Patent Application
20120235038
The present invention is directed to infrared gas detectors and infrared gas measuring devices.
In the past, there has been proposed an infrared gas measuring device designed to measure a gas based on the principle that a gas absorbs infrared with a specific wavelength. The infrared gas measuring device measures an absorbance of infrared (infrared ray) with an absorption wavelength depending on a molecular structure of a gas to be measured, and calculates a concentration of the gas on the basis of the measured absorbance (see JP 07-72078 A, JP 03-205521 A, and JP 10-281866 A).
JP 07-72078 A discloses an infrared gas detector including a filter configured to transmit infrared with a specific wavelength and a pyroelectric photodetector configured to detect infrared which has been transmitted by the filter. The filter is formed on the pyroelectric photodetector directly. Therefore, an increase of a heat capacity makes ensuring thermal insulation difficult, and therefore the response performance is likely to be decreased.
JP 03-205521 A discloses an infrared sensor including a package consisting of a case and a stem. The package accommodates a holder configured to house an infrared detection element. The case is provided with an opening allowing the infrared detection element to receive infrared through the opening. The opening is covered with a windowpane configured to transmit infrared. The windowpane is made of sapphire, for example. There is an optical filter attached to the holder so as to be placed in front of the infrared detection element. The optical filter includes a substrate. The substrate is provided at its first surface with a bandpass surface (transmission filter) configured to transmit infrared of a predetermined wavelength range. The substrate is provided at its second surface a short-long cutting surface (cut-off filter) configured to remove infrared in a wavelength range other than the predetermined wavelength range. Each of the transmission filter and the cut-off filter is a laminated film formed by stacking a Ge film and a SiO film. The SiO film absorbs infrared in a wavelength range having its lower limit greater than an upper limit of the wavelength range (transmission range) of infrared transmitted by the transmission filter. This may causes an increase of temperatures of the transmission filter and the cut-off filter. Consequently, the transmission filter and the cut-off filter may emit infrared in an absorption range. When the optical filter and the infrared detection element see an inhomogeneous temperature distribution, absorption of far infrared by the optical filter may cause a difference between an intensity of emitted infrared in a long-wavelength range and an intensity of received infrared of the infrared detection element. Therefore, the infrared sensor is likely to provide an output caused by an inhomogeneous temperature distribution.
In view of the above insufficiency, the present invention has been aimed to propose an infrared gas detector and an infrared gas measuring device which have their improved sensitivity improved and are fabricated at a lowered cost.
The infrared gas detector in accordance with the present invention includes an infrared reception member, a package configured to accommodate the infrared reception member, and an optical filter. The infrared reception member includes a plurality of thermal infrared detection elements each configured to detect infrared based on heat caused by received infrared. The thermal infrared detection elements are placed side by side. The package is provided with a window opening configured to allow the infrared reception member to receive infrared. The optical filter is attached to the package so as to cover the window opening, and includes a plurality of filter elements respectively corresponding to the plurality of the thermal infrared detection elements. Each of the filter elements includes a filter substrate made of an infrared transparent material, a transmission filter configured to transmit infrared of a selected wavelength, and a cut-off filter configured to absorb infrared of a wavelength longer than the selected wavelength. The transmission filter and the cut-off filter are formed over the filter substrate. The filter substrate is thermally coupled to the package. The transmission filters of the respective filter elements are configured to transmit infrared of the different selected wavelengths.
In a preferred aspect, the infrared reception member includes a pair of the thermal infrared detection elements. The thermal infrared detection element is a pyroelectric element or a thermopile. The thermal infrared detection elements in the pair are connected in anti-series or anti-parallel with each other.
Preferably, the infrared gas detector further comprises an amplifier circuit configured to amplify an output of the infrared reception member. The amplifier circuit is housed in the package.
In another preferred aspect, the infrared gas detector further comprises an amplifier circuit. The infrared reception member includes a pair of the thermal infrared detection elements. The thermal infrared detection element is a pyroelectric element or a thermopile. The amplifier circuit is a differential amplifier circuit configured to amplify a difference between outputs of the respective thermal infrared detection elements in the pair.
In another preferred aspect, the filter substrate is made of a Si substrate or a Ge substrate.
Preferably, the package is provided with a shield member made of a metal, the shield being configured to prevent transmission of an electromagnetic wave from an outside to an inside of the package. The filter substrate is electrically connected to the shield member.
In another preferred aspect, the filter substrate has a first surface facing an inside of the package and a second surface facing an outside of the package. The transmission filter is formed over the first surface of the filter substrate. The cut-off filter is formed over the second surface of the filter substrate.
In another preferred aspect, the filter substrates of the respective filter elements are provided as a single part.
In another preferred aspect, the transmission filter includes a first λ/4 multilayer, a second λ/4 multilayer, and a wavelength selection layer interposed between the first λ/4 multilayer and the second λ/4 multilayer. Each of the first λ/4 multilayer and the second λ/4 multilayer is fabricated by stacking plural kinds of thin films having different refractive indices and the same optical thickness. The wavelength selection layer has an optical thickness which is different from the optical thickness of the thin film and is selected based on the selected wavelength regarding the transmission filter. The cut-off filter is a laminated film fabricated by stacking plural kinds of thin films having different refractive indices. At least one of the plural kinds of the thin films of the cut-off filter is made of a far infrared absorption material having a property of absorbing far infrared.
The infrared gas measuring device in accordance with the present invention includes an infrared light source configured to emit infrared to a predetermined space and an infrared gas detector configured to receive infrared passing through the predetermined space. The infrared gas detector in accordance with the present invention includes an infrared reception member, a package configured to accommodate the infrared reception member, and an optical filter. The infrared reception member includes a plurality of thermal infrared detection elements each configured to detect infrared based on heat caused by received infrared. The thermal infrared detection elements are placed side by side. The package is provided with a window opening configured to allow the infrared reception member to receive infrared. The optical filter is attached to the package so as to cover the window opening, and includes a plurality of filter elements respectively corresponding to the plurality of the thermal infrared detection elements. Each of the filter elements includes a filter substrate made of an infrared transparent material, a transmission filter configured to transmit infrared of a selected wavelength, and a cut-off filter configured to absorb infrared of a wavelength longer than the selected wavelength. The transmission filter and the cut-off filter are formed over the filter substrate. The filter substrate is thermally coupled to the package. The transmission filters of the respective filter elements are configured to transmit infrared of the different selected wavelengths.
In a preferred aspect, the infrared gas measuring device further comprises a driving circuit configured to control the infrared light source such that the infrared light source emits infrared intermittently.
Preferably, the infrared light source includes a substrate, a holding layer formed over the substrate, an infrared emission layer formed over the holding layer, and a gaseous layer interposed between the substrate and the holding layer. The infrared emission layer is configured to emit infrared in response to receive heat generated when the infrared emission layer is energized. The gaseous layer is configured to suppress a decrease of a temperature of the holding layer while the infrared emission layer is energized, and to promote heat transmission from the holding layer to the substrate while the infrared emission layer is not energized.
Preferably, the gaseous layer has a thickness Lg in the rage of 0.05 Lg′ to 3 Lg′, wherein “f” [Hz] denotes a frequency of a sinusoidal voltage applied to the infrared emission layer, and αg [W/mK] denotes a thermal conductivity of the gaseous layer, and Cg [J/m3K] denotes a volumetric heat capacity of the gaseous layer, and Lg′=(2αg/ωCg)1/2(ω=2πf).
Preferably, the holding layer has heat conductivity lower than the substrate. The holding layer is configured to produce infrared transmitted from the holding layer to the infrared emission layer in response to absorbing heat generated by the energized infrared emission layer or reflecting infrared emitted from the infrared emission layer. The infrared emission layer is configured to transmit the infrared produced by the holding layer.
As shown in
The package 7 includes a stem 71 and a cap 72 which are made of a metal. Although the circuit block 6 is mounted on the stem 71, a spacer 9 made of a dielectric material is interposed between the circuit block 6 and the stem 71. The cap 72 is fixed to the stem 71 so as to envelop the circuit block 6. The circuit block 6 has portions electrically connected to plural (three) terminal pins 75. The terminal pin 75 is fixed to the stem 71 so as to penetrate the stem 71. The stem 71 is formed in a circular disk shape. The cap 72 is formed in a circular cylindrical shape and has an opened bottom. The stem 71 is fixed to the cap 72 to cover the opened bottom of the cap 72. Besides, the spacer 9 is fixed to the circuit block 6 and the stem 71 by use of an adhesive.
The cap 72 is a member of the package 7. The cap 72 has a front wall which is positioned in front of the infrared reception element 40. The cap 72 is provided at its front wall with a window opening 7a formed into a rectangular shape (a square shape, in the present embodiment). The window opening 7a is provided to allow the infrared reception element 40 to receive infrared via the window opening 7a. An infrared optical filter (optical filter) 20 is attached to an inside of the cap 72 so as to cover the window opening 7a. In brief, the optical filter 20 is arranged in front of the infrared reception element 40, and is fixed to the package 7 in such a manner to cover the window opening 7a of the package 7.
There are plural terminal holes 71b extending the stem 71 in a thickness direction of the stem 71b. The plural terminal pins 75 are inserted into the plural terminal holes 71b, respectively. The terminal pin 75 is fixed to the stem 71 by use of a sealing portion 74 while the terminal pin 75 penetrates the terminal hole 71b.
The cap 72 and the stem 71 are made of a steel plate. The stem 71 is provided with a flange 71c at its outer periphery. The cap 72 has an outer rim 72c which extends outward from a rear end of a periphery of the cap 72. The cap 72 is fixed to the stem 71 hermetically by welding the outer rim 72c to the flange 71c.
The circuit block 6 includes a first circuit board 62, a resin layer 65, a shield plate 66, and a second circuit board 67. The first circuit board 62 is a printed-wiring board (e.g., a composite copper-lined laminated board) having one surface on which an integrated circuit 63 is mounted and the other surface on which electronic chips 64 are mounted. The integrated circuit 63 and the electronic chips 64 are components of the above signal processing circuit. The resin layer 65 is formed on the mounted surface of the first circuit board 62 on which the electronic chips 64 are mounted. The shield plate 66 includes a dielectric substrate and a metal layer (hereinafter referred to as “shield layer”) formed on a surface of the dielectric substrate. For example, the dielectric layer is made of a glass epoxy resin, and the shield layer is made of a metal material (e.g., copper). The shield plate 66 is positioned on the resin layer 65. The second circuit board 67 is a printed-wiring board (e.g., a composite copper-lined laminated board). Mounted on the second circuit board 67 is the infrared reception element 40. The second circuit board 67 is placed on the shield plate 66. In a modified example, a shield layer made of a copper foil or a metal plate may be used as an alternative to the shield plate 66.
The integrated circuit 63 is mounted on a first surface (lower surface, in
The infrared reception element 40 includes a pair of the pyroelectric elements 41 and 42, and a pyroelectric element formation substrate 41 made of a pyroelectric material (e.g., lithium tantalate). The pyroelectric elements 41 and 42 are connected to each other in a reverse polarity. The pyroelectric elements 41 and 42 in the pair are arranged side by side on the pyroelectric element formation substrate 41. The infrared reception element 40 is a dual element device in which the two pyroelectric elements 41 and 42 are connected in anti-series with each other in order to obtain a differential output between the pyroelectric elements 41 and 42.
For example, the integrated circuit 63 includes an amplifier circuit (bandpass amplifier) 63a (see
Since the circuit block 6 of the present embodiment includes the shield plate 66, it is possible to prevent the oscillation which would otherwise occur due to capacitance coupling between the infrared reception element 40 and the above amplifier circuit, for example. Besides, the infrared reception element 40 may be configured to produce the differential output between the pyroelectric elements 41 and 42 in the pair. Therefore, for example, as shown in (c) of
The second circuit board 67 is provided with a thermal insulation space 67a penetrating the second circuit board 67 in a thickness direction thereof. The thermal insulation space 67a is formed in order to thermally insulate the pyroelectric elements 41 and 42 from the second circuit board 67. Therefore, a gap is formed between the shield plate 66 and each of the pyroelectric elements 41 and 42. Thus, it is possible to improve the sensitivity. Instead of forming the thermal insulation space 67a in the second circuit board 67, a supporting member may extend from the second circuit board 67. The supporting member is configured to support the infrared reception element 40 such that a gap is formed between the shield plate 66 and each of the pyroelectric elements 41 and 42.
There are through holes 62b, 65b, 66b, and 67b respectively extending the first circuit board 62, the resin layer 65, the shield plate 66, and the second circuit board 67 in a thickness direction thereof. The single terminal pin 75 is inserted into a set of the through holes 62b, 65b, 66b, and 67b. The infrared reception element 40 and the above signal processing circuit are electrically connected to each other via the terminal pins 75. Besides, when a boring process of forming through holes penetrating the circuit block 6 in a thickness direction thereof is performed after a process of stacking the first circuit board 62, the resin layer 65, the shield plate 66, and the second circuit board 67, the through holes 62b, 65b, 66b, and 67b can be formed by means of performing the boring process one time. With using such a process of fabricating device embedded substrates, it is possible to simplify a fabrication process and to easily make an electrical connection inside the circuit block 6.
