although the conventional transducer 10 functions, there are drawbacks. The trend in magnetic recording is to higher density memories. For higher linear densities, the shield-to-shield spacing, SS, and the track width are both desired to be reduced. The conventional shield-to-shield spacing for the transducer is on the order of twenty-two nanometers or more. The conventional read sensor 20 may not adequately read high linear density media. Accordingly, what is needed is a system and method for improving the performance of a magnetic recording read transducer at higher linear densities.
The transducer 100 includes top shield 140, insulator 106, shield structure 110, read sensor 120, and side magnetic bias structures 130 that may be separated from the read sensor 120 by an insulating layer 106. The read sensor 120 includes a nonmagnetic spacer 122 and a free layer 124. The nonmagnetic spacer layer 122 may be conductive or an insulating tunneling barrier layer, such as MgO. The free layer 124 is ferromagnetic and may include multiple layers. Thus, the only magnetic layer(s) for the read sensor 120 may be (or be within) the free layer 124. The sensor 120 may thus be termed a “free layer only” read sensor 120. The difference in orientation between the magnetic moment(s) 125 of the free layer 124 and the magnetic moment of a top ferromagnetic layer of the shield reference structure 118 gives rise to a magnetoresistance. The read sensor 120 is, therefore, a giant magnetoresistive (GMR) or tunneling magnetoresistive (TMR) read sensor in the embodiment shown. The resistance of the read sensor 120 may be used to read data. The read sensor 120 may also be configured for high density recording. Thus, in some embodiments, the track width (TW) of the read sensor 120 may be small. For example, the track width may be not more than thirty nanometers.
The side magnetic bias structures 130 may take various forms. In some embodiments, both the magnetic bias structures 130 are soft magnetic layers. For example, the magnetic bias structures 130 may be an alloy, multilayer or other structure that has soft magnetic properties. For example, the magnetic bias structures 130 may include CoFe and/or NiFe. In other embodiments, the magnetic bias structures 130 may be hard bias structures. For example, the magnetic bias structures 130 may be an alloy or multilayer that has a sufficiently high coercivity to have its magnetic moment substantially unchanged during operation of the transducer 100. In other embodiments, the magnetic bias structure 130 have another structure. The magnetic moments 132 of the magnetic bias structures 130 are shown parallel to the cross track direction. The magnetic moments 132 magnetically bias the sensor magnetic moment 125 in the cross track direction.
The shield structure 110 may include an optional bottom shield 112. The bottom shield 112 may be a soft magnetic alloy, such as NiFe. In other embodiments, the bottom shield 112 may be a multilayer structure including but not limited to an antiferromagnetically coupled (AFC) shield. The shield structure 110 also includes a shield pinning structure 114 and a shield reference structure 118. The nonmagnetic spacer layer 122 is between the shield reference structure 118 and the free layer 124. The shield pinning structure 114 may be separated from the shield reference structure 118 by a nonmagnetic coupling layer 116. The nonmagnetic coupling layer 116 mediates the magnetic coupling between the shield reference structure 118 and the shield pinning structure 114. Thus, a magnetic moment of the shield reference structure 116 is weakly magnetically coupled with a magnetic moment of the shield pinning structure 114. The shield pinning structure 114 may be magnetically coupled with the bottom shield 112.
The shield pinning structure 114 may have its magnetic moment(s) strongly pinned, or fixed, in place. For example, the shield pinning structure 114 may include an antiferromagnetic (AFM) layer and a ferromagnetic layer exchanged coupled to the AFM layer. This exchange coupling is generally relatively strong. The magnetic moment(s) of the shield pinning structure 114 may not be responsive to an external field, for example a field due to a media 180. In contrast, the bottom shield 112 has magnetic moment(s) that do respond to an external magnetic field.
The shield reference structure 118 includes at least one ferromagnetic layer. In some embodiments, the shield reference structure 118 includes multiple ferromagnetic layers interleaved with and sandwiching nonmagnetic layers. In other embodiments, a single ferromagnetic layer might be used. Other configurations are possible. In some embodiments, the thickness(es) of the ferromagnetic layers are at least two nanometers and not more than ten nanometers. However, the ferromagnetic layer closest to the shield pining structure 114 may be thicker. For example, this ferromagnetic layer may have a thickness of at least three nanometers and not more than twenty nanometers. The thickness(es) of the nonmagnetic layer(s) within the shield reference structure 118 may be selected that the ferromagnetic layers are antiferromagnetically coupled via a Ruderman-Kasuya-Kittel-Yosida (RKKY) interaction.
