Calvin F. Quate, 4th International Conference on Scanning Tunneling Microscopy/Spectroscopy, 1989, 510-2. |
Patent Abstracts of Japan (No. 2-38904), "Fine Displacing Mechanism and Scan Type Tunnel Microscope Using Same" (Kazuo Sato), vol. 14, No. 195, (Apr. 20, 1990). |
Kazuyoshi Sugihara, et al., "Piezoelectrically driven XY-teta Table for Submicron Lithography Systems," Review of Scientific Instruments, 60, No. 9, pp. 3024-3029 (Sep. 1989). |
E. E. Ehrichs, et al., "Etching of Silicon (111) with the Scanning Tunneling Microscope", Journal of Vacuum Science & Technology A, Second Series, vol. 8, No. 1, pp. 571-573 (Jan./Feb. 1990). |
Thomas R. Albrecht, et al., "Microfabrication of Integrated Scanning Tunneling Microscope", Journal of Vacuum Science & Technology A, Second Series, vol. 8, No. 1, pp. 317-318 (Jan./Feb. 1990). |
M. Elwenspoek, et al., "Transduction Mechanisms and their Applications in Micromechanical Devices", Micro Electro Mechanical Systems, IEEE Robotics and Automation Council, pp. 126-132 (Feb. 20-22, 1989). |
Kyoritsu Yamaka, "High Technology Sensor", p. 116 (Jan. 6, 1986). |
Thomas R. Albrecht, "Microfabrication of Integrated Scanning Tunneling Microscope", STM '89 Fourth International Conference on Scanning Tunneling Microscopy/Spectroscopy, p. 146 (Jul. 1989). |