As to the three terminal pins 75, the first one 75 (75a) is used for supplying power, and the second one 75 (75b) is used for outputting signals, and the third one 75 (75c) is used for grounding. The shield layer of the shield plate 66 is electrically connected to the terminal pin 75c used for grounding. The terminal pins 75a and 75b are fixed to the stem 71 hermetically by use of the sealing portions 74 and 74 (74a and 74b), respectively. The sealing portions 74a and 74b are made of a dielectric sealing glass The terminal pins 75c is fixed to the stem 71 hermetically by use of the sealing portion 74 (74c) which is made of metal. In short, the terminal pins 75a and 75b are electrically insulated from the stem 71 but the terminal pin 75c has the same electrical potential as the stem 71. Therefore, the ground potential is given to the shield plate 66. Besides, the potential of the shield plate 66 is not limited to the ground potential, but may be a specific potential enabling the shield plate 66 to have a shield function. In the present embodiment, the cap 72 and the stem 71 constitute a shield member configured to block an outside electromagnetic wave. In other words, the package 7 of the present embodiment includes the shield member made of metal and configured to prevent transmission of an electromagnetic wave from an outside to an inside of the package 7.
When the infrared gas detector of the present embodiment is fabricated, first, the circuit block 6 on which the infrared reception element 40 is mounted is placed on the spacer 9 fixed on the stem 71. Thereafter, the outer rim 72c of the cap 72 to which the infrared optical filter 20 is fixed so as to cover the window opening 7a is welded to the flange 71c of the stem 71. Thus, the package 7 is hermetically sealed. The inside of the package 7 is filled with dry-nitrogen in order to prevent a variation of characteristics of the infrared reception element 40 caused by an influence of humidity, for example. In the present embodiment, the package 7 is a can package. Therefore, the package 7 can have its improved shielding effect for exogenous noises. Further, the air tightness of the package 7 can be improved, and thus the package 7 can have its improved resistance to climate conditions. Alternatively, the package 7 may be a ceramics package which is provided with a shield layer made of a metal layer as the shield member and provides a shield effect.
The optical filter 20 includes a filter main body 20a and a flange portion 20b. The filter main body 20a includes a filter formation substrate (filter substrate)1, narrow band transmission filters (transmission filters) 2 (21 and 22), and a wideband cut-off filter (cut-off filter)3. The flange portion 20b extends from an outer periphery of the filter main body 20a (outer periphery of the filter substrate 1). The flange portion 20b is fixed to a periphery of the window opening 7a of the cap 72 by use of a bonding portion 58. Thus, the filter substrate 1 is thermally coupled to the package 7. In order to improve thermal conductance between the optical filter 20 and the cap 72, a high thermal conductive adhesive such as a silver paste (an epoxy resin containing metallic fillers) and a solder paste is used as the bonding portion 58. The filter main body 20a is formed into a rectangular shape (in the present embodiment, a square shape). The flange portion 20b has its outer periphery which is formed into a rectangular (in the present embodiment, a square shape). In the present embodiment, the filter main body 20a has a rectangular shape of a few mm SQ. However, a shape and dimensions of the filter main body 20a are not limited.
As shown in
The transmission filter 21 includes a first λ/4 multilayer (first multilayer) 21, a second λ/4 multilayer (second multilayer) 22, and a wavelength selection layer 23 (231) interposed between the first multilayer 21 and the second multilayer 22. The transmission filter 22 includes the first multilayer 21, the second multilayer 22, and the wavelength selection layer 23 (232) interposed between the first multilayer 21 and the second multilayer 22. Each of the first multilayer 21 and the second multilayer 22 is fabricated by stacking plural (two) kinds of thin films 21b and 21a having different refractive indices and the same optical thickness. The first multilayer 21 is formed on the first surface of the filter substrate 1. The second multilayer 21 is formed over the first multilayer 21. In other words, the second multilayer 22 is formed in an opposite side of the first multilayer 21 from the filter substrate 1. The wavelength selection layer 231 has an optical thickness which is different from the optical thickness of the thin film 21a and is selected based on the selected wavelength regarding the transmission filter 21. The wavelength selection layer 232 has an optical thickness which is different from the optical thickness of the thin film 21b and is selected based on the selected wavelength regarding the transmission filter 22. Besides, an acceptable range of a variation of the optical thickness of each of the thin films 21a and 21b is approximately ±1%. An acceptable range of a variation of a physical thickness is decided depending on the variation of the optical thickness.
The thin film 21b is a low refractive index layer which has a refractive index lower than the thin film 21a. For example, a material (low refractive index material) of the thin film 21b is Al2O3 which is one selected from far infrared absorption materials having a property of absorbing far infrared. The thin film 21a is a high refractive index layer which has a refractive index higher than the thin film 21b. For example, a material (high refractive index material) of the thin film 21a is Ge. The wavelength selection layer 231 is made of the same material as the second thin film 21b from the top of the first multilayer 21 which is located directly below the wavelength selection layer 231. The wavelength selection layer 232 is made of the same material as the second thin film 21b from the top of the first multilayer 21 which is located directly below the wavelength selection layer 232. The thin films 21b and 21b of the second multilayer 22 farthest from the filter substrate 1 are made of the above low refractive index material. In the present embodiment, the far infrared absorption material is not limited to Al2O3 but may be SiO2 and Ta2O5 which are oxidation products other than Al2O3. SiO2 has a refractive index lower than Al2O3. Therefore, with using SiO2, it is possible to increase a difference in a refractive index between the high refractive index material and the low refractive index material.
For example, a gas which may be generated in a house is CH4 (methane), SO3 (sulfur trioxide), CO2 (carbon dioxide), CO (carbon monoxide), and NO (nitric monoxide). A specific wavelength (absorption wavelength) for detecting (sensing) a gas depends on a gas to be detected. For example, the specific wavelength of CH4 (methane) is 3.3 μm. The specific wavelength of SO3 (sulfur trioxide) is 4.0 μm. The specific wavelength of CO2 (carbon dioxide) is 4.3 μm. The specific wavelength of CO (carbon monoxide) is 4.7 μm. The specific wavelength of NO (nitric monoxide) is 5.3 μm. In order to selectively detect the presence of infrared rays which are respectively corresponding to all the specific wavelengths listed in the above, the optical filter 20 needs to have the reflection band within an infrared wavelength range of approximately 3.1 μm to 5.5 μm. Further, the reflection width Δλ which is equal to or more than 2.4 μm is necessary. As shown in
In the present embodiment, each of the first multilayer 21 and the second multilayer 22 has a setting wavelength λ0 of 4.0 μm. Therefore, it is possible to decide a detection target gas from the gases listed in the above by selecting the wavelength selection layer (231 and 232) having the optical thickness corresponding to the detection target gas. When nH denotes a refractive index of the high refractive index material, the thin film 21a has a physical thickness of λ0/4nH. When nL denotes a refractive index of the low refractive index material, the thin film 21b has a physical thickness of λ0/4nL. For example, when the high refractive index material is Ge, nH is 4.0. Therefore, the thin film 21a has the physical thickness of 250 nm. For example, when the low refractive index material is Al2O3, nL is 1.7. Therefore, the thin film 21b has the physical thickness of 588 nm.
In
Accordingly, with appropriately selecting the optical thickness “nd” of the wavelength selection layer 23 without changing the configurations of the first multilayer 21 and the second multilayer 22, it is possible to sense a desired gas (e.g., CH4 identified by the specific wavelength of 3.3 μm, SO3 identified by the specific wavelength of 4.0 μm, CO2 identified by the specific wavelength of 4.3 μm, CO identified by the specific wavelength of 4.7 μm, and NO identified by the specific wavelength of 5.3 μm) or a fire corresponding to the specific wavelength of 4.3 μm. Besides, the range of the optical thickness “nd” from 0 nm to 1600 nm is corresponding to the range of the physical thickness “d” from 0 nm to 941 nm. As shown in
In the aforementioned instance, Al2O3 is adopted as the low refractive index material. Al2O3 is the far infrared absorption material which absorbs infrared having a wavelength longer than the upper limit of the infrared reflection band (i.e., the infrared reflection band defined by the transmission filters 21 and 22) defined by the first multilayer 21 and the second multilayer 22. Analysis is made to the five different far infrared absorption materials (MgF2, Al2O3, SiOX, Ta2O5, and SiNX).
In TABLE 1, the item “IB condition” indicates a condition of ion beam assist in the deposition process performed by the ion beam assisted evaporation apparatus. The IB condition “no IB” indicates nonuse of an ion beam. The IB condition “oxygen IB” indicates the use of an oxygen ion beam. The IB condition “Ar IB” indicates the use of an argon ion beam. In
Following TABLE 2 shows analysis results of the MgF2 film, the Al2O3 film, the SiOX film, the Ta2O5 film, and the SiNX film with regard to evaluation items “optical property: absorption”, “refractive index”, and “ease of deposition”.
With regard to the evaluation item “optical property: absorption”, evaluation was made on the basis of an absorption ratio for far infrared having a wavelength not less than 6 μm. The absorption ratio is calculated from the transmission spectrum shown in
TABLE 2 shows a slight difference among the five materials (MgF2, Al2O3, SiOX, Ta2O5, and SiNX) with regard to the evaluation item “ease of deposition”. Consequently, in consideration of the evaluation items “optical property: absorption” and “refractive index”, it is preferred that the far infrared absorption material is selected from Al2O3, SiOX, Ta2O5, and SiNX. In comparison to using SiOX or SiNX as the far infrared absorption material, using Al2O3 or T2O5 as the far infrared absorption material can improve the absorbability for far infrared. In consideration of increasing the difference in the refractive index between the high refractive index material and the low refractive index material, Al2O3 is preferable to T2O5. When SiNX is used as the far infrared absorption material, it is possible to improve moisture resistance of the thin film 21b made of the far infrared absorption material. When SiOX is used as the far infrared absorption material, it is possible to increase the difference in the refractive index between the high refractive index material and the low refractive index material and to reduce the number of thin films of each of the first λ/4 multilayer 21 and the second λ/4 multilayer 22.
The following explanation referring to
First, a first multilayer forming process is performed. In the first multilayer forming process, the first multilayer 21 is formed by alternately stacking the thin film 21b and the thin film 21a on the entire first surface of the filter substrate 1. The filter substrate 1 is a Si substrate. Each thin film 21b is made of Al2O3 being the low refractive index material and has a predetermined physical thickness (588 nm, in this instance). Each thin film 21a is made of Ge being the high refractive index material and has a predetermined physical thickness (250 nm, in this instance). After the first multilayer forming process, a wavelength selection layer forming process is performed. In the wavelength selection forming process, the wavelength selection layer 231 is deposited on the entire surface of the first multilayer 21. The wavelength selection layer 231 is made of the same material (Al2O3 being the low refractive index material, in this instance) as the second thin film 21b from the top of the first multilayer 21. The wavelength selection layer 231 has its optical thickness selected in accordance with the selection wavelength of the transmission filter 21. Thereby, the structure shown in (a) of
After the wavelength selection layer forming process, a resist layer forming process is performed. In the resist layer forming process, a resist layer 31 is formed by means of a photolithography technique so as to cover only the portion of the wavelength selection layer 231 corresponding to the transmission filter 21. Thereby, the structure shown in (b) of
Thereafter, a wavelength selection layer patterning process is performed. In the wavelength selection layer patterning process, the wavelength selection layer 231 is etched in order to remove its unwanted part. In this etching process, the resist layer 31 is used as an etching mask, and the top thin film 21a of the first multilayer 21 is used as an etching stopper layer. Thereby, the structure shown in (c) of
After the wavelength selection layer patterning process, a resist layer removing process is performed. In the resist layer removing process, the resist layer 31 is removed. Thereby, the structure shown in (d) of
After the resist layer removing process, a second multilayer forming process is performed. In the second multilayer forming process, the second multilayer 22 is formed by alternately stacking the thin film 21a and the thin film 21b on the entire surface of the wavelength selection layer 23. Each thin film 21a is made of Ge being the high refractive index material and has a predetermined physical thickness (250 nm, in this instance). Each thin film 21b is made of Al2O3 being the low refractive index material and has a predetermined physical thickness (588 nm, in this instance). Thereby, the structure shown in (e) of
In brief, with regard to the process of forming the transmission filters 21 and 22, the wavelength selection forming layer is performed one time during a fundamental process of alternately stacking, on the first surface of the filter substrate 1, the plural kinds (two kinds) of the thin films 21b and 21a having the different refractive indices and the same optical thickness. Thereby, the plural transmission filters 21 and 22 are formed. The wavelength selection layer forming process includes a wavelength selection layer depositing process and a wavelength selection layer patterning process. In the wavelength selection layer depositing process, after formation of a laminated film (the first multilayer 21, in this instance) in the fundamental process, the wavelength selection layer 23i (i=1, in this instance) is formed on the laminated film and is made of the same material as the second layer from the top of the laminated film. The optical thickness of the wavelength selection layer 23i (i=1, in this instance) is decided in accordance with the selection wavelength of the corresponding transmission filter 2i (i=1, in this instance) of the plural transmission filters 21, . . . , 2m (m=2, in this instance). In the wavelength selection layer patterning process, with regard to the wavelength selection layer 23 deposited in the wavelength selection layer depositing process, an unwanted portion other than a portion belonging to the corresponding one transmission filter 2i is etched. In the wavelength selection layer patterning process, the topmost layer of the laminated film is used as an etching stopper layer. Besides, with performing the wavelength selection layer forming process more than once during the aforementioned fundamental process, it is possible to form the optical filter 20 having the plural selection wavelengths. Therefore, it is possible to fabricate, from one chip, the optical filter 20 configured to sense all the aforementioned gasses (CH4, SO3, CO2, CO, and NO).