The shield reference structure 118 may act as a reference layer for the magnetoresistance of the read sensor 120 and act as a shield. This is because the magnetic moment(s) of the shield reference structure 118 may be considered to be partially pinned and partially free. The magnetic moments of the ferromagnetic layers within the shield reference structure 118 may be strongly coupled to each other. In some embodiments, the ferromagnetic layers are antiferromagnetically coupled with a characteristic magnetic field strength of at least eight hundred and not more than two thousand Oe. The magnetic coupling between the shield reference structure 118 and the shield pinning structure 114 is less than the magnetic coupling between the layers within the shield reference structure 118. For example, the shield reference structure 118 may be coupled with the shield pinning structure 114 with a characteristic field strength of at least three hundred Oe and not more than one thousand five hundred Oe. Thus, the magnetic moments of the shield reference layer 118 are not completely pinned. For example, the shield reference structure 118 has a permeability of at least five and not more than eight hundred. The magnetic moments of the shield reference structure 118 may be at least somewhat responsive to an external magnetic field. However, the magnetic moment(s) of the shield reference structure 118 are sufficiently fixed that a GMR or TMR may be developed between the free layer 124 and the shield reference structure 118.
The magnetic transducer 100 may be suitable for use at higher linear densities. The magnetic moment(s) of the shield reference structure 118 are partially fixed, while the magnetic moment(s) of the free layer 124 respond to the magnetic field of a bit in the media 180 being read. A characteristic magnetoresistance may be developed for the sensor 120 depending upon the direction of the field due to the bit being read and, therefore, information stored in the bit. Thus, the magnetic transducer 100 is capable of reading data using a single free layer sensor 120. Because the magnetic moment(s) of the shield reference structure 118 may at least partially respond to an external field, the shield reference structure 118 may at least partially shield the free layer 124 from the magnetic field of bits not being read. Stated differently, the shield reference structure 118 is part of the shield structure 110. Thus, the spacing between the shields 110 and 140, SS, may be reduced to the thickness of the free layer 124, nonmagnetic spacer layer 122 and capping layer 126. The shield-to-shield spacing may be less than fifteen nanometers. In some embodiments, the shield-to-shield spacing may be on the order of ten nanometers or less. Thus, the shield-to-shield spacing of the magnetic transducer 100 may be reduced. Consequently, the magnetic transducer 100 may be suitable for high linear and/or areal density magnetic recording applications.
In addition, the magnetic transducer 100′ includes a rear bias structure 150 that may be separated from the read sensor 120 and side bias structure 130 by a nonmagnetic insulator 151. The read sensor 120 is between the ABS and the rear magnetic bias structure 150. The rear bias structure 150 is shown having a width in the cross-track direction that is greater than the track width. In other embodiments, the rear bias structure 150 may have a width that is substantially equal to the track width, TW, of the read sensor 120. In some embodiments, this is because the sensor 120 and rear bias structure 150 are defined in the cross-track direction using a single mask. Stated differently, the rear bias structure 160 and sensor 110 may be self-aligned. In other embodiments, the rear bias structure 150 may extend to or past the outside edges of the bias structures 130 in the cross-track direction. In some embodiments, the length of the rear bias structure 150 in the stripe height direction is greater than the width in the cross-track direction. Thus, the rear bias structure 150 may have a shape anisotropy that is perpendicular to the ABS. The rear bias structure 150 may include magnetically soft and/or magnetically hard materials.
The rear magnetic bias structure 150 magnetically biases the read sensor 120 in a stripe height direction perpendicular to the ABS. The magnetic moment 152 of the rear bias structure 150 is thus shown as oriented toward the ABS. In other embodiments, the magnetic moment 152 may be oriented in the opposite direction. Because of the combination of the side bias structures 130 and the rear bias structure 150, the magnetic moment 125′ of the read sensor 120 is canted from the cross-track direction in the absence of an external field.
The magnetic transducer 100′ may be suitable for use at higher linear densities. The magnetic moment(s) of the shield reference structure (not shown in
The transducer 100″ corresponds to the transducer(s) 100 and/or 100′. Consequently, analogous components are labeled similarly. For example, the transducer 100″ includes a read sensor 120 including a free layer 124 and a nonmagnetic spacer layer 122 analogous to the layers 124 and 122. The magnetic transducer 100″ also includes side bias structures 130 having magnetic moments 132, insulator 106, shield structure 110′ and shield 140′ that are analogous to the structures 130, 132, 106, 110 and 140 depicted in
The shield 140′ includes a ferromagnetic layer 142, a nonmagnetic layer 144, another ferromagnetic layer 146, an AFM layer 147 and a top shield 148. The magnetic layers 142 and 146 are antiferromagnetically coupled via an RKKY interaction. The ferromagnetic layer 146 is exchange coupled to the AFM layer 147. Thus, the shield 140′ is an AFC shield. In other embodiments, the shield 140′ may have a different structure.
