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9523982 | Nov 1995 | GBX |
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4179312 | Keller et al. | Dec 1979 | |
4595837 | Wu et al. | Jun 1986 | |
4743806 | Gyulai et al. | May 1988 | |
4766320 | Naitoh et al. | Aug 1988 | |
4782304 | Aitken | Nov 1988 |
Number | Date | Country |
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5-343028 | Dec 1993 | JPX |
Entry |
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"Wafer chargeup study on the PR-80 high current ion plantation machine", by Nagai et al., Nuclear Instruments & Methods in Physics Research, vol. B37/38 No. 2, Feb. 2, 1989, pp. 572-575. |