In the aforementioned fabrication process, the thin film is formed on the laminated film (the first multilayer 21, in this instance) already formed at the time of interrupting the fundamental process. The thin film is made of the same material as the second layer from the top of the already formed laminated film, and has the optical thickness selected in accordance with the corresponding transmission filter 2i (i=1, in this instance) of the plural transmission filters 21, . . . , 2m (m=2, in this instance). Subsequently, with regard to the thin film formed on the laminated film, a portion other than a portion used for the corresponding one transmission filter 2i (i=1, in this instance) is etched. Thereby, the single patterned wavelength selection layer 231 is formed. However, the plural patterned wavelength selection layers 23 may be formed. For example, when the wavelength selection layer 232 is made of the same material as the wavelength selection layer 231 and has its optical thickness less than the wavelength selection layer 231, the two patterned wavelength selection layers 231 and 232 may be formed by partially etching the thin film formed on the laminated film.
Alternatively, in the aforementioned fabrication process, performed between the first multilayer forming process and the second multilayer forming process may be a process of respectively forming the wavelength selection layers 231, . . . , 23m (m=2, in this instance) on the portions of the laminated film corresponding to the transmission filters 21, . . . , 2m (m=2, in this instance) by means of a mask evaporation technique.
In the aforementioned fabrication process, when SiOX or SiNX is used as the far infrared absorption material of the one thin film 21b of the two kinds of the thin films 21a and 21b while the other thin film 21a is made of Si, the ion beam-assisted evaporation apparatus employing Si as an evaporation source may be used. In this instance, the thin film 21a made of Si is deposited in a vacuum atmosphere. When the thin film 21b is made of SiOX being an oxidation product, the thin film 21b is deposited with exposed to the oxygen ion beam. When the thin film 21b is made of SiNX being a nitride, the thin film 21b is deposited with exposed to the nitrogen ion beam. According to the instance, it is possible to use the same evaporation source for forming the two kinds of the thin films 21a and 21b. Therefore, it is unnecessary to use the ion beam assisted evaporation apparatus with plural different evaporation sources, and therefore a fabrication cost can be lowered. Likewise, in the aforementioned fabrication process, when SiOX or SiNX is used as the far infrared absorption material of the one thin film 21b of the two kinds of the thin films 21a and 21b while the other thin film 21a is made of Si, sputtering apparatus employing Si as a target may be used. In this instance, the thin film 21a made of Si is deposited in a vacuum atmosphere. When the thin film 21b is made of SiOX being an oxidation product, the thin film 21b is deposited in an oxygen atmosphere. When the thin film 21b is made of SiNX being a nitride, the thin film 21b is deposited in a nitrogen atmosphere. According to the instance, it is possible to use the same target for forming the two kinds of the thin films 21a and 21b. Therefore, it is unnecessary to use the sputtering apparatus with plural different targets, and therefore the fabrication cost can be lowered.
For example, with appropriately selecting the optical thickness “nd” of each of the wavelength selection layers 231 and 232, it is possible to fabricate, from one chip, the infrared optical filter 20 having the transmission peak wavelengths of 3.8 μm and 4.3 μm as shown in
It is sufficient that each of the first multilayer 21 and the second multilayer 22 has a refractive index periodic structure. Each of the first multilayer 21 and the second multilayer 22 may be fabricated by stacking three or more kinds of thin films.
The following explanation is made to the cut-off filter 3.
The cut-off filter 3 is a laminated film fabricated by stacking plural (two) kinds of thin films 3a and 3b having different refractive indices. With regard to the cut-off filter 3, the thin film 3a is a low refractive index layer having a relatively low refractive index. The thin film 3a is made of Al2O3 which is one of far infrared absorption materials absorbing far infrared. The thin film 3b is a high refractive index layer having a relatively high refractive index. The thin film 3b is made of Ge. In this cut-off filter 3, the thin films 3a and 3b are stacked alternately. Although the number of thin films constituting the cut-off filter 3 is 11 in the present embodiment, the number is not limited to 11. In consideration of stability of the optical property of the cut-off filter 3, it is preferred that the topmost layer of the cut-off filter 3 which is farthest from the filter formation substrate 1 is the thin film 3a defined as the low refractive index layer. In the present embodiment, the far infrared absorption material is not limited to Al2O3 but may be SiO2 and Ta2O5 which are oxidation products other than Al2O3. SiO2 has a refractive index lower than Al2O3. Therefore, with using SiO2, it is possible to increase a difference in a refractive index between the high refractive index material and the low refractive index material. Alternatively, SiNX being the nitride may be adopted as the far infrared absorption material.
As mentioned in the above, with regard to the cut-off filter 3, the thin film 3a which is one of the two kinds of the thin films 3a and 3b is made of the Al2O3 which is the far infrared absorption material absorbing far infrared. However, it is sufficient that at least one of plural kinds of thin films constituting the cut-off filter 3 is made of the far infrared absorption material. For example, the cut-off filter 3 may be a laminated film formed by stacking the three kinds of thin films (e.g., a Ge film, an Al2O3 film, and an SiOX film) on the filter substrate 1 made of Si in the order of the Ge film, the Al2O3 film, the Ge film, the SiOX film, the Ge film, the Al2O3 film, the Ge film, . . . , from the nearest to the filter substrate 1. In this alternative instance, two of the three kinds of the thin films are made of the far infrared absorption material.
The aforementioned cut-off filter 3 absorbs infrared having a wavelength which is longer than the upper limit of the infrared reflection band defined by the transmission filters 21 and 22. The cut-off filter 3 is made of Al2O3 which is the far infrared absorption material absorbing infrared. Like the above transmission filters 21 and 22, examination was made to five kinds of the far infrared absorption materials, that is, MgF2, Al2O3, SiOX, Ta2O5, and SiNX.
In order to evaluate the effect of the ion beam assist, the present inventors prepared samples of the Al2O3 film. The samples were deposited on the Si substrate while exposed to different amounts of ion beam irradiation. The present inventors analyzed a property of the samples of the Al2O3 film by means of the FT-IR spectroscopy (Fourier transform infrared spectroscopy).
In contrast to the use of SiOX or SiNX as the far infrared absorption material, the use of Al2O3 or T2O5 as the far infrared absorption material as mentioned in the above can improve the absorption property with regard to far infrared.
Moreover, the present inventors measured the transmission spectra of the reference including the Al2O3 layer of 1 μm in thickness formed on the Si substrate. As a result, the present inventors obtained the actual measurement value illustrated by S50 shown in (a) of
The curve S60 in
In
When the optical filter 20 of the present embodiment is fabricated, the cut-off filter forming step is performed first and subsequently the transmission filters 21 and 22 are formed in a manner as mentioned in the above. In the cut-off filter forming step, the cut-off filter 3 is formed by alternately stacking the thin film 3a and the thin film 3b on the filter formation substrate 1. For example, the filter formation substrate 1 is the Si substrate, the thin film 3a is the Al2O3 film, and the thin film 3b is the Ge film
The following explanation referring
The infrared gas measuring device illustrated in
In a situation of using the infrared light source (such as a halogen lamp) 10 configured to produce infrared rays with heat, the infrared light source 10 shows an emittance spectrum much broader than that of a light emitting diode.
In the infrared gas measuring device illustrated in
The infrared light source 10 is not limited to a halogen lamp. For example, as shown in
A material of the heater layer 114 is not limited, but may be selected from W, Ta, Ti, Pt, Ir, Nb, Mo, Ni, TaN, TiN, NiCr, and a conductive amorphous silicon. With respect to the infrared emission element 110 illustrated in
For example, the measurement target gas is CO2, and the transmission filter 21 has its transmission peak wavelength λ1 of 3.9 μm, and the transmission filter 22 has its transmission peak wavelength λ2 of 4.3 μm. Further, the infrared light source 1 is a halogen lamp, and the intensity (emission power) of the light emitted from the infrared light source 10 varies as the curve illustrated in
P
1=τ1(Pa sin(ωt)+Pb) (1)
P
2
=T(C)τ2(Pa sin(ωt)+Pb) (2)
For example, the pyroelectric element 41 receives the infrared passing through the transmission filter 21 at its light receiving surface side of a positive polarity (+), and the pyroelectric element 42 receives the infrared passing through the transmission filter 22 at its light receiving surface side of a negative polarity (−). The output I1 of the pyroelectric element 41 is expressed by the following formula (3), and the output I2 of the pyroelectric element 42 is expressed by the following formula (4). In the respective formulae (3) and (4), constants concerning current conversion at the pyroelectric elements 41 and 42 are not shown.
I
1=ωτ1Pa cos(ωt) (3)
I
2
=−T(C)ωτ2Pa cos(ωt) (4)
As shown in (b) of
I=I
1
+I
2=ωτ1Pa cos(ωt)−T(C)ωτ2Pa cos(ωt) (5)
When τ1 is equal to 12, the output “I” of the infrared reception element 40 is expressed by the following formula (6).
I=ωτ
1
P
a cos(ωt)(1−T(C)) (6)
The absorption ratio T(C) is expressed by the following formula (7) on the basis of the Lambert-Beer law. In the formula (7), “a” denotes an absorption coefficient peculiar to a substance, and “C” denotes the concentration of the substance, and “L” denotes the length of the light path. The absorption coefficient is a constant determined by the absorption wavelength and the temperature of the substance.
T(C)=10−αCL (7)
Therefore, the output “I” of the infrared reception element 40 is expressed by the following formula (8) derived from the formulae (6) and (7).
I=ωτ
1
P
a cos(ωt)(1−10−αCL) (8)
In the infrared gas detector of the present embodiment as explained in the above, the paired pyroelectric elements 41 and 42 having the different polarities are connected in an inverse series manner. Therefore, it is possible to cancel the DC bias component (bias component caused by an undesired gas and/or outside light such as sunlight) of the pair of the pyroelectric elements 41 and 42. In brief, when the concentration of the measurement target gas is zero, the output of the infrared reception element 40 is zero. Further, it is possible to expand the dynamic range of the output of the infrared reception element 40. In a situation where the two pyroelectric elements 41 and 42 in the pair are formed in the single pyroelectric element formation substrate 41, it is possible to downsize the infrared gas detector even if the amplifier circuit 63a is housed in the package 7. Moreover, it is possible to increase the gain of the amplifier circuit 63a and improve the S/N ratio.
The infrared gas detector of the present embodiment includes the infrared reception element (infrared reception member) 40, the package 7, and the optical filter 20. The package 7 is configured to accommodate the infrared reception element 40. The infrared reception element 40 includes the plurality of the thermal infrared detection elements (pyroelectric elements) 41 and 42 each configured to detect infrared based on heat caused by the received infrared. The pyroelectric elements 41 and 42 are placed side by side. The package 7 is provided with the window opening 7a configured to allow the infrared reception element 40 to receive infrared. The optical filter 20 is attached to the package 7 so as to cover the window opening 7a. The optical filter 20 includes the plurality of the filter elements respectively corresponding to the plurality of the pyroelectric elements 41 and 42. Each of the filter elements includes the filter substrate 1 made of an infrared transparent material, the transmission filter 2 configured to transmit infrared of a selected wavelength, and the cut-off filter 3 configured to absorb infrared of a wavelength longer than the selected wavelength. The transmission filter 2 and the cut-off filter 3 are formed over the filter substrate 1. The filter substrate 1 is thermally coupled to the package 7. The transmission filters 21 and 22 of the respective filter elements are configured to transmit infrared of the different selected wavelengths.