The shield structure 110′ includes a bottom shield 112, a shield pinning structure 114′, a nonmagnetic coupling layer 116 and a shield reference structure 118′. The shield pinning structure 114′ including a pinning layer 160 and a ferromagnetic layer 162. The pining layer 160 may be an AFM layer, such as IrMn. The magnetic layer 162 has its magnetic moment pinned by the exchange coupling with the pinning layer 160. This can be seen in
The shield reference structure 118′ includes two ferromagnetic layers 170 and 174 interleaved with and sandwiching a nonmagnetic layer 172. The nonmagnetic layer 172 may be a Ru layer. However, other material(s) might be used. The ferromagnetic layers 140 and 174 are termed reference layers because the orientation of the free layer magnetic moment 125/125′ with respect to the magnetic moment 171 results in the magnetoresistance of the read sensor 120. In some embodiments, the reference layer 170 is at least two nanometers and not more than ten nanometers thick. The reference layer 174 may have a thickness of at least three nanometers and not more than twenty nanometers. The thickness of the nonmagnetic layer 172 may be selected that the reference layers 170 and 174 are antiferromagnetically coupled via a RKKY interaction. Thus, the coupling between the reference layers 170 and 174 may be relatively strong. In some embodiments, the reference layers 170 and 174 are antiferromagnetically coupled with a characteristic magnetic field strength of at least eight hundred and not more than two thousand Oe. The directions of the magnetic moments 171 and 175 of the reference layers 170 and 174 may be responsive to an external field. For example, the permeability of the shield reference structure 118′ may be at least five and not more than eight hundred.
The nonmagnetic coupling layer 116 has a thickness that may be used to set the strength of the coupling between the magnetic layer 162 and the magnetic layer 174. The magnetic coupling between the layers 162 and 174 is less than the magnetic coupling between the reference layers 170 and 174. For example, the magnetic layer 162 may be coupled with the reference layer 174 with a characteristic field strength of at least three hundred Oe and not more than one thousand five hundred Oe. Thus, the magnetic moments 171 and 175 of the shield reference structure 118′ are not completely pinned. The magnetic moments 171 and 175 of the reference layers 172 and 174 are strongly coupled. However, the reference layer 174 is not strongly magnetically coupled to the layer 162. Thus, the magnetic moments 171 and 175 of the reference layers 170 and 174, respectively, may be at least partially responsive to an external field. Thus, the reference layers 170 and 174 are part of the shield.
Although described as separate structures, the structures 114′, 116 and 118′ may be considered to form an antiferromagnetically coupled shield structure. Thus, the ferromagnetic layer 162 of the pinning structure 114′ may be considered to be a third reference layer for the shield structure 110′. In such a shield structure 110′, the third reference layer 162 is strongly coupled to the pinning layer 160. However, the second reference layer 174 is weakly coupled with the third reference layer 162.
The magnetic transducer 100″ may be suitable for use at higher linear densities. The magnetic moments 171 and 175 of the shield reference structure 118′ are partially fixed. The magnetic moment 125/125′ of the free layer 124 responds to the magnetic field of a bit in the media being read. Thus, a magnetoresistance may be developed for the sensor 120 depending upon the information stored in the bit. Thus, the magnetic transducer 100″ is capable of reading data using a single free layer sensor 120. Because the magnetic moment 171 and 175 of the shield reference structure 118′ may at least partially respond to an external field, the shield reference structure 118′ may at least partially shield the free layer 124 from the magnetic field of bits not being read. The spacing between the shields 110′ and 140′, SS, may be reduced to the thickness of the free layer 124, nonmagnetic spacer layer 122 and capping layer 126. The shield-to-shield spacing may be less than fifteen nanometers. In some embodiments, the shield-to-shield spacing may be on the order of ten nanometers or less. Thus, the shield-to-shield spacing of the magnetic transducer 100″ may be reduced. Consequently, the magnetic transducer 100″ may be suitable for high linear and/or density magnetic recording applications.
Operation of the magnetic transducers 100, 100′ and/or 100″ may be understood with respect to
In
In
The transducer 100′″ corresponds to the transducer(s) 100, 100′ and/or 100″. Consequently, analogous components are labeled similarly. For example, the transducer 100′″ includes a read sensor 120 including a free layer 124 and a nonmagnetic spacer layer 122 analogous to the layers 124 and 122. The magnetic transducer 100′″ also includes side bias structures 130 having magnetic moments 132, insulator 106 which may be MgO, shield structure 110″ and shield 140′ that are analogous to the structures 130, 132, 106, 110/110′ and 140/140′. Thus, the components 106, 110″, 112, 114″, 116, 118′, 120, 122, 124, 126, 130 and 140′ have an analogous structure and function to the corresponding components described above. For example, the sensor 120 is a free layer only sensor including the free layer 124 and nonmagnetic spacer layer 122.
