Claims
- 1. In a method of manufacture of ceramic electronic substrates comprising,
- applying a paste to a number of unfired ceramic sheets,
- said paste being applied in a manner adapted to form ulimately electrically conductive patterns after firing,
- the improvement comprising electrically inspecting at least one of said ceramic sheets with an electrical input applied directly to said sheets prior to the step of firing of said sheets.
- 2. A method in accordance with claim 1 including
- passing a current through said paste and
- applying an electrical measuring apparatus to measure said current.
- 3. A method in accordance with claim 1 including
- passing a current through said paste
- applying an electrical measuring apparatus to measure said current by means of electromechanical contact.
- 4. A method in accordance with claim 1 including
- passing a current through said paste
- applying an electrical measuring apparatus to measure said current by means of nonmechanical electrical inspection.
- 5. A method in accordance with claim 1 including
- said paste including at least two terminals,
- irradiating one of said terminals of said paste with a beam to electrically stimulate said paste,
- irradiating a different one of said two terminals with a beam to sense an electrical response at said different terminal.
- 6. A method in accordance with claim 1 including
- said paste passing through said sheets providing an end at each surface of a said sheet,
- applying a first electron beam to one end of said paste
- scanning the opposite end of said paste, and
- detecting the emission of secondary electrons emmitted from said opposite end to determine the electical conduction or interruption through said electrical connections.
- 7. A method in accordance with claim 1 including
- said paste passing through said sheets providing an end at each surface of a said sheet,
- charging without mechanically contacting one end of said paste to give charge using a first electron beam,
- directing without mechanically contacting another portion of said paste a second electron beam to generate secondary electron beam emissions, and
- discriminating by detecting the variation in energy level of secondary electrons emitted and their intensity to determine whether said electrical connections have electrical continuity or are open.
- 8. A method in accordance with claim 1 including
- said paste passing through said sheets providing an end at each surface of a said sheet,
- irradiating one end of said paste on one side of said sheet with a first electron beam to charge said paste and said electrical connection to a given potential,
- generating a second electrical beam on an opposite side of said sheet to cause secondary electron emission from said paste which is at said given potential, and
- detecting the presence of conductors not at a given potential.
- 9. A method in accordance with claim 1 including
- said paste passing through said sheets providing an end at each surface of a said sheet,
- applying an electron beam to one side of sheet to one end of said paste on one side of said sheet with a first electron beam,
- generating a steerable electron beam on the opposite side of said sheet, and
- detecting the emission of secondary electrons emitted from said opposite surface to determine electrical conduction or interruption through said paste.
- 10. A method in accordance with claim 1 including
- said paste passing through said sheets providing an end at each surface of a said sheet,
- irradiating an electrical conductor formed from said paste on a said sheet to charge said paste to a given potential,
- irradiating a beam at a different position on said sheet to cause emission from the paste at said different position.
- 11. A method in accordance with claim 10 including
- said one position and said different position being on opposite sides of said material.
- 12. A method in accordance with claim 1 including
- charging without contacting conductors formed of paste on one side of a sheet to a potential using a first electron beam,
- directing a second electron beam to generate secondary electron emissions at a portion of said conductor on the opposite side of said sheet without contacting the opposite side of sheet,
- discriminating by detecting the variation in energy level of secondary electrons and their intensity to determine whether said electrical conductors have electrical continuity or are open.
Parent Case Info
This is a division, of application Ser. No. 267,272 filed May 26, 1981, now U.S. Pat. No. 4,443,278.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
4056716 |
Baxter et al. |
Nov 1977 |
|
Divisions (1)
|
Number |
Date |
Country |
Parent |
267272 |
May 1981 |
|