According to the infrared gas detector of the present embodiment, heat generated in the cut-off filter 3 due to absorption of infrared at the cut-off filter 3 is dissipated via the package 7 efficiently. Therefore, it is possible to reduce an increase of the temperature of the transmission filters 21 and 22 and to prevent occurrence of the biased distribution of the temperature of the transmission filters 21 and 22. The sensitivity of the infrared gas detector can be improved at a lower cost. Further, in the infrared gas detector of the present embodiment, the circuit block 9 is housed in the package 7. When the temperature of circuit components of the circuit block 9 is increased, infrared is emitted from the circuit components and subsequently is reflected by the inner surface of the package 7. However, the cut-off filter 3 can absorb such infrared. Consequently, it is possible to increase the S/N ratio and improve the sensitivity. Besides, in the present embodiment, the two pyroelectric elements 41 and 42 in the pair are formed in the pyroelectric element formation substrate 41 and are connected in an inverse series or an inverse parallel manner. However, instead of making connection between the two pyroelectric elements 41 and 42 in the pair, the infrared gas detector may include an amplifier (differential amplifier) configured to amplify a difference between the outputs of the two pyroelectric elements 41 and 42 in the pair. Therefore, in contrast to a situation where the infrared gas detector includes amplifiers configured to amplify the outputs of the two pyroelectric elements 41 and 42 in the pair respectively, the infrared gas detector can be downsized and be fabricated at a lowered cost.
Moreover, in the infrared gas detector of the present embodiment, the filter substrate 1 has the first surface facing the inside of the package 7 and the second surface facing the outside of the package 7. The transmission filter 2 is formed over the first surface of the filter substrate 1. The cut-off filter 3 is formed over the second surface of the filter substrate 1. Therefore, it is possible to suppress transmission of heat generated by the absorption of the infrared in the cut-off filter 3 to the pyroelectric elements 41 and 42. Therefore, in contrast to the infrared gas detector including the cut-off filter 3 formed over the first surface of the filter substrate 1, it is possible to decrease the height of the package 7 and to improve the response performance of the infrared gas detector. In addition, since the transmission filters 21 and 22 are formed over the first surface of the filter substrate 1, it is possible to suppress occurrence of cross talk caused by infrared rays coming into the optical filter 20 along an oblique direction with regard to the thickness of the optical filter 20. Thus, it is possible to expand the light receiving region of the respective pyroelectric elements 41 and 42 and improve the sensitivity of the infrared gas detector.
For example, as shown in (a) of
Further, in the infrared gas detector of the present embodiment, each of the transmission filters 21 and 22 includes the first multilayer 21, the second multilayer 22, and the wavelength selection layer interposed between the first multilayer 21 and the second multilayer 22. Each of the first multilayer 21 and the second multilayer 22 is fabricated by stacking plural kinds of the thin films 21a and 21b having different refractive indices and the same optical thickness. The wavelength selection layer 23 has the optical thickness which is different from the optical thickness of the thin film (21a, 21b) and is selected based on the selected wavelength regarding the transmission filter (21, 22). Consequently, the optical filter 20 can be downsized and be manufactured at a lowered cost. Further, it is possible to decrease a distance between centers of the plural transmission filters 21 and 22 and reduce a difference in the length of the light path between detection light and reference light. Thus, each of the pyroelectric elements 41 and 42 of the infrared reception element 40 can have its improved light receiving efficiency. Moreover, in the infrared gas detector of the present embodiment, the plural filter elements share the filter substrate 1. Accordingly, in contrast to the infrared gas detector including the transmission filters 21 and 22 formed on the different filter substrates 1, it is possible to reduce a temperature difference between the transmission filters 21 and 22. Consequently, the detection accuracy and the sensitivity of the infrared gas detector can be improved. Besides, the plural filter elements may be provided as separate parts. In this arrangement, the package 7 is provided with the window openings in the number equal to the number of the filter elements. In brief, the optical filter 20 includes the plural filter elements each attached to the package 7 so as to cover the corresponding opening window 7a.
Additionally, in the infrared gas detector of the present embodiment, the cut-off filter 3 is a multilayer fabricated by stacking plural kinds of the thin films 3a and 3b having different refractive indices. At least one of the plural kinds of the thin films 3a and 3b is made of a far infrared absorption material having a property of absorbing far infrared. Consequently, an infrared cut-off function in the wide range from near infrared to far infrared results from a combination of a light interference effect given by the multilayer as the cut-off filter 3 and a far infrared absorption effect given by the thin film 3a as a member of the multilayer. Accordingly, the optical filter 20 can be manufactured without using the sapphire substrate. Therefore, the optical filter 20 can be manufactured at a lowered cost.
Further, in the infrared gas detector of the present embodiment, the transmission filters 21 and 22 also have an infrared cut-off function in the wide range from near infrared to far infrared. The infrared cut-off function results from a combination of a light interference effect and a far infrared absorption effect. The light interference effect is given by the first multilayer 21 and the second multilayer 22. The far infrared absorption effect is given by the infrared absorption material of the thin film 21b of the multilayer including the first multilayer 21, the wavelength selection layers 231 and 232, and the second multilayer 22. Consequently, it is possible to reduce the production cost of the optical filter 20 which has an infrared cut-off function in the wide range from near infrared to far infrared and allows transmission of infrared having the selected wavelength.
In the aforementioned optical filter 20, the far infrared absorption material is selected from oxidation products and nitrogen products. Therefore, the optical filter 20 does not suffer from the change in the optical property caused by the oxidation of the thin films 3a and 21b made of the far infrared absorption material. Further, in the aforementioned optical filter 20, each of the cut-off filter 3 and the transmission layers 21 and 22 has the upmost layer defined as a layer farthest from the filter substrate 1. The respective upmost layers are made of one selected from the oxidation products and the nitrogen products listed in the above. Accordingly, it is possible to prevent the change in physical properties of the upmost thin films 3a and 21b which would otherwise occur due to reaction with moisture or oxygen in the air or adsorption or attachment of an impurity. Consequently, the stability of the filter performance can be enhanced. Further, reflection occurring at a surface of each of the cut-off filter 3 and the transmission filters 21 and 22 can be suppressed. Thus, the filter performance can be improved.
Moreover, in the aforementioned infrared optical filter 20, the cut-off filter 3 is a laminated film fabricated by alternately stacking the thin films 3a and 3b. The thin film 3a is made of a far infrared absorption material, and the thin film 3b is made of Ge which is a high refractive index material greater in the refractive index than the far infrared absorption material. Therefore, in contrast to a situation where the high refractive index material is one selected from Si, PbTe, and ZnS, it is enabled to increase a difference in a refractive index between the high refractive index material and the low refractive index material. Consequently, it is possible to reduce the number of thin films constituting the cut-off filter 3. When Si is used as the high refractive index material, in contrast to a situation where ZnS is used as the high refractive index material, it is possible to increase the difference in the refractive index between the high refractive index material and the low refractive index material of the multilayer. Accordingly, the number of thin films constituting the cut-off filter 3 can be reduced. For a similar reason, it is possible to reduce the number of thin films of each of the transmission filters 21 and 22.
In the present embodiment, the filter substrate 1 is a Si substrate. The filter substrate 1 is not limited to a Si substrate, but may be a Ge substrate.
In the infrared gas detector of the present embodiment, the filter substrate 1 is one selected from a Si substrate and a Ge substrate, as mentioned in the above. Accordingly, in contras to a situation where the filter substrate 1 is one selected from a sapphire substrate, an MgO substrate, and a ZnS substrate, the infrared gas detector can be manufactured at a lowered cost. In addition, Ge has relatively high thermal conductivity, and Si has high thermal conductivity. Consequently, it is possible to suppress a rise in the temperature of the filter substrate 1, and suppress infrared emission caused by a rise in the temperature of the optical filter 20.
Further, in the infrared gas detector of the present embodiment, the package 7 is made of a metal. The filter substrate 1 is an electrically conductive substrate made of Si or Ge, for example. The filter substrate 1 is attached to the cap 72 of the package 7 by use of the bonding portion 58 made of an electrically conductive bonding material (e.g., a silver paste and a solder paste). In other words, the filter substrate 1 is electrically coupled to the package 7. Therefore, the electromagnetic shielding can be provided by the filter substrate 1 and the package 7. The infrared reception element 40 can be protected from radiation noises (electromagnetic noises) coming from outside. It is possible to increase the S/N ratio and improve the sensitivity.
Moreover, in the infrared gas detector of the present embodiment, the window opening 7a has a rectangular shape. In addition, the optical filter 20 is provided with a step 20c configured to contact with a periphery as well as an inner surface of the window opening 7a of the cap 72, such that the optical filter 20 is positioned in relation to the cap 72. The step 20c is fixed to the cap 72 by use of the bonding portion 58. Therefore, the optical filter 20 can be positioned in parallel with the infrared reception element 40 with high accuracy. Consequently, with regard to a direction along an optical axis of the transmission filter (21, 22) of the optical filter 20, it is possible to improve an accuracy of a distance between the transmission filter (21, 22) of the optical filter 20 and the corresponding pyroelectric element (41, 42) of the infrared reception element 40. Further, it is enabled to improve an accuracy of aligning the optical axis of the transmission filter (21, 22) with the optical axis of the light receiving surface of the corresponding pyroelectric element (41, 42).
Additionally, in the infrared gas detector of the present embodiment, the package 7 accommodates (the circuit components of) the amplifier circuit 63a configured to amplify the output of the infrared reception element 40. Therefore, it is possible to shorten the electrical path between the infrared reception element 40 and the amplifier circuit 63a. Further, the amplifier circuit 63a is protected by the electromagnetic shielding. It is possible to more increase the S/N ratio and improve the sensitivity.
In the aforementioned embodiment, the thermal infrared detection elements are the pyroelectric elements 41 and 42. The thermal infrared detection element is not limited to the pyroelectric element but may be one selected from a thermopile shown in
The thermal infrared detection element has a structure illustrated in
With regard to the thermal infrared detection element having the structure shown in
The infrared reception element 40 illustrated in
In the present embodiment, an explanation is made to an infrared gas measuring device applied to a gas leakage alarm, for example. Such an infrared gas measuring device includes an infrared light source 1001 and an infrared sensor (infrared detector) 1002, as shown in
The gas detection tube 1003 includes a conduit 1031 configured to guide infrared from the infrared light source 1001 to the infrared sensor 1002. The conduit 1031 has its inner surface configured to reflect infrared. For example, a reflection-film configured to reflect infrared is formed on the inner surface of the conduit 1031. For example, the reflection film is a metal film made of such as Au, and is formed on the entire inner surface of the conduit 1031 by use of a thin film formation method (e.g., a sputtering technique). In brief, a surface of the reflection film is used as the inner surface of the conduit 1031. Alternatively, the gas detection tube 1003 (the conduit 1031) may be made of a material reflecting infrared. As shown in the dashed line in
The gas detection tube 1003 includes multiple through holes 1032. Each through hole 1032 is configured to connect an inside space of the conduit 1031 to an outside space of the conduit 1031. The through hole 1032 penetrates a wall of the conduit 1031. Therefore, the detection target gas existing in the outside space of the conduit 1031 comes into the inside space of the conduit 1031 via the through hole 1032. When the detection target gas exists in the conduit 1031 of the gas detection tube 1003, a part of infrared emitted from the infrared light source 1001 is absorbed and/or reflected by the detection target gas. This causes the change in the intensity of the received light of the infrared sensor 1002. With detecting the change in the intensity of the received light, it is possible to detect the detection target gas and measure the concentration of the detection target gas. The present embodiment detects the detection target gas which exists in a monitoring space defined by the inside space of the conduit 1031.
The conduit 1031 may be formed into a straight shape. Preferably, the conduit 1031 is formed into a meander shape as shown in
When the conduit 1031 has a meander shape, it is possible to extend an infrared light path from the infrared light source 1001 to the infrared sensor 1002. Therefore, the distance that the infrared travels in the detection target gas existing in the conduit 1031 is increased. It is possible to easily detect the change in the infrared which is caused by the detection target gas existing in the conduit 1031. Further, the infrared is reflected by the inner surface of the conduit 1031 repeatedly. Therefore, the distance that the infrared travels in the detection target gas existing in the conduit 1031 is further increased. Consequently, with using the gas detection tube 1003 (the conduit 1031) in the form of a meander shape, it is possible to improve the sensitivity for the detection target gas.
Upon receiving an intermittent voltage from a drive circuit 1004, the infrared light source 1001 emits infrared rays intermittently. In other words, the drive circuit 1004 is configured to drive the infrared light source 1001 such that the infrared light source 1001 emits infrared beams intermittently. The infrared light source 1001 has a shorter activation period and a shorter deactivation period. The activation period is defined as a period starting at the time at which the drive circuit 1004 starts to energize the infrared light source 1001, and ending at the time at which the infrared light source 1001 starts to emit infrared. The deactivation period is defined as a period starting at the time at which the drive circuit 1004 terminates energizing the infrared light source 1001, and ending at the time at which the infrared light source 1001 terminates emitting infrared. A brief explanation of the infrared light source 1001 is made later.