The shield structure 110″ includes a bottom shield 112, a shield pinning structure 114″, a nonmagnetic coupling layer 116 and a shield reference structure 118′. The shield reference structure 118′ includes two ferromagnetic layers 170 and 174 interleaved with and sandwiching a nonmagnetic layer 172. The ferromagnetic layers 140 and 174 are termed reference layers because the orientation of the free layer magnetic moment 125/125′ with respect to the magnetic moment 171 results in the magnetoresistance of the read sensor 120. The structure and function of the components of the shield reference structure 118′ are analogous to those discussed above.
The shield pinning structure 114″ including a pinning layer 160′ and a ferromagnetic layer 162′. The structure and function of the pinning layers 160′ and ferromagnetic/third reference layer 162′ are analogous to those of the layers 160 and 162, respectively. However, in the embodiment shown, the layers 162 and 160′ are wider in the cross-track direction. Thus, the widths of the layers 160′ and 162′ may be defined in a separate step from the layers 170, 172, 174 and 116.
The magnetic transducer 100′″ may be suitable for use at higher areal densities. The magnetic moments of the shield reference structure 118′ are partially fixed. The magnetic moment of the free layer 124 responds to the magnetic field of a bit in the media being read. Thus, a magnetoresistance may be developed for the sensor 120 depending upon the information stored in the bit. Thus, the magnetic transducer 100′″ is capable of reading data using a single free layer sensor 120. Because the magnetic moment of the shield reference structure 118″ may at least partially respond to an external field, the shield reference structure 118″ may at least partially shield the free layer 124 from the magnetic field of bits not being read. The spacing between the shields 110″ and 140′, SS, may be reduced to the thickness of the free layer 124, nonmagnetic spacer layer 122 and capping layer 126. The shield-to-shield spacing may be less than fifteen nanometers. In some embodiments, the shield-to-shield spacing may be on the order of ten nanometers or less. Thus, the track width and the shield-to-shield spacing of the magnetic transducer 100″ may be reduced. Consequently, the magnetic transducer 100′″ may be suitable for high density magnetic recording applications.
The transducer 300 corresponds to the transducer(s) 100, 100′, 100″ and/or 100′″. Consequently, analogous components are labeled similarly. For example, the transducer 300 includes a read sensor 320 including a free layer 324 and a nonmagnetic spacer layer 322 analogous to the layers 124 and 122, respectively. The magnetic transducer 300 includes side bias structures (not shown) and insulator (not shown) analogous to the side bias structures 130 and insulator 106, respectively. Although not shown, the magnetic transducer 300 may also include a capping layer analogous to the capping layer 126. Further, the magnetic read transducer 300 includes a shield structure 310 and shield 340 that are analogous to the structures 110/110′/110″ and 140/140′, respectively. Thus, the components 310, 312, 314, 316, 318, 320, 322, 324 and 340 have an analogous structure and function to the corresponding components described above. For example, the sensor 120 is a free layer only sensor including the free layer 124 and nonmagnetic spacer layer 122.
The shield structure 310 includes a bottom shield 312, a shield pinning structure 314, a nonmagnetic coupling layer 316 and a shield reference structure 318 analogous to the structures 112, 114/114′/114″, 116 and 118/118′. Thus, the shield reference structure 318 includes reference layers 370 and 374 separated by nonmagnetic layer 372. The layers 370, 372 and 374 are analogous to the layers 170, 172 and 174, respectively. In the embodiment shown, the shield reference structure. The shield pinning structure 314 includes a pinning layer 360 that may be an AFM layer and magnetic layer 362. The layer 362 may be considered a third reference layer. The layers 360 and 362 are analogous to the layers 160/160′ and 162/162′, respectively. Thus, the magnetic transducer 300 operates in an analogous manner to the transducer(s) 100, 100′, 100″ and/or 100′″.
In addition, the magnetic transducer 300 has an extended length in the stripe height direction. In particular, portions of the reference layers 370, 374 and 362 are longer in the stripe height direction than the free layer 324. In addition, the AFM layer 360 is longer in the stripe height direction. Because of its increased volume, the AFM layer 360 may be more magnetically stable. Pinning of the magnetic layer/third reference layer 362 may be improved. Stability of the reference layers 370 and 374 may also be improved.
