Number | Date | Country | Kind |
---|---|---|---|
59-129519 | Jun 1984 | JPX | |
59-137547 | Jul 1984 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3471396 | Davidse | Oct 1969 | |
4109157 | Tanaka et al. | Aug 1978 | |
4252595 | Yamamoto et al. | Feb 1981 | |
4253907 | Parry et al. | Mar 1981 | |
4264393 | Gorin et al. | Apr 1981 | |
4292153 | Kudo et al. | Sep 1981 | |
4353777 | Jacob | Oct 1982 | |
4496448 | Tali et al. | Jan 1985 | |
4557819 | Meacham et al. | Dec 1985 | |
4566941 | Yoshida et al. | Jan 1986 |
Entry |
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Preparation of A-Si:H Films and Devices in the Interdigital Vertical Electrode Deposition Apparatus by H. Sakai et al, May 1981, pp. 76-78, Fuji Electric Corporate Research and Development Ltd. |