The drive circuit 1004 applies a voltage in the form of a single pulse wave or a burst wave consisting of plural (about five to ten) pulse waves to the infrared light source 1001. Further, a time interval at which the drive circuit 1004 applies the voltage to the infrared light source 1001 is in the range of 10 to 60 seconds, for example. A continuous period (a pulse width of a single pulse) over which the drive circuit 1004 applies the voltage to the infrared light source 1001 depends on the response speed of the infrared sensor 1002. For example, the continuous period is in the range of 100 us to 10 ms. When the burst wave is used, the continuous period is about 100 ms, for example.
As shown in
The infrared sensor 1002 includes a metal package (can package) 1020 and two light reception elements 1021a and 1021b housed in the can package 1020. Each of the light reception elements 1021a and 1021b is a pyroelectric element. The package 1020 is provided with a single window opening 1022 which is placed in front of the two light reception elements 1021a and 1021b. The window opening 1022 is covered with a filter (optical filter) 1029. The filter 1029 is used for selecting a wavelength of infrared which comes into the respective light reception elements 1021a and 1021b from the inside space of the conduit 1031. The infrared sensor 1002 includes two lead pins 1024 extending from the package 1020. The two lead pins 1024 are used for electrically connecting the light reception elements 1021a and 1021b to a detection circuit 1005.
Each of the reception elements 1021a and 1021b may be one selected from a thermal infrared detection element and a quantum infrared detection element. Preferably, the thermal infrared detection element such as a pyroelectric element is used as the reception elements 1021a and 1021b. The thermal infrared detection element has better handling performance than the quantum infrared detection element. The thermal infrared detection element has the higher sensitivity and the lower cost than the quantum infrared detection element.
The filter 1029 includes two transmission filters (narrowband transmission filter portions) 1025a and 1025b and a single wideband cut-off filter (a removal filter, a cut-off filter) 1026. The transmission filters 1025a and 1025b are interposed in infrared light paths between the monitoring space (the inside space of the conduit 1031) and the light reception elements 1021a and 1021b, respectively. Each of the transmission filters 1025a and 1025b is configured to transmit infrared of a specific wavelength. The cut-off filter 1026 is configured to absorb infrared having a wavelength other than the specific wavelengths of infrared rays passing through the transmission filters 1025a and 1025b. The two transmission filters 1025a and 1025b are overlapped with the cut-off filter 1026.
The filter 1029 includes a filter substrate (filter formation substrate) 1023 made of Si. The two transmission filters 1025a and 1025b are placed side by side on a first surface (surface facing to the light reception elements 1021a and 1021b) of the filter substrate 1023. The cut-off filter 1026 is formed over a second surface (the opposite surface) of the filter substrate 1023. In other words, the transmission filters 1025a and 1025b are interposed in the infrared light paths between the monitoring space and the light reception elements 1021a and 1021b, respectively. The cut-off filter 1026 is interposed between the monitoring space and the transmission filters 1025a and 1025b. Therefore, the removal filter 1026 narrows a wavelength range of infrared transmitted from the monitoring space to the transmission filters. Subsequently, the each of the transmission-filters 1025a and 1025b transmits only infrared in a specific wavelength range. Therefore, only infrared in the specific wavelength can reach a corresponding one of the light receiving elements 1021a and 1021b.
Each of the transmission filters 1025a and 1025b has transparent characteristics of transmitting infrared in a narrow range within a wavelength range from middle infrared to far infrared emitted from the emission element 1011. The transmission filter 1025a is designed to transmit infrared included in a specific wavelength range in which infrared is absorbed in the detection target gas. The other transmission filter 1025b is designed to transmit infrared included in a specific wavelength range in which infrared is not absorbed in the detection target gas.
For example, the transmission filter 1025a is configured to transmit infrared in the specific wavelength range corresponding to the detection target gas. When the detection target gas is a carbon dioxide, the transmission filter 1025a is configured to transmit infrared of a wavelength included in the specific wavelength range centered on 4.3 μm. When the detection target gas is a carbon monoxide, the transmission filter 1025a is configured to transmit infrared of a wavelength included in the specific wavelength range centered on 4.7 μm. When the detection target gas is a methane gas, the transmission filter 1025a is configured to transmit infrared of a wavelength included in the specific wavelength range centered on 3.3 μm. For example, the transmission filter 1025b is configured to transmit infrared of a wavelength included in the specific wavelength range centered on 3.9 μm within which these detection target gases do not absorb infrared.
For example, as shown in
The cut-off filter 1026 is an infrared absorption layer made of a material (infrared absorption material) absorbing infrared. The infrared absorption material is Al2O3 or Ta2O3, for example. Like the transmission filters 1025a and 1025b, the cut-off filter 1026 may be a multilayer filter. In brief, the cut-off filter 1026 may be a laminated film fabricated by stacking plural kinds of thin films having different refractive indices. For example, with regard to the cut-off filter 1026, a thin film defined as a low refractive index layer having a relatively low refractive index may be made of Al2O3 which is one of far infrared absorption materials absorbing far infrared. In contrast, a thin film defined as a high refractive index layer having a relatively high refractive index may be made of Ge. In other words, the multilayer filter includes at least one layer which is an infrared absorption layer configured to absorb far infrared having a wavelength longer than the upper limit of the specific wavelength ranges of the transmission filters 1025a and 1025b.
When the cut-off filter 1026 is the aforementioned infrared absorption layer, the cut-off filter 1026 can absorb infrared of an extensive wavelength range which has a lower limit greater than an upper limit of the specific wavelength ranges, without absorbing infrared of the specific wavelength ranges transmitted by the transmission filters 1025a and 1025b. Alternatively, when the cut-off filter is the aforementioned multilayer filter, it is possible to prevent that the light reception elements 1021a and 1021b receive infrared in an undesired wavelength range by use of reflection of infrared as well as absorption of infrared.
The filter substrate 1023 is configured to support the transmission filters 1025a and 1025b and the cut-off filter 1026. Further, the filter substrate 1023 is thermally coupled to the package 1020, thereby dissipating heat of the cut-off filter 1026. The filter substrate 1023 is made of a material of transmitting infrared of the specific wavelength ranges of the respective transmission filters 1025a and 1025b. For example, the filter substrate 1 is made of Si as mentioned in the above, but may be made of Ge or ZnS.
In order to detect the gas in the gas detection tube 1003 and measure the concentration thereof by use of outputs of the two light reception elements 1021a and 1021b, it is necessary to obtain a difference or a proportion regarding output values (outputs) of the light reception elements 1021a and 1021b. It is assumed that the outputs of the light reception elements 1021a and 1021b are Va and Vb respectively when the detection target gas does not exist in the gas detection tube 1003. Further, it is assumed that only the output of the light reception element 1021a is decreased by ΔV when the detection target gas exists in the gas detection tube 1003. In the aforementioned instance, with regard to the light reception element 1021a in front of which the transmission filter 1025a is placed, the intensity of the received light is decreased when the carbon dioxide exists. In contrast, with regard to the light reception element 1021b in front of which the transmission filter 1025b is placed, the intensity of the received light is not decreased even when the carbon dioxide exists. Therefore, the assumption that only the output of the light reception element 1021a is decreased in response to existence of the detection target gas is reasonable. In this example, the difference between the outputs of the light reception elements 1021a and 1021b is varied from (Va−Vb) to (Va−ΔV−Vb). The proportion of the outputs of the light reception elements 1021a and 1021b is varied from (Va/Vb) to {(Va−ΔV)/Vb}.
When the light reception elements 1021a and 1021b are pyroelectric elements, it is possible to obtain the difference between outputs of the light reception elements 1021a and 1021b by use of the polarity of the pyroelectric element. For example, the light reception elements 1021a and 1021b are connected in anti-series with each other. Alternatively, with supplying the outputs of the light reception elements 1021a and 1021b to a differential amplifier (differential amplifier circuit), it is possible to obtain the difference between the outputs of the light reception elements 1021a and 1021b irrespective of the kinds of the light reception elements 1021a and 1021b.
When the infrared sensor 1002 receives infrared corresponding to the single pulse wave from the infrared light source 1001, the infrared sensor 1002 is likely to consider the received infrared as a noise caused by external light, irrespective of whether the infrared sensor uses the difference or the proportion regarding the outputs of the light reception elements 1021a and 1021b. Therefore, it is preferred that the infrared sensor 1002 receives infrared corresponding to the burst wave from the infrared light source 1001. When the infrared is corresponding to the burst wave, the infrared sensor 1002 can calculate an average of the differences or the proportions obtained by receiving infrared multiple times. Consequently, it is possible to reduce the effect of the noise and improve the S/N ratio.
The present embodiment adopts the pyroelectric elements as the light reception elements 1021a and 1021b. The light reception elements 1021a and 1021b are connected in anti-series with each other so as to output the difference of the outputs of the light reception elements 1021a and 1021b to the detection circuit 1005. For example, the detection circuit 1005 judges whether or not the concentration of the carbon dioxide (the detection target gas) in the gas detection tube 1003 is not less than a predetermined concentration, on the basis of the difference of the outputs of the light reception elements 1021a and 1021b. The detection circuit 1005 may be placed inside or outside of the package 1020.
The detection circuit 1005 is configured to judge whether or not the concentration of the detection target gas inside the gas detection tube 1003 is not less than a prescribed concentration. The detection circuit 1005 is configured to, upon judging that the concentration of the detection target gas is not less than the prescribed concentration, output an alarm signal. The alarm signal is supplied to an alarm device configured to give a visual or audio alarm.
For example, the detection circuit 1005 includes a current-voltage converter, a comparator, and an output circuit. The current-voltage converter has an integration function of averaging the outputs of the light reception elements 1021a and 1021b respectively corresponding to the burst wave. The comparator is configured to compare a threshold with an output value of the current-voltage converter. The output circuit is configured to output the alarm signal in accordance with a comparative result obtained from the comparator. The detection circuit 1005 may have a configuration different from the above. The detection circuit 1005 may be configured to supply an output corresponding to the concentration of the detection target gas. With this arrangement, the detection circuit 1005 includes the current-voltage converter, a conversion circuit configured to convert the output value of the current-voltage circuit to the concentration of the detection target gas, and an output circuit configured to supply an output corresponding to the concentration of the detection target gas depending on a conversion result obtained from the conversion circuit.
The emission element 1011 is required to have a response speed in the range of about 10 μs to 10 ms in order to emit infrared in response to a single pulse wave or a burst wave supplied from the drive circuit 1004.
The emission element 1011 illustrated in
The substrate 1041 is a semiconductor substrate (e.g., a single crystal silicon substrate) in the form of a cuboid. Further, the holding layer 1042 is a porous part of the substrate 1041 formed by means of anodizing a region other than a periphery of the main surface of the substrate 1041. Conditions (e.g., composition of an electrolyte solution, a current density, and a treatment time) of the anode oxidation are selected depending on a conductive type and electrical conductivity of the substrate 1041.
The substrate 1041 is anodized in a hydrogen fluoride solution. Consequently, it is possible to obtain the holding layer 1042 which is a porous semiconductor layer (e.g., a porous silicon layer) having porosity of about 70%. The conductivity type of the substrate 1041 may be one selected from p-type and n-type. When porous treatment using anode oxidation is performed, a p-type silicon substrate may show porosity greater than that of an n-type silicon substrate. Therefore, it is preferred that a p-type silicon substrate is used as the substrate 1041.
The holding layer 1042 formed by performing the porous treatment using the anode oxidation on a part of the substrate 1041 shows decreased thermal capacity, decreased thermal conductivity, and improved thermal resistance. Further, this holding layer 1042 has a smoothed surface. In addition, in order to decrease the thermal conductivity of the holding layer 1042, a part or a whole of the holding layer 1042 may be oxidized or nitrided. The oxidized or nitrided holding layer 1042 shows improved electrical insulation.
The holding layer 1042 may be a semiconductor oxidation film formed by use of thermal oxidation. Instead of forming a semiconductor oxidation film as the holding layer 1042 by use of thermal oxidation, the holding layer 1042 made of materials including an oxidation product may be formed by use of a CVD method. In contrast to use of the porous treatment, use of the thermal oxidation or the CVD method can simplify a process of forming the holding layer 1042. Therefore, it is possible to improve mass productivity. When the CVD method is adopted for forming the holding layer 1042, a high thermal insulation oxidation product (e.g., alumina) or a material containing such an oxidation product can be used. The holding layer 1042 may be made of a porous body of such an oxidation product or a material.