The magnetic transducer 300 may share the benefits of the magnetic transducer(s) 100, 100′, 100″ and/or 100′″. The spacing between the shields 310 and 340, SS, may be reduced to the thickness of the free layer 324, nonmagnetic spacer layer 322 and capping layer (if present). The shield-to-shield spacing may be less than fifteen nanometers. In some embodiments, the shield-to-shield spacing may be on the order of ten nanometers or less. Thus, the track width and the shield-to-shield spacing of the magnetic transducer 300 may be reduced. Consequently, the magnetic transducer 300 may be suitable for high density magnetic recording applications.
The transducer 300′ corresponds to the transducer(s) 300, 100, 100′, 100″ and/or 100′″. Consequently, analogous components are labeled similarly. For example, the transducer 300′ includes components 310′, 312, 314, 316, 318′, 320, 322, 324, 340, 360, 362, 374, 372′ and 370′ that have an analogous structure and function to the corresponding components described above. Thus, the magnetic transducer 300′ operates in an analogous manner to the transducer(s) 300, 100, 100′, 100″ and/or 100′″.
In addition, the magnetic transducer 300′ has an extended length in the stripe height direction. Although the first reference layer 370′ has been milled through, particular, portions of the reference layers 374 and 362 are longer in the stripe height direction than the free layer 324. In addition, the AFM layer 360 is longer in the stripe height direction. Because of its increased volume, the AFM layer 360 may be more magnetically stable. Pinning of the magnetic layer/third reference layer 362 may be improved. Stability of the reference layer and 374 may also be improved.
The magnetic transducer 300′ may share the benefits of the magnetic transducer(s) 300, 100, 100′, 100″ and/or 100′″. The spacing between the shields 310′ and 340, SS, may be reduced in the manner described above. Consequently, the magnetic transducer 300′ may be suitable for high density magnetic recording applications.
The transducer 300″ corresponds to the transducer(s) 300, 300′, 100, 100′, 100″ and/or 100″. Consequently, analogous components are labeled similarly. For example, the transducer 300′ includes components 310″, 312, 314, 316, 318″, 320, 322, 324, 340, 360, 362, 374′, 372″ and 370′ that have an analogous structure and function to the corresponding components described above. Thus, the magnetic transducer 300″ operates in an analogous manner to the transducer(s) 300, 300′, 100, 100′, 100″ and/or 100″.
The magnetic transducer 300″ has an extended length in the stripe height direction. Although the layers 370′, 372′ and 374′ have been milled through, particular, portions of the reference layers 374 and 362 are longer in the stripe height direction than the free layer 324. In addition, the AFM layer 360 is longer in the stripe height direction. Because of its increased volume, the AFM layer 360 may be more magnetically stable. Pinning of the magnetic layer/third reference layer 362 may be improved.
The magnetic transducer 300″ may share the benefits of the magnetic transducer(s) 300, 300′, 100, 100′, 100″ and/or 100′″. The spacing between the shields 310″ and 340, SS, may be reduced in the manner described above. Consequently, the magnetic transducer 300″ may be suitable for high density magnetic recording applications.
The transducer 300′″ corresponds to the transducer(s) 300, 300′, 300″, 100, 100′, 100″ and/or 100′″. Consequently, analogous components are labeled similarly. For example, the transducer 300′ includes components 310′″, 312, 314′, 316′, 318″, 320, 322, 324, 340, 360, 362′, 374′, 372″ and 370′ that have an analogous structure and function to the corresponding components described above. Thus, the magnetic transducer 300′″ operates in an analogous manner to the transducer(s) 300, 300′, 300″, 100, 100′, 100″ and/or 100′″.
The magnetic transducer 300′″ has an extended length in the stripe height direction. The AFM layer 360 is longer in the stripe height direction. Because of its increased volume, the AFM layer 360 may be more magnetically stable. Pinning of the magnetic layer/third reference layer 362 may be improved.
The magnetic transducer 300′″ may share the benefits of the magnetic transducer(s) 300, 300′, 300″, 100, 100′, 100″ and/or 100″. The spacing between the shields 310′″ and 340, SS, may be reduced in the manner described above. Consequently, the magnetic transducer 300′″ may be suitable for high density magnetic recording applications.
The magnetic transducers 100, 100′, 100″, 100″, 300, 300′, 300″ and 300′″ have been shown with various configurations to highlight particular features, such as differences in geometries. One of ordinary skill in the art will readily recognize that two or more of these features may be combined in various manners consistent with the method and system described herein that are not explicitly depicted in the drawings.
A shield structure 110 is provided, via step 402. Step 402 thus includes providing the shield reference structure 118 and the shield pinning structure 114. The bottom shield 112 and the nonmagnetic coupling layer 116 may also be provided as part of step 402. Step 402 typically includes depositing the desired layers, defining their edges as well as one or more anneals to set the desired magnetic bias direction(s).
