Number | Date | Country | Kind |
---|---|---|---|
8226636 | Sep 1982 | GBX |
Number | Name | Date | Kind |
---|---|---|---|
3293490 | MacKenzie | Dec 1966 | |
3375452 | Forsyth | Mar 1968 | |
3617739 | Liebl | Nov 1971 | |
3649862 | Wahlin | Mar 1972 | |
4047030 | Lobach | Sep 1977 | |
4124801 | Cook et al. | Nov 1978 |
Number | Date | Country |
---|---|---|
WO8103239 | Nov 1981 | JPX |
Entry |
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H. Liebl, "Ion Optics of Ion Microprobe Instruments", Vacuum, vol. 33, pp. 525-531, 1983. |
"A Mass-Separating Focused-Ion-Beam System for Maskless Ion Implantation", V. Wang et al., Hughes Research Laboratories, Dec. 1981, pp. 1158-1163. |