The infrared emission layer 1043 is made of a material selected from TaN and TiN. Such a material (TaN and TiN) has superior oxidation resistance. Therefore, it is possible to use the infrared emission layer 1043 in an air atmosphere. Consequently, the emission element 1011 need not be housed in the package, and can be mounted on a substrate as a bare chip. Even when the emission element 1011 is housed in the package, it is unnecessary to cover, with the windowpane, the window opening which is formed in the package to transmit infrared emitted from the emission element 1011. Therefore, since infrared is not attenuated by the windowpane, an infrared emission efficiency can be improved. When the infrared emission layer 1043 made of the aforementioned material (TaN and TiN) has an appropriate thickness (several tens of nm) so as to have sufficient durability and enough response performance, sheet resistance of the infrared emission layer 1043 has a desired value.
In the deposition process of the infrared emission layer 1043 by use of the material (TaN and TiN), a nitrogen gas is flowed. Thus, the sheet resistance of the infrared emission layer 1043 can be adjusted by varying partial pressure of the nitrogen gas. For example, the infrared emission layer 1043 can be deposited on a predetermined position by means of reactive sputtering of TaN. the infrared emission layer 1043 having its sheet resistance of the desired value at a prescribed heating temperature can be formed by adjusting the partial pressure of the nitrogen gas. The infrared emission layer 1043 may be made of a material other than TaN and TiN. For example, the infrared emission layer 1043 may be made of nitride metal or carbonized metal.
For example, the intensity of the emitted infrared is varied depending on the voltage (drive voltage) applied between electrodes 1045. While the power supplied to the infrared emission layer 1043 is constant, the drive voltage is decreased with a decrease of the sheet resistance of the infrared emission layer 1043. The loss caused by an increase of the drive voltage is decreased with a decrease of the drive voltage. Additionally, since an intensity of an electric field inside the emission layer is decreased, it is possible to prevent breakage of the emission element 1011. In view of the above, the sheet resistance is preferred to be small.
The infrared emission layer 1043 has a negative resistance temperature coefficient of decreasing the sheet resistance with an increase of the temperature. Therefore, even if the drive voltage is constant, the sheet resistance is decreased with an increase of the temperature, and the current flowing through the infrared emission layer 1043 is increased. In brief, the power supplied to the infrared emission layer 1043 is increased with an increase of the temperature. Therefore, the infrared emission layer 1043 can have an increased maximum attained temperature.
For example, the infrared emission layer 1043 is made of TaN, and the resistance temperature coefficient is −0.001 [° C.−1]. In this example, when the maximum attained temperature is 500 [° C.] and the sheet resistance at the maximum attained temperature is 300 [Ωsq], the infrared emission layer 1043 has the sheet resistance of 571 [Ωsq] at the room temperature.
When the drive voltage is generated by use of a booster circuit, the infrared emission layer 1043 having the negative resistance temperature coefficient as mentioned in the above can increase the maximum attained-temperature yet an increase of a boost ratio of the booster circuit can be suppressed. Therefore, power loss in the booster circuit can be reduced.
The electrodes 1045 in a pair are formed on the surface of the infrared emission layer 1043. The electrodes 1045 are made of metal having high electrical conductivity. In
As described in the above, in the infrared light source 1001, the emission element 1011 is housed in the package 1010. The electrodes 1045 of the emission element 1011 are connected to the lead pins 1014 via the bonding wires 1015, respectively.
With regard to the emission element 1011, when the infrared emission layer 1043 is energized via the electrodes 1045 (when the voltage is applied between the electrodes 1045), the infrared emission layer 1043 is heated by the Joule heat generated by supplied power, thereby emitting infrared therefrom. When the infrared emission layer 1043 is not energized, emission of the infrared from the infrared emission layer is terminated.
When an energization period in which the infrared emission layer 1043 is energized is relatively short, the gaseous layer 1044 does not cause heat conduction and a convective flow. Thus, the gaseous layer 1044 does not conduct heat. Therefore, a decrease in the temperature of the holding layer 1042 is suppressed. Consequently, it is possible to keep the infrared emission layer 1043 at the high temperature, and promote the infrared emission.
While the infrared emission layer 1043 is not energized, when the substrate 1041 has a temperature different from the holding layer 1042, a gas existing in the gaseous layer 1044 causes heat conduction and a convective flow, thereby conducting heat from the holding layer 1042 to the substrate 1041. Therefore, the heat dissipation of the holding layer 1042 is promoted. Consequently, the infrared emission layer can be cooled down rapidly. Therefore, it is possible to terminate the infrared emission immediately.
A sinusoidal voltage may be applied between the electrodes 1045 in the pair. In this instance, the temperature of the infrared emission layer 1043 can be increased during a period of increasing the voltage, and the temperature of the infrared emission layer 1043 can be decreased during a period of decreasing the voltage. Therefore, with applying the sinusoidal voltage between the electrodes 1045, it is possible to modulate the intensity of the infrared emitted from the infrared light source 1001.
For example, as shown in (a) of
The peak wavelength λ [μm] of infrared emitted from the infrared emission layer 1043 complies with the Wien's displacement law. Therefore, a relation between the peak wavelength λ [μm] and the absolute temperature “T” [K] of the infrared emission layer 1043 satisfies the following formula (9).
λ=2898/T (9)
Therefore, with varying the temperature of the infrared emission layer 1043, it is possible to vary the peak wavelength of infrared emitted from the infrared emission layer 1043. Adjustment of the temperature of the infrared emission layer 1043 can be made by controlling the Joule heat generated per unit time by means of varying the amplitude and/or the waveform of the voltage applied between the electrodes 1045.
For example, the infrared emission layer 1043 can be configured to emit infrared with its peak wavelength of 3 to 4 [μm] in response to receiving the sinusoidal voltage with an effective value of 100 V at its electrodes 1045. The selection of the applied voltage enables the infrared emission layer 1043 to emit infrared with its peak wavelength equal to or more than 4 [μm].
In an instance where the sinusoidal voltage is applied between the electrodes 1045 of the infrared light source with the above structure, a thermal diffusion length “μ” of the holding layer 1042 is expressed by the following formula (10). In the following formula (10), αp [W/mK] denotes the thermal conductivity of the holding layer 1042. Cp [J/m3K] denotes volumetric heat capacity (product of specific heat capacity and density) of the holding layer 1042. “f” [Hz] denotes an responsive frequency (the double of the frequency of the applied voltage) of the infrared emission layer 1043. Besides, ω=2πf.
The holding layer 1042 is required to have its thickness Lp so as to, upon receiving heat changing like an AC from the infrared emission layer, transfer from the holding layer 1042 to the gaseous layer 1044 via a boundary surface between the holding layer 1042 and the gaseous layer 1044, infrared emitted from the infrared emission layer 1043 to the holding layer 1042. In other words, it is necessary that the thickness Lp of the holding layer 1042 is selected such that the infrared emitted from the infrared emission layer 1043 to the holding layer 1042 reaches the gaseous layer 1044 via the holding layer 1042. In brief, it is preferred that the thickness Lp of the holding layer 1042 is less than the heat diffusion length “μ” (Lp<μ).
For example, the holding layer 1042 is made of porous silicon. In this example, when “f”=10 [kHz] and “αp”=1.1 [W/mK] and Cp=1.05*106 [J/m3K], the heat diffusion length “μ” is equal to 5.8*10−6 [m] in accordance with the formula (10). Therefore, it is preferred that the holding layer 1042 has its thickness Lp less than 5.8 [μm].
In order to improve the emission efficiency of infrared, it is preferred that the holding layer 1042 is formed such that a resonance condition with regard to infrared is fulfilled. When the resonance condition is fulfilled, infrared from the infrared emission layer 1043 to the holding layer 1042 can be reflected by the boundary surface between the holding layer 1042 and the gaseous layer 1044. With this arrangement, it is possible to reduce a wasted amount of infrared radiation emitted backward from the infrared emission layer 1043. Therefore, in contrast to a situation where the resonance condition is not fulfilled, it is possible to enhance the intensity of infrared emitted from the infrared emission layer 1043. In order to achieve this effect, the thickness of the holding layer 1042 is selected such that the resonance condition of infrared with a desired wavelength is fulfilled.
In order that the holding layer 1042 fulfills the resonance condition regarding the infrared with the desired wavelength, it is necessary that the length of light path of the holding layer 1042 with regard to the infrared with the desired wavelength is an odd multiple of a quarter of the desired wavelength. When the thickness of the holding layer 1042 is denoted by Lp [m] and a refractive index of the holding layer 1042 is denoted by “n”, the length of the light path is expressed as “n*Lp”. Therefore, the resonance condition is expressed by the following formula (11), wherein “λ” denotes a wavelength in vacuum with regard to the infrared of the desired wavelength, and “m” denotes an integer.
As described in the above, in an example where the holding layer 1042 is made of porous silicon, the refractive index “n” of the holding layer 1042 is 1.35. When the desired wavelength is 4 [μm] and “m”=1, the thickness Lp of the holding layer 1042 is 0.74 [μm]. Since Lp=0.74 [μm]<5.8 [μm], the thickness Lp of the holding layer 1042 satisfies a relation of Lp<μ.
The aforementioned holding layer 1042 does not prevent an increase in the temperature of the infrared emission layer 1043. In contrast to the holding layer 1042 made of a dense material, the holding layer 1042 made of porous silicon can have the reduced volumetric heat capacity. Consequently, it is possible to reduce the volumetric heat capacity as a whole of the infrared emission layer 1043 and the holding layer 1042. Further, the heat conductivity and the volumetric heat capacity of the holding layer 1042 are decreased with an increase of porosity of the holding layer 1042.
Since the holding layer 1042 can have the reduced volumetric heat capacity and does not prevent an increase in the temperature of the infrared emission layer 1043, the temperature rising efficiency can be improved. Consequently, the emission element 1011 can respond to a variation of the applied voltage immediately. Accordingly, it is possible to increase the modulation frequency of the applied voltage.
Moreover, the holding layer 1042 has opposite surfaces respectively facing the infrared emission layer 1043 and the gaseous layer 1044. Since the gaseous layer 1044 has the heat conductivity less than that of the holding layer 1042, the thermal resistance of a heat transfer path from the infrared emission layer 1043 to the holding layer 1042 is increased. Consequently, the heat dissipation from the infrared emission layer 1043 to an atmosphere surrounding the infrared emission layer 1043 is suppressed. The curve S81 illustrated in
Further, it is preferred that a thickness Lg of the gaseous layer 1044 is selected so as to comply with the following condition. In an instance where the sinusoidal voltage is applied to the infrared emission layer 1043, the thickness Lg of the gaseous layer 1044 is selected to be in the range defined by the following formula (12). In this formula (12), “f” [Hz] denotes the frequency of the applied voltage, and αg [W/mK] denotes thermal conductivity of the gaseous layer 1044, and Cg [J/m3K] denotes volumetric heat capacity of the gaseous layer 1044. Besides, Lg′ (2αg/ωCg)1/2, and ω=2πf.
0.05Lg′<Lg<3Lg′ (12)
For example, when “f”=10 [kHz] and “αg”=0.0254 [W/mK] and Cg=1.21*103 [J/m3K], the formula (12) indicates 1.3 [μm]<Lg<77.5 [μm]. For example, when the thickness Lg of the gaseous layer 1044 is 25 [μm], the above formula (12) is satisfied. Preferably, the thickness Lg of the gaseous layer 1044 is selected from the range defined by the formula (12) so as to maximize a ratio of the temperature amplitude ratio.
When the temperature of the substrate 1041 is constant, the gaseous layer 1044 shows a thermal insulation performance or a heat dissipation performance depending on the temperature of the holding layer 1042 as well as the thickness Lg. With appropriately selecting the thickness Lg of the gaseous layer 1044 from the range defined by the above formula (12), as shown in (a) and (b) of
In brief, a period during which the gaseous layer 1044 has the thermal insulation performance can be substantially synchronized with a period of increasing the voltage applied to the infrared emission layer 1043. In addition, a period during which the gaseous layer 1044 has the heat dissipation performance can be substantially synchronized with a period of decreasing the voltage applied to the infrared emission layer 1043. Even when the voltage applied to the infrared emission layer 1043 is modulated at a high frequency, it is possible to vary the temperature of the infrared emission layer 1043 at a frequency substantially equal to the frequency of the voltage applied to the infrared emission layer 1043. Therefore, providing the gaseous layer 1044 can improve the response performance.
With regard to
With regard to
Besides,
With regard to the indirectly-heated emission element 1011, the infrared emission layer 1043 can be used as the holding layer 1042. Further, with respect to the indirectly-heated emission element 1011, it is necessary to improve the emission efficiency for the infrared with the desired wavelength. In order to achieve this requirement, the heater layer is formed so as to satisfy the resonance condition regarding the infrared with the desired wavelength in order that infrared emitted from the infrared emission layer 1043 passes through the heater layer. Besides, a reflection layer (not shown) configured to reflect infrared can be used as an alternative to the gaseous layer 1044. In brief, the emission layer 1011 may be configured to change the intensity of infrared depending on a pulse with duration in the range of about 10 μs to 10 ms.