The read sensor 120 is provided, via step 404. Step 404 may include depositing a stack of layers for the read sensor and defining the read sensor in the cross-track and stripe height directions. Thus, the nonmagnetic layer 122 and the free layer 124 are provided in step 404. The capping layer 126 may also be fabricated. Further, the insulating layer 106 may also be provided.
The side bias structures 130 are provided, via step 406. Step 406 may include depositing the magnetic material(s) for the side bias structures 130 and planarizing the magnetic transducer.
The rear bias structure 150 may optionally be provided, via step 408. Step 408 may be performed after the sensor 120 has been defined in at least the stripe height direction. Thus, at least part of step 408 is performed after at least part of step 404. The top shield 140 is also provided, via step 410.
Using the method 400, the transducers 100, 100′, 100″, 100′″, 300, 300′, 300″ and/or 300′″ may be fabricated. Thus, the benefits of one or more of the transducers 100, 100′, 100″, 100′″, 300, 300′, 300″ and/or 300′″ may be achieved.
The pinning layer 160 is deposited, via step 422. Step 422 may include depositing an AFM layer, such as IrMn. The pinning layer 160 may also be annealed in a magnetic field. However, the annealing may take place after deposition of other portions of the magnetic transducer 100′.
The magnetic/third reference layer 162 may be provided, via step 424. The magnetic/third reference layer 162 may be deposited directly on the pinning layer 160. Thus, the layers 160 and 162 may be exchange coupled. As a result, the magnetic moment of the layer 162 may be substantially fixed. The shield pinning structure 114′ may thus be fabricated in steps 422 and 424.
The nonmagnetic coupling layer 116 is provided, via step 426. Step 426 includes providing a desired thickness of the nonmagnetic coupling layer 116. Configuring the thickness of the layer 116 in step 426 allows for the desired magnetic coupling to be obtained between the pinning structure 114′ and the reference structure 118′.
The second reference layer 174 is provided, via step 428. Step 428 includes depositing desired ferromagnetic material(s) at the desired thickness(es). The nonmagnetic layer 172 is provided, via step 430. Step 430 includes depositing the nonmagnetic layer 172 at the thickness for the desired RKKY coupling. The first reference layer 170 may then be provided, via step 432. Step 432 includes depositing desired ferromagnetic material(s) at the desired thickness(es). Steps 430 and 432 may be repeated to provide a shield reference structure having more layers. Step(s) 432, 430 and/or 428 may also include milling the layer(s) 170, 172 and 174 to provide the desired width(s) in the cross-track direction and the desired length(s) in the stripe height direction.
Thus, the magnetic transducer 100′ may be fabricated. The method 420 may also be used to fabricate the transducer(s) 100, 100″, 100′″, 300, 300′, 300″ and/or 300′″. Thus, the benefits of one or more of the transducers 100, 100′, 100″, 100′″, 300, 300′, 300″ and/or 300′″ may be achieved. Consequently, shield-to-shield spacing for the transducer 100, 100′, 100″, 100′″, 300, 300′, 300″ and/or 300′″ may be reduced. Thus, readers for higher areal density disk drives may be fabricated.
This application is a continuation of U.S. patent application Ser. No. 14/862,895, filed on Sep. 23, 2015, the entirety of which is incorporated by reference herein.
