Claims
- 1. A process for securing a low thermally conductive cap to a high thermally conductive substrate, comprising the steps of:
- (a) securing at least one seal band to the periphery of said high thermally conductive substrate, wherein said seal band forms a picture frame on the surface of said high thermally conductive substrate,
- (b) securing at least one first high thermally conductive material to said at least one seal band,
- (c) securing at least one low thermally conductive material to said at least one first high thermally conductive material,
- (d) securing at least one second high thermally conductive material to said at least one low thermally conductive material, and
- (e) securing said low thermally conductive cap to said at least one second high thermally conductive material.
- 2. The process of claim 1, wherein said seal band is selected from a group consisting of nickel/gold, gold/tin, tin/silver and alloys thereof.
- 3. The process of claim 1, wherein said first high thermally conductive material is selected from a group consisting of gold/tin, tin/silver, tin/lead and alloys thereof.
- 4. The process of claim 1, wherein said second high thermally conductive material is selected from a group consisting of gold/tin, tin/silver, tin/lead and alloys thereof.
- 5. The process of claim 1, wherein said low thermally conductive material is selected from a group consisting of nickel/iron, alloy 42, alloy 45 and alloys thereof.
- 6. The process of claim 1, wherein material for said low thermally conductive cap is selected from a group consisting of nickel/iron, alloy 42, alloy 45 and alloys thereof.
- 7. The process of claim 1, wherein said high thermally conductive substrate is an aluminum nitride substrate.
- 8. The process of claim 1, wherein said first high thermally conductive material is secured to said seal band on said high thermally conductive substrate using a furnace reflow process.
- 9. The process of claim 1, wherein said low thermally conductive cap is secured to said second high thermally conductive material using a seam sealing process.
- 10. The process of claim 1, wherein said low thermally conductive cap forms a hermetic seal with said high thermally conductive substrate.
- 11. The process of claim 1, wherein at least one semiconductor element is secured to said high thermally conductive substrate.
- 12. The process of claim 1, wherein at least one semiconductor element is secured to said high thermally conductive substrate, and wherein said semiconductor element is selected from a group consisting of semiconductor chip, thin film wiring and decoupling capacitor.
- 13. The process of claim 1, wherein said high thermally conductive substrate has a thermal conductivity in the range from about 140 W/mK to about 210 W/mK.
- 14. The process of claim 1, wherein said low thermally conductive material has a thermal conductivity in the range from about 14 W/mK to about 20 W/mK.
- 15. The process of claim 1, wherein said first or said second high thermally conductive material has a thermal conductivity in the range from about 50 W/mK to about 60 W/mK.
CROSS-REFERENCE TO RELATED PATENT APPLICATION
This Patent Application is related to U.S. Pat. No. 5,945,735, filed on Jan. 31, 1997, entitled "HERMETIC SEALING OF A SUBSTRATE OF HIGH THERMAL CONDUCTIVITY USING AN INTERPOSER OF LOW THERMAL CONDUCTIVITY", assigned to the assignee of the instant Patent Application, and the disclosure of which is incorporated herein by reference.
US Referenced Citations (16)
Foreign Referenced Citations (2)
Number |
Date |
Country |
5-144956 |
Jun 1993 |
JPX |
5-343548 |
Dec 1993 |
JPX |