BRIEF DESCRIPTION OF THE DRAWINGS
For a more complete understanding of this disclosure, reference is now made to the following description, taken in conjunction with the accompanying drawing, in which:
FIG. 1 illustrates an interconnect structure formed using physical vapor deposition;
FIG. 2 illustrates an interconnect structure formed using ionized physical vapor deposition;
FIG. 3 illustrates an example interconnect structure formed using hybrid ionized physical vapor deposition according to one embodiment of this disclosure;
FIG. 4 illustrates an example method for hybrid ionized physical vapor deposition of via and trench liners according to one embodiment of this disclosure; and
FIGS. 5A through 5C illustrate example test results of interconnect structures formed using different techniques according to one embodiment of this disclosure.