Number | Name | Date | Kind |
---|---|---|---|
6016290 | Chen et al. | Jan 2000 | A |
6018441 | Wu et al. | Jan 2000 | A |
6025978 | Hoshi et al. | Feb 2000 | A |
6025988 | Yan | Feb 2000 | A |
6032353 | Hiner et al. | Mar 2000 | A |
6033532 | Minami | Mar 2000 | A |
6046885 | Aimonetti et al. | Apr 2000 | A |
6055138 | Shi | Apr 2000 | A |
6073338 | Liu et al. | Jun 2000 | A |
6078479 | Nepela et al. | Jun 2000 | A |
6081499 | Berger et al. | Jun 2000 | A |
6094803 | Carlson et al. | Aug 2000 | A |
6103073 | Thayamballi | Aug 2000 | A |
6108166 | Lederman | Aug 2000 | A |
6118629 | Huai et al. | Sep 2000 | A |
6125018 | Takagishi et al. | Sep 2000 | A |
6130779 | Carlson et al. | Oct 2000 | A |
6134089 | Barr et al. | Oct 2000 | A |
6160684 | Heist et al. | Dec 2000 | A |
6163426 | Nepela et al. | Dec 2000 | A |
6166891 | Lederman et al. | Dec 2000 | A |
6190764 | Shi et al. | Feb 2001 | B1 |
6193584 | Rudy et al. | Feb 2001 | B1 |
6195229 | Shen et al. | Feb 2001 | B1 |
6198608 | Hong et al. | Mar 2001 | B1 |
6198609 | Barr et al. | Mar 2001 | B1 |
6201673 | Rottmayer et al. | Mar 2001 | B1 |
6212153 | Chen et al. | Apr 2001 | B1 |
6215625 | Carlson | Apr 2001 | B1 |
6219205 | Yuan et al. | Apr 2001 | B1 |
6233116 | Chen et al. | May 2001 | B1 |
6304414 | Crue et al. | Oct 2001 | B1 |
6404600 | Hawwa et al. | Jun 2002 | B1 |
6504676 | Hiner et al. | Jan 2003 | B1 |
6611398 | Rumpler et al. | Aug 2003 | B1 |
6700738 | Sin et al. | Mar 2004 | B1 |
6760196 | Niu et al. | Jul 2004 | B1 |
6801411 | Lederman et al. | Oct 2004 | B1 |
6884148 | Dovek et al. | Apr 2005 | B1 |
6912106 | Chen et al. | Jun 2005 | B1 |
6947258 | Li | Sep 2005 | B1 |
6961221 | Niu et al. | Nov 2005 | B1 |
6989972 | Stoev et al. | Jan 2006 | B1 |
7006327 | Krounbi et al. | Feb 2006 | B2 |
7007372 | Chen et al. | Mar 2006 | B1 |
7012832 | Sin et al. | Mar 2006 | B1 |
7023658 | Knapp et al. | Apr 2006 | B1 |
7026063 | Ueno et al. | Apr 2006 | B2 |
7110289 | Sin et al. | Sep 2006 | B1 |
7111382 | Knapp et al. | Sep 2006 | B1 |
7119995 | Granstrom et al. | Oct 2006 | B2 |
7124654 | Davies et al. | Oct 2006 | B1 |
7154715 | Yamanaka et al. | Dec 2006 | B2 |
7199975 | Pan | Apr 2007 | B1 |
7211339 | Seagle et al. | May 2007 | B1 |
7212384 | Stoev et al. | May 2007 | B1 |
7283327 | Liu et al. | Oct 2007 | B1 |
7284316 | Huai et al. | Oct 2007 | B1 |
7292400 | Bishop | Nov 2007 | B2 |
7330339 | Gill | Feb 2008 | B2 |
7333295 | Medina et al. | Feb 2008 | B1 |
7337530 | Stoev et al. | Mar 2008 | B1 |
7354664 | Jiang et al. | Apr 2008 | B1 |
7417832 | Erickson et al. | Aug 2008 | B1 |
7419891 | Chen et al. | Sep 2008 | B1 |
7508627 | Zhang et al. | Mar 2009 | B1 |
7522377 | Jiang et al. | Apr 2009 | B1 |
7522379 | Krounbi et al. | Apr 2009 | B1 |
7522382 | Pan | Apr 2009 | B1 |
7639457 | Chen et al. | Dec 2009 | B1 |
7660080 | Liu et al. | Feb 2010 | B1 |
7672080 | Tang et al. | Mar 2010 | B1 |
7719795 | Hu et al. | May 2010 | B2 |
7800858 | Bajikar et al. | Sep 2010 | B1 |
7910267 | Zeng et al. | Mar 2011 | B1 |
7911735 | Sin et al. | Mar 2011 | B1 |
7911737 | Jiang et al. | Mar 2011 | B1 |
8008912 | Shang | Aug 2011 | B1 |
8065788 | Guruz et al. | Nov 2011 | B2 |
8072705 | Wang et al. | Dec 2011 | B1 |
8104166 | Zhang et al. | Jan 2012 | B1 |
8151441 | Rudy et al. | Apr 2012 | B1 |
8191237 | Luo et al. | Jun 2012 | B1 |
8194365 | Leng et al. | Jun 2012 | B1 |
8194366 | Li et al. | Jun 2012 | B1 |
8196285 | Zhang et al. | Jun 2012 | B1 |