As describe in the above, the infrared gas measuring device of the present embodiment includes the infrared light source 1001 and the infrared sensor 1002. The infrared light source 1001 is configured to emit infrared. The infrared sensor 1002 is configured to detect infrared emitted from the infrared light source 1001 and passing through the monitoring space into which the detection target gas is flowed. The infrared gas measuring device of the present embodiment detects the detection target gas in the monitoring space by use of the output of the infrared sensor 1001. The infrared sensor 1001 includes the light reception elements 1021a and 1021b, the transmission filters 1025a and 1025b, and the cut-off filter 1026. Each of the light reception elements 1021a and 1021b is configured to convert received infrared to an electric signal. The transmission filters 1025a and 1025b are interposed in incoming paths of infrared to the light reception elements 1021a and 1021b from the monitoring space, respectively. Each of the transmission filters 1025a and 1025b is configured to selectively transmit infrared rays in a specific wavelength range. The cut-off filter 1026 is interposed between the monitoring space and the transmission filters 1025a and 1025b. The cut-off filter 1026 is configured to absorb infrared in a wavelength range other than the specific wavelength ranges of the transmission filters 1025a and 1025b, thereby removing infrared over a wide range. The light reception elements 1021a and 1021b are configured to sense infrared in the specific wavelength range transmitted by the transmission filters 1025a and 1025b, respectively. The drive circuit 1004 is configured to drive the infrared light source 1001 such that the infrared light source 1001 emits infrared intermittently.
According to the infrared gas measuring device of the present embodiment, since the cut-off filter 1026 removes a large part of infrared of a wavelength unnecessary for detection of the detection target gas, the sensitivity for the detection target gas can be improved. When the cut-off filter 1026 is used, the cut-off filter 1026 is likely to emit infrared in response to the temperature rising caused by absorption of the unnecessary infrared by the cut-off filter 1026. However, the infrared light source 1001 emits infrared intermittently. Therefore, it is possible to suppress the temperature rising which would otherwise occur due to the absorption of the unnecessary infrared. It is possible to suppress a wavelength shift which would otherwise occur due to the temperature variation of the cut-off filter 1026 caused by the infrared radiation of the infrared light source 1001. Consequently, it is possible to utilize the function of removing the unnecessary infrared by the cut-off filter 1026, and detect the detection target gas at a high accuracy. Further, since the infrared light source 1001 emits infrared intermittently, in contrast to an instance where the infrared light source 1001 emits infrared continuously, power consumption can be reduced.
Further, the infrared light source 1001 includes the substrate 1041, the holding layer 1042 formed over the substrate 1041, the infrared emission layer 1042 formed over the holding layer 1041, and the gaseous layer 1044 interposed between the substrate 1041 and the holding layer 1042. The infrared emission layer 1043 is configured to emit infrared in response to heat generated due to energization of the infrared emission layer 1043. The gaseous layer 1044 is configured to suppress a decrease of the temperature of the holding layer 1042 while the infrared emission layer 1043 is energized, and to promote heat transmission from the holding layer 1042 to the substrate 1041 while the infrared emission layer 1042 is not energized.
According to the infrared light source 1001 including the infrared emission layer 1043, the holding layer 1042, and the gaseous layer 1055, the gaseous layer 1044 suppresses a decrease of the temperature of the holding layer 1042 while the infrared emission layer 1043 is energized. Therefore, it is possible to increase a proportion of an amount of infrared radiation to supplied power (power supplied to the infrared emission layer 1043). In contrast, the gaseous layer 1044 promotes the heat transfer from the holding layer 1042 to the substrate 1041 while the infrared emission layer 1043 is not energized, thereby decreasing the temperature of the holding layer 1042. Consequently, it is possible to terminate emitting infrared in a short time. In other words, the infrared emission layer 1043 immediately emits infrared in response to power supply to the infrared emission layer 1043 and immediately terminates emitting infrared in response to termination of the power supply to the infrared emission layer 1043. Therefore, the infrared emission layer 1043 shows an excellent response performance. Further, it is possible to emit infrared at a high efficiency with respect to the supplied power. Thus, in contrast to a situation where the infrared emission element 1011 is selected from an incandescent lamp and a lamp including a filament in a dielectric film, power consumption can be reduced.
When the cut-off filter 1026 is a multilayer filter including an infrared absorption layer, a wavelength of infrared to be removed can be adjusted by use of reflection infrared as well as absorption of infrared. Besides, a wavelength range of infrared absorbed in the cut-off filter 1026 depends on a material of the infrared absorption layer. In contrast, a wavelength range of infrared reflected by the cut-off filter 1026 depends on refractive indices and thicknesses of thin films constituting a laminated film. Thus, the complementary use of the absorption and the reflection can extend the wavelength range of infrared to be removed. In other words, even when the infrared 1001 is configured to emit infrared in a wide wavelength range, infrared with a wavelength unnecessary for detecting the detection target gas is removed as possible. Consequently, it can be suppressed that the light reception elements 1021a and 1021b receive infrared with a wavelength unnecessary for detecting the detection target gas. Thus, the sensitivity with regard to the detection target gas can be improved.
When the infrared absorption layer is made of one selected from Al2O3 and Ta2O3, in contrast to a situation where the infrared absorption layer is made of one selected from SiOX and SiNX, the infrared absorption layer can have an improved absorption rate for far infrared. Especially, when the infrared absorption layer is made of Al2O3, it is preferred that the filter substrate 1023 is made of Si. In this instance, since Si and Al2O3 have the substantially same hardness, there is no possibility that the multilayer filter (cut-off filter 1026) is removed from the filter substrate 1023 even when a variation of a surrounding temperature causes expansion or contraction of the filter 1029. Accordingly, stability and durability can be improved.
For example, each of the light reception elements 1021a and 1021b may be a thermal infrared detection element configured to sense infrared in a wavelength range corresponding to an entire wavelength range of infrared emitted from the infrared light source 1001. In this instance, with changing the configurations of the transmission filters 1025a and 1025b and the cut-off filter 1026, the infrared gas measuring device can detect various kinds of the detection target gases. Therefore, the infrared gas measuring devices configured to detect the different detection target gases can be manufactured by use of common parts. Accordingly, the infrared gas measuring device can be manufactured at a lowered cost.
As shown in
The support portion 1047 is made of a single crystal silicon greater in mechanical strength than a porous layer. The support portion 1047 is formed in a circular truncated cone and has a diameter greater towards its upper side than at its lower side. In the instance illustrated in
When the substrate 1041 is made of single crystal silicon, a part of the substrate 1041 may be left as the support portion 1047 in a process of forming the recessed portion 1046. With this arrangement, a stress occurring in a junction of the support portion 1047 and the substrate 1041 is reduced down to zero. In other words, since the support portion 1047 is formed integrally with the substrate 1041, the mechanical strength of the support portion 1047 can be improved.
As shown in
The infrared emission layer 0143 is configured to have transparency for infrared. Therefore, infrared emitted toward the infrared emission layer 1043 from the holding layer 1042 passes through the infrared emission layer 1043 and travels upwardly from the infrared emission layer 1043. In brief, the emission element 1011A emits infrared E1 emitted upwardly from the infrared emission layer 1043 and infrared E2 emitted upward of the infrared emission layer 1042 from the holding layer 1042 via the infrared emission layer 1043. With regard to the emission element 1011A, the infrared emission layer 1043 acts as a directly-heated infrared emission source, and the holding layer 1042 acts as an indirectly-heated infrared emission source. As apparent from the above, with regard to the emission element 1011A, the holding layer 1042 emits infrared by use of a part of energy radiated to the holding layer 1042 from the infrared emission layer 1043. Consequently, the emission efficiency of infrared with regard to the supplied power can be improved. In other words, it is possible to reduce the supplied power necessary to emit infrared radiation of a desired amount.
Also in the emission element 1011A, while the temperature of the infrared emission layer 1043 is increased, the gaseous layer 1044 thermally insulates the holding layer 1042 from the substrate 1041. The gaseous layer 1044 acts as a thermal insulation layer between the holding layer 1042 and the substrate 1041, thereby promoting an increase in the temperature of the infrared emission layer 1043. Consequently, the temperature rising period T1 can be shortened. While the temperature of the infrared emission layer 1043 is decreased, heat transferred from the infrared emission layer 1043 to the holding layer 1042 is dissipated to the substrate 1041 through the gaseous layer 1044. The gaseous layer 1044 acts as a heat dissipation layer between the holding layer 1042 and the substrate 1041, thereby promoting a decrease in the temperature of the infrared emission layer 1043. Consequently, the temperature falling period T2 can be shortened. Accordingly, as shown in (a) and (b) of
The holding layer 1042 is a porous layer. The porous layer is lower in a heat capacity and a thermal conductivity than a dense dielectric material. Therefore, the holding layer 1042 does not prevent an increase of the temperature of the infrared emission layer 1043. The temperature rising period T1 can be shortened.
Especially, it is preferred that the holding layer 1042 is made of porous silicon or porous polysilicon. With this preferred instance, the heat resistance of the holding layer 1042 can be improved. Consequently, it can be prevented that an increase of the temperature of the infrared emission layer 1043 causes deformation or breakage of the holding layer 1042.
The holding layer 1042 is fixed to the substrate 1041 at its outer periphery. Especially, in the instance illustrated in
Next, the following explanation referring to (a) to (e) in
In the process of manufacturing the emission element 1011A, a doping process is performed first. In the doping process, as shown in (a) of
After the doping process, an annealing process (annealing treatment) is performed. Thus, the impurities of the first impurity diffusion region 1048 and the second impurity diffusion region 1049 are diffused and are activated. Each of the first impurity diffusion region 1048 and the second impurity diffusion region 1049 is used as an n-type anode oxidation mask.
After the annealing process, a mask forming process is performed. In the mask forming process, a silicon dioxide film is formed on a whole of the first surface (upper surface, in (a) of
After the mask forming process, a pore forming process is performed. In the pore forming process, the anode oxidation is performed in order to make multiple pores in a part of the holding layer forming region other than the first impurity diffusion region 1048 and the second impurity diffusion region 1049. Thus, as shown in (c) of
With regard to the anode oxidation of the semiconductor substrate, it is known that pore forming or electrochemical polishing occurs depending on a relation between a supplied amount of fluorine ions and a supplied amount of holes. When the supplied amount of the fluorine ions exceeds the supplied amount of the holes, the pore forming occurs. When the supplied amount of the holes exceeds the supplied amount of the fluorine ions, the electrochemical polishing occurs.
In the pore forming process, a solution of hydrogen fluoride at a concentration of 30% is used as an electrolysis solution of the anode oxidation. The solution of hydrogen fluoride at a concentration of 30% is prepared by means of mixing a hydrofluoric solution with ethanol. In the anode oxidation process, the first surface of the substrate 1041 is soaked with the electrolysis solution. Thereafter, a voltage is applied between the aluminum electrode 1051 formed on the second surface of the substrate 1041 and a platinum electrode (not shown) placed to face the first surface of the substrate 1041 so as to supply a current at predetermined current density (e.g., 100 mA/cm2) for a prescribed time period. Thus, the holding layer 1042 having its thickness Lp of 1 μm is formed. In order to use the first impurity diffusion region 1048 and the second impurity diffusion region 1049 as the n-type mask for the anode oxidation, it is necessary that the first impurity diffusion region 1048 and the second impurity diffusion region 1049 are not exposed to light during the anode oxidation process.
As described in the above, it is sufficient that the thickness Lp of the holding layer 1042 is less than the length “μ” of the thermal diffusion.
After the pore forming process, an electrochemical polishing process is performed. In the electrochemical polishing process, the anode oxidation is performed under a condition different from that in the pore forming process. Thereby, the recessed portion 1046 (gaseous layer 1044) is formed in the substrate 1041. With regard to the electrochemical polishing process, since the first impurity diffusion region 1048 works as the mask, a part of the substrate 1041 beneath the first impurity diffusion region 1048 is not removed but remains. As a result, the support portion 1047 is formed. The support portion 1047 has a circular truncated cone shape having a diameter greater towards its upper side than at its lower side. As described in the above, with performing the electrochemical polishing process, the gaseous layer 1044 and the support portion 1047 are formed simultaneously.
As mentioned in the above, the pore forming or the electrochemical polishing occurs depending on the relation between the supplied amount of fluorine ions and the supplied amount of holes.
