Number | Date | Country | Kind |
---|---|---|---|
62-300356 | Nov 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4092176 | Kozai et al. | May 1978 | |
4854337 | Bunkenburg | Aug 1989 | |
4902350 | Steele | Feb 1990 |
Number | Date | Country |
---|---|---|
55-1114 | Jan 1980 | JPX |
60-72233 | Apr 1985 | JPX |
61-207022 | Sep 1986 | JPX |
56-60022 | May 1981 | JPX |
Entry |
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International Electronics, vol. 1, No. 2, Feb. 1961, pp. 27-28: "Ultrasonics Cleans Delicate Parts Really Clean". |
JP-A-61 15 334 (Tasu Gijutsu Kenkyusho K.K.) 23-01-1986. |
JP-A-61 79 234 (Matsushita Electronics Corp.) 4/1986. |
VLSI Process Data Handbook; Toru Hara et al.; 1982, (pp. 271-274). |