8200054 | Li et al. | Jun 2012 | B1 |
8220140 | Wang et al. | Jul 2012 | B1 |
8222599 | Chien | Jul 2012 | B1 |
8225488 | Zhang et al. | Jul 2012 | B1 |
8227023 | Liu et al. | Jul 2012 | B1 |
8228633 | Tran et al. | Jul 2012 | B1 |
8307539 | Rudy et al. | Nov 2012 | B1 |
8310901 | Batra et al. | Nov 2012 | B1 |
8315019 | Mao et al. | Nov 2012 | B1 |
8316527 | Hong et al. | Nov 2012 | B2 |
8400731 | Li et al. | Mar 2013 | B1 |
8491801 | Tanner et al. | Jul 2013 | B1 |
8495813 | Hu et al. | Jul 2013 | B1 |
8498084 | Leng et al. | Jul 2013 | B1 |
8506828 | Osugi et al. | Aug 2013 | B1 |
8533937 | Wang et al. | Sep 2013 | B1 |
8603593 | Roy et al. | Dec 2013 | B1 |
8611054 | Shang et al. | Dec 2013 | B1 |
8611055 | Pakala et al. | Dec 2013 | B1 |
8630068 | Mauri et al. | Jan 2014 | B1 |
8634280 | Wang et al. | Jan 2014 | B1 |
8643980 | Fowler et al. | Feb 2014 | B1 |
8665561 | Knutson et al. | Mar 2014 | B1 |
8675318 | Ho et al. | Mar 2014 | B1 |
8675455 | Krichevsky et al. | Mar 2014 | B1 |
8703397 | Zeng et al. | Apr 2014 | B1 |
8711518 | Zeng et al. | Apr 2014 | B1 |
8711528 | Xiao et al. | Apr 2014 | B1 |
8749790 | Tanner et al. | Jun 2014 | B1 |
8760818 | Diao et al. | Jun 2014 | B1 |
8780498 | Jiang et al. | Jul 2014 | B1 |
8780505 | Xiao | Jul 2014 | B1 |
8792208 | Liu et al. | Jul 2014 | B1 |
8792312 | Wang et al. | Jul 2014 | B1 |
8793866 | Zhang et al. | Aug 2014 | B1 |
8797680 | Luo et al. | Aug 2014 | B1 |
8797684 | Tran et al. | Aug 2014 | B1 |
8797686 | Bai et al. | Aug 2014 | B1 |
8797692 | Guo et al. | Aug 2014 | B1 |
8813324 | Emley et al. | Aug 2014 | B2 |
8922953 | Childress | Dec 2014 | B1 |
9472216 | Mauri | Oct 2016 | B1 |
9659586 | Sapozhnikov | May 2017 | B1 |
9679591 | Hao | Jun 2017 | B1 |
20020131215 | Beach | Sep 2002 | A1 |
20100290157 | Zhang et al. | Nov 2010 | A1 |
20110069417 | Kawamori et al. | Mar 2011 | A1 |
20110086240 | Xiang et al. | Apr 2011 | A1 |
20110276287 | Iben et al. | Nov 2011 | A1 |
20120087045 | Yanagisawa et al. | Apr 2012 | A1 |
20120111826 | Chen et al. | May 2012 | A1 |
20120216378 | Emley et al. | Aug 2012 | A1 |
20120237878 | Zeng et al. | Sep 2012 | A1 |
20120298621 | Gao | Nov 2012 | A1 |
20120327537 | Singleton et al. | Dec 2012 | A1 |
20130216702 | Kaiser et al. | Aug 2013 | A1 |
20130216863 | Li et al. | Aug 2013 | A1 |
20130257421 | Shang et al. | Oct 2013 | A1 |
20140153137 | McKinlay | Jun 2014 | A1 |
20140154529 | Yang et al. | Jun 2014 | A1 |
20140175050 | Zhang et al. | Jun 2014 | A1 |
20140268417 | Singleton | Sep 2014 | A1 |
20140293474 | Yamane | Oct 2014 | A1 |
20150098155 | Lapicki et al. | Apr 2015 | A1 |
20150109702 | Li et al. | Apr 2015 | A1 |
20150116867 | Childress et al. | Apr 2015 | A1 |
20150170686 | Singleton et al. | Jun 2015 | A1 |
20150318004 | Singleton et al. | Nov 2015 | A1 |
20150325260 | Singleton et al. | Nov 2015 | A1 |
20150332713 | Du et al. | Nov 2015 | A1 |
20160035378 | Quan et al. | Feb 2016 | A1 |
20160351212 | Okawa et al. | Dec 2016 | A1 |
20170033278 | Lapicki | Feb 2017 | A1 |
Entry |
---|
Final Office Action issued on U.S. Appl. No. 14/862,895, dated Nov. 3, 2016. |
Non-Final Office Action issued on U.S. Appl. No. 14/862,895, dated May 6, 2016. |
Notice of Allowance on U.S. Appl. No. 14/862,895, dated Feb. 6, 2017. |
Number | Date | Country | |
---|---|---|---|
20170249959 A1 | Aug 2017 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 14862895 | Sep 2015 | US |
Child | 15597342 | US |