Number | Date | Country | Kind |
---|---|---|---|
60-242243 | Oct 1985 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2890342 | Columbe | Jun 1959 | |
4118630 | McKenna et al. | Oct 1978 | |
4463255 | Robertson et al. | Jul 1984 |
Entry |
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C. P. Wu et al, "Electron-Flood Techniques to Neutralize Beam Charging During Ion Implantation", RCA Review, vol. 44, Mar., 1983, pp. 48-63. |