Number | Name | Date | Kind |
---|---|---|---|
4428795 | Kohl et al. | Jan 1984 | |
4686001 | Okazaki | Aug 1987 |
Number | Date | Country |
---|---|---|
57-9560 | Jan 1982 | JPX |
57-187940 | Nov 1982 | JPX |
59-150087 | Aug 1984 | JPX |
5-132865 | May 1993 | JPX |
521921 | Jul 1974 | SUX |
784635 | Jul 1979 | SUX |
1135382 | Feb 1983 | SUX |
Entry |
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K. Ikossi-Anastasiou, "Wet Chemical Etching with Lactic Acid Solutions fornP-Based Semiconductor Devices", pp. 3558-3584 J. Electrochem. Soc. vol. 142, #10, Oct. 1995. |