Claims
- 1. An arrangement for repairing wiring shorts in printed wiring on an insulating layer, said arrangement comprising:a workpiece having said insulating layer formed thereon; a laser having a wavelength between 255 and 355 nm, wherein the degree of absorption of said insulating layer is 1-10%; means for focusing said laser on a target area of said workpiece, said target area being a top surface of said insulating layer; means for holding said workpiece and locating said target beneath said focused laser; and means for viewing a short in said target area beneath said focused laser in said target area, wherein said laser is selected to remove shorts from coplanar wiring on the top surface of said insulation layer by laser ablation without damaging metal circuitry buried in or under the insulating layer.
- 2. The arrangement of claim 1 wherein said degree of absorption is between 2-5%.
- 3. The arrangement of claim 2 wherein said laser is a Nd:YAG laser.
- 4. The arrangement of claim 3 wherein said Nd:YAG laser has a 355 nm wavelength.
Parent Case Info
This is a divisional application of application Ser. No. 08/873,682 filed on Jun. 12, 1997 and now allowed as U.S. Pat. No. 6,046,429.
US Referenced Citations (23)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0642158 |
Mar 1995 |
EP |
5-42382 |
Feb 1993 |
JP |
8-172063 |
Jul 1996 |
JP |
Non-Patent Literature Citations (1)
Entry |
D.L. Klein, P.A. Leary-Renick & Srinivasan, Ablative Photodecomposition Process for Repair of Line Shorts, Feb. 1984, pp 4669-4671. |