Accordingly, in the electrochemical polishing process, a solution of hydrogen fluoride at a concentration of 15% is used as an electrolysis solution of the anode oxidation. The solution of hydrogen fluoride at a concentration of 15% is prepared by means of mixing a hydrofluoric solution with ethanol. In the anode oxidation process, the holding layer 1042 and the anode oxidation mask 1050 are soaked with the electrolysis solution prepared. Thereafter, a voltage is applied between the aluminum electrode 1051 and the platinum electrode (not shown) placed to face the first surface of the substrate 1041 so as to supply a current at predetermined current density (e.g., 1000 mA/cm2) for a prescribed time period. Since the holding layer 1042 has multiple pores, a part of the substrate 1041 covered with the holding layer 1042 is polished. Thus, the gaseous layer 1044 having its thickness Lg of 25 μm is formed. In this process, since the first impurity diffusion region 1048 works as the mask, a part of the substrate 1041 beneath the support portion 1047 is not removed but remains.
As mentioned in the above, the thickness Lg of the gaseous layer 1044 is selected to fulfill the above formula (12).
In the electrochemical polishing process, the substrate 1041 is polished isotropically. Therefore, if the second impurity diffusion region 1049 is not formed in the substrate 1041, a part of the substrate 1049 adjacent to the periphery of the holding layer 1042 is polished, as shown in
In brief, the process of manufacturing the emission element 1011A includes a doping process (second doping process) prior to the mask forming process. In the second doping process, the second impurity diffusion region 1049 is formed. The second impurity diffusion region extends from the holding layer forming region to a region of the first surface of the substrate 1041 on which the anode oxidation mask 1050 is formed. The second impurity diffusion region 1049 works as the anode oxidation mask. Therefore, a part of the substrate 1041 beneath the second impurity diffusion region 1049 is not electrochemically polished along the thickness direction of the substrate 1041. Thus, the substrate 1041 supports the second impurity diffusion region 1049 from below. Accordingly, in the emission element 1011A, the second impurity diffusion region 1049 and a part of the substrate 1041 supporting the second impurity diffusion region 1049 from below function as a reinforcement member configured to reinforce connection between the holding layer 1042 and the substrate 1041. Consequently, it is possible to increase mechanical strength of a junction between the holding layer 1042 and the substrate 1041, and prevent the deformation and the breakage of the holding layer 1042.
After the electrochemical polishing process, an infrared emission layer forming process is performed. In the infrared emission layer forming process, the infrared emission layer 1043 is formed on the holding layer 1042 (a region surrounded by the anode oxidation mask 1050). In the instance shown in (e) of
After the infrared emission layer forming process, an electrode forming process is performed. In the electrode forming process, the electrodes 1045 are formed on the opposite ends (left and right ends, in (e) of
Through the aforementioned processes, the emission element 1011A illustrated in (e) of
As described in the above, the process of fabricating the emission element 1011A includes the mask process, the pore forming process, the electrochemical polishing process, and the infrared emission layer forming process. The mask process is defined as a process of forming the anode oxidation mask 1050. The pore forming process is defined as a process of forming the holding layer 1042 being a porous layer by means of the anode oxidation. The electrochemical polishing process is defined as a process of forming the gaseous layer 1044 by means of the electrochemical polishing utilizing the anode oxidation. The infrared emission layer forming process is defined as a process of forming the infrared emission layer 1043.
According to the process of manufacturing the emission element 1011A as mentioned in the above, after the holding layer 1042 is formed by use of the porous treatment utilizing the anode oxidation in the pore forming process, the gaseous layer 1044 is formed by use of the electrochemical polishing treatment utilizing the anode oxidation in the electrochemical polishing process. In brief, with performing the anode oxidation treatment based on the different conditions twice, it is possible to easily form the holding layer 1042 over the recessed portion 1046 of the substrate 1041. Further, the holding layer 1042 can have a decreased volumetric thermal capacity and an increased thermal insulation performance.
Further, the process of manufacturing the emission element 1011A includes the doping process (first doping process) prior to the mask process. The doping process is defined as a process of forming the first impurity diffusion layer 1048 in the holding layer forming region. In the pore forming process, pores are not formed in the first impurity diffusion region 1048. Further, in the electrochemical polishing process, the first impurity diffusion region 1048 is not electrochemically polished. Thus, the first impurity diffusion region 1048 works as the anode oxidation mask. Therefore, a part of the substrate 1041 beneath the first impurity diffusion region 1048 is not electrochemically polished along the thickness direction of the substrate 1041. Thus, the support portion 1047 is formed beneath the first impurity diffusion region 1048.
As mentioned in the above, the first impurity diffusion region 1048 is used as the anode oxidation mask. Therefore, it is unnecessary to form an anode oxidation mask 1050 on the holding layer forming region in the mask process. When such an anode oxidation mask 1050 is formed on the holding layer forming region, there is a difference in level between the surface of the anode oxidation mask 1050 and the surface of the holding layer forming region (the first surface of the substrate 1041). In brief, with forming the first impurity diffusion region 1048, it is unnecessary to form the additional anode oxidation mask 1050 producing the difference in level in the mask process. Consequently, it is possible to prevent the breakage of the infrared emission layer 1043 formed on the upper surface of the holding layer 1042 which would otherwise occur at the periphery of the anode oxidation mask 1050. In addition, it can be prevented that the infrared emission layer 1043 has nonuniform resistance. Thus, it is possible to manufacture the emission element 1011A capable of operating stably.
Moreover, after the electrochemical polishing process, a drying process is performed. The drying process is defined as a process of purifying and drying the substrate 1041 and the holding layer 1042. Since the support portion 1047 is formed through the electrochemical polishing process, it is possible to prevent that the holding layer 1042 is stuck to the substrate 1041 in the drying process.
With appropriately selecting the conductivity type and the resistivity of the substrate 1041 and the condition (e.g., the composition of the electrolyte solution, the current density, and the treatment time) of the porous treatment utilizing the anode oxidation, the aforementioned holding layer 1042 can be formed. For example, the substrate 1041 is a high resistance p-type silicon substrate having resistance of 100 Ωcm. In this instance, a highly-concentrated hydrofluoric acid solution of hydrofluoric acid at a concentration of about 25% is used as the electrolyte solution. The current density is a relatively high value such as 100 mA/cm2.
As described in the above, the holding layer 1042 illustrated in
With regard to the holding layer 1042, when the holding layer 1042 receives heat from the infrared emission layer 1043, the cavity radiation occurs in the macro-pore 1042. Therefore, the emission efficiency of infrared can be more improved. The nano-porous silicon portion 1042 provided with the nano-pores is formed in the macro-pore 1042b. Although forming the macro-pores 1042b in the holding layer 1042 causes a decrease of mechanical strength of the holding layer 1042, it is possible to suppress the decrease of the mechanical strength of the holding layer 1042 without preventing the cavity radiation occurring in the macro-pores 1042b. In addition, the thermal insulation performance of the holding layer 1042 can be improved.
When the nano-porous silicon portion 1042b is not formed in the macro-pore 1042b, the surface of the holding layer 1042 has multiple recessed or protruded portions in micro-meter scale. When the recessed or protruded portions in micro-meter scale exist in the surface of the holding layer 1042, it is impossible that the infrared emission layer 1043 has the thickness in the range of tens of nanometers. Meanwhile, when the nano-porous silicon portion 1042b is formed in the macro-pore 1042b, only multiple recessed or protruded fine portions in nano-meter scale exist in the surface of the holding layer 1042. Therefore, the thickness of the infrared emission layer 1043 does not suffer from a surface condition of the holding layer 1042 substantially. Therefore, it is possible to adjust the thickness of the infrared emission layer 1043 in the range of tens of nanometers.
In order to have the holding layer 1042 emit infrared, it is necessary that the holding layer 1042 has its thickness Lp not less than 0.5 μm. As described in the above, the thickness Lp of the holding layer 1042 is selected to be less than “μ” determined by the above formula (10).
In the emission element 1011B illustrated in
Since the infrared emission layer 1043 makes no direct contact with the support portion 1047, it can be suppressed that a relatively large temperature gradient occurs between the infrared emission layer 1043 and the support portion 1047. Consequently, it is possible to prevent the breakage of the infrared emission layer 1043 and the support unit 1047 which would otherwise occur due to large thermal stress caused by the temperature gradient.
Alternatively, the support portion 1047 may be configured to connect a lower surface of the exposed portion 1042d of the holding layer 1042 to the bottom of the recessed portion 1046, thereby supporting the holding layer 1042. This arrangement can have a distance between the infrared emission layer 1043 and the support portion 1047 greater than that of the instance shown in
Next, (f) of
Next, the following explanation referring to
In the process of manufacturing the emission element 1011C, a sacrifice layer forming process is performed first. In the sacrifice layer forming process, as shown in (a) of
After the sacrifice layer forming process, a polysilicon layer forming process is performed. In the polysilicon layer forming process, the aluminum electrode 1051 is formed on the second surface (lower surface, in (b) of
Besides, in the above, it is sufficient that the thickness Lp of the holding layer 1042 is less than the length “μ” determined by the above formula (10). With regard to the emission element 1011C, the thickness Lp of the holding layer 1042 is defined as a thickness of a part of the holding layer 1042 over the gaseous layer 1044.
After the polysilicon layer forming process, a doping process is performed. In the doping process, as shown in (c) of
After the doping process, a pore forming process is performed. In the pore forming process, the anode oxidation is performed in order to make multiple pores in a part of the polysilicon layer 1053 other than the impurity diffusion region 1054. Thus, as shown in (d) of
In the pore forming process, a solution of hydrogen fluoride at a concentration of 30% is used as an electrolysis solution of the anode oxidation. The solution of hydrogen fluoride at a concentration of 30% is prepared by means of mixing a hydrofluoric solution with ethanol. In the anode oxidation process, the polysilicon layer 1053 is soaked with the electrolysis solution. Thereafter, a voltage is applied between the aluminum electrode 1051 and a platinum electrode (not shown) placed on the surface of the polysilicon layer 1053 so as to supply a current at predetermined current density (e.g., 100 mA/cm2) for a prescribed time period. Thus, multiple pores are formed in the polysilicon layer 1053. As a result, the holding layer 1042 is formed. In order to use the impurity diffusion region 1054 as the n-type anode oxidation mask, it is necessary that the impurity diffusion region 1054 is not exposed to light during the anode oxidation process.
After the pore forming process, the etching process is performed. In the etching process, as shown in (e) of
After the etching process, an infrared emission layer forming process is performed. In the infrared emission layer forming process, the infrared emission layer 1043 is formed on the holding layer 1042. In the instance shown in (e) of
After the infrared emission layer forming process, an electrode forming process is performed. In the electrode forming process, the electrodes 1045 are formed on the opposite ends (left and right ends, in (e) of
Through the aforementioned processes, the emission element 10110 illustrated in (f) of
As described in the above, the process of fabricating the emission element 1011C includes the sacrifice layer forming process, the polysilicon layer forming process, the pore forming process, the etching process, and the infrared emission layer forming process. In the sacrifice layer forming process, the sacrifice layer 1052 is formed on a predetermined region of the first surface of the sacrifice layer forming process. In the polysilicon layer forming process, the polysilicon layer 1053 doped with the impurities is formed on the sacrifice layer 1052. In the pore forming process, the holding layer 1042 which is the porous layer is formed by means of anodizing the polysilicon layer 1053. In the etching process, the gaseous layer 1044 is formed by means of etching the sacrifice layer 1052 via the pores of the holding layer 1042.
According to the process of manufacturing the emission element 1011C as mentioned in the above, after the holding layer 1042 is formed by providing multiple pores in the polysilicon layer 1053 covering the sacrifice layer 1052, the gaseous layer 1044 is formed by means of etching and removing the sacrifice layer 1052 via the pores formed in the holding layer 1042. Therefore, it is possible to easily form the gaseous layer 1044 and the holding layer 1042.
Further, the process of manufacturing the emission element 1011C includes the doping process between the polysilicon layer forming process and the pore forming process. In the doping process, the impurity diffusion region 1054 is formed in the polysilicon layer 1053. Even if the anode oxidation is performed in the pore forming process, the impurity diffusion region 1054 does not become porous.
Therefore, in the etching process subsequent to the pore forming process, the impurity diffusion region 1054 acts as an etching mask for the sacrifice layer 1052. Therefore, the sacrifice layer 1052 is etched with the exception of a part of the sacrifice layer 1052 covered in the thickness direction of the sacrifice layer 1052 with the impurity diffusion region 1052. The part of the sacrifice layer 1052 which has not been etched defines the support portion 1047. According to the process of manufacturing the emission element 1011C, it is possible to form the gaseous layer 1044 and the support portion 1047 easily and simultaneously.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2009-151622 | Jun 2009 | JP | national |
| 2009-217332 | Sep 2009 | JP | national |
| 2009-217333 | Sep 2009 | JP | national |
| 2009-219202 | Sep 2009 | JP | national |
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/JP2010/060570 | 6/22/2010 | WO | 00 | 6/9/2012 |
