Claims
- 1. A hole fill composition comprising:
a fluoropolymer dielectric material; a filler material; and a coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 2. The composition of claim 1 wherein said fluoropolymer dielectric material is selected from the group consisting of polymers of tetrafluoroethylene and its copolymers including tetrafluoroethylene and perfluoroalkoxy, tetrafluoroethylene and ethylene, and tetrafluoroethylene and at least 65 mole % of perfluoro-2,2-dimethyl-1,3-di-oxide; hexafluoropropylene; perfluoro-2-2-dimethyl-1,3 dioxide; polymers and copolymers of trifluorochloroethylene including trifluorochloroethylene and ethylene; polymers of perfluoroalkyl vinyl ether; and perfluorinated ethylene-propylene copolymers.
- 3. The composition of claim 1 wherein said fluoropolymer dielectric material comprises about 40 percent by weight to about 90 percent by weight of said composition.
- 4. The composition of claim 1 wherein said filler material comprises about 9 percent by weight to about 60 percent by weight of said composition.
- 5. The composition of claim 1 wherein said coupling agent comprises about 1 percent by weight to about 10 percent by weight of said composition.
- 6. The invention of claim 1 wherein said composition has a pH of about 8 to about 11.
- 7. A hole fill composition comprising:
a fluoropolymer dielectric material; a surfactant; a filler material; and a coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 8. The composition of claim 7 wherein said surfactant comprises a non-ionic surface active agent.
- 9. A hole fill composition comprising:
a fluoropolymer dielectric material; a silica filler material; and a coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 10. The composition of claim 9 wherein said fluoropolymer dielectric material is selected from the group consisting of polymers of tetrafluoroethylene and its copolymers, including tetrafluoroethylene and perfluoroalkoxy, tetrafluoroethylene and ethylene, and tetrafluoroethylene and at least 65 mole % of perfluoro-2,2-dimethyl-1,3-di-oxide; hexafluoropropylene; perfluoro-2-2-dimethyl-1,3 dioxide; polymers and copolymers of trifluorochloroethylene including trifluorochloroethylene and ethylene; polymers of perfluoroalkyl vinyl ether; and perfluorinated ethylene-propylene copolymers.
- 11. The composition of claim 9 wherein said fluoropolymer dielectric material comprises about 40 percent by weight to about 90 percent by weight of said composition.
- 12. The composition of claim 9 wherein said silica of said silica filler is selected from the group consisting of crystalline silica, fumed silica, synthetic silica, precipitated silica, and amorphous silica.
- 13. The composition of claim 9 wherein said silica filler material comprises about 9 percent by weight to about 60 percent by weight of said composition.
- 14. The composition of claim 9 wherein said silica of said silica filler material is comprised of particles, each particle having a size of from about 0.1 micron to about 40 microns.
- 15. The composition of claim 14 wherein said particles of silica are substantially spherical or spheroidal.
- 16. The composition of claim 9 wherein said coupling agent comprises about 1 percent by weight to about 10 percent by weight of said composition.
- 17. The invention of claim 9 wherein said composition has a pH of about 8 to about 11.
- 18. A hole fill composition comprising:
a fluoropolymer dielectric material; a surfactant; a silica filler material; and a coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 19. The composition of claim 18 wherein said surfactant comprises a non-ionic surface active agent.
- 20. A hole fill composition comprising:
a fluoropolymer dielectric material; a filler material; and a fluorosilane coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 21. The composition of claim 20 wherein said fluoropolymer dielectric material is selected from the group consisting of polymers of tetrafluoroethylene and its copolymers, including tetrafluoroethylene and perfluoroalkoxy, tetrafluoroethylene and ethylene, and tetrafluoroethylene and at least 65 mole % of perfluoro-2,2-dimethyl-1,3-di-oxide; hexafluoropropylene; perfluoro-2-2-dimethyl-1,3 dioxide; polymers and copolymers of trifluorochloroethylene including trifluorochloroethylene and ethylene; polymers of perfluoroalkyl vinyl ether; and perfluorinated ethylene-propylene copolymers.
- 22. The composition of claim 20 wherein said fluoropolymer dielectric material comprises about 40 percent by weight to about 90 percent by weight of said composition.
- 23. The composition of claim 20 wherein said filler material comprises about 9 percent by weight to about 60 percent by weight of said composition.
- 24. The composition of claim 20 wherein said fluorosilane coupling agent includes alkoxy or halo groups attached to an Si group.
- 25. The composition of claim 20 wherein said fluorosilane coupling agent comprises about 1 percent by weight to about 10 percent by weight of said composition.
- 26. The invention of claim 20 wherein said composition has a pH of about 8 to about 11.
- 27. A hole fill composition comprising:
a fluoropolymer dielectric material; a surfactant; a filler material; and a fluorosilane coupling agent, said filler material having at least a partial coating of said coupling agent thereon.
- 28. The composition of claim 27 wherein said surfactant comprises a non-ionic surface active agent.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a division of application Ser. No. 09/863,961, filed May 23, 2001, now U.S. Pat. No. ______.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09863961 |
May 2001 |
US |
Child |
10460000 |
Jun 2003 |
US |