Low out-gassing room temperature curabble rubbery polymer, preparation thereof and device comprising same

Abstract

Disclosed is polymer materials essentially free of silicone capable of room-temperature thermal cure and when cured having low modulus, low out-gassing rate. The material before cure typically comprises three components: (i) a cationically curable component comprising the backbone of a hydrocarbon-based rubber material essentially free of carbon-carbon double bonds and triple bonds; (ii) a hydroxyl-containing component having at least two hydroxyl groups per molecule; (iii) an initiator component having essentially no volatility at room temperature and also yield products after polymerization that have minimal or no volatility at room temperature; (iv) an optional viscosity adjustment component either homopolymerizable or capable of copolymerizing with the photo or electron beam curable material component of (i); and (v) an optional non-alkaline inert filler. Also disclosed are process for making such cured material and devices comprising such cured polymer materials.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings,

FIG. 1 presents the dynamic mechanical analysis curves of the cured material of Example 1, an embodiment of the material system of the present invention.

FIG. 2 presents the tensile/strain curve of the cured material of Example 1.

FIG. 3 presents the dynamic mechanical analysis curves of the cured material of Example 2, another embodiment of the material system of the present invention.

Claims

1. A material system essentially free of silicone consisting essentially of the following components, or a mixture, a blend or a reaction product thereof: (i) a cationically curable material component comprising the backbones of a completely or substantially completely hydrogenated hydrocarbon based rubber material completely or substantially free of carbon-carbon double and triple bonds;(ii) a hydroxyl-containing component having at least two hydroxyl groups per molecule;(iii) an initiator component having essentially no volatility at room temperature and also yielding products after polymerization that have minimal or no volatility at room temperature;(iv) an optional viscosity adjustment component either homopolymerizable or capable of copolymerizing with the cationically curable material component of (i); and(v) an optional non-alkaline inert filler;wherein when all the components are mixed together, the material system is capable of thermal curing at around room temperature to form a rubbery polymer material that is low-outgassing at room temperature.

2. A material system in accordance with claim 1, wherein the cationically curable material component of (i) is a functionalized material selected from the group consisting of: functionalized polybutadiene, functionalized polyisoprene, functionalized polyethylene propylene rubber and combinations thereof, which material comprises a backbone completely hydrogenated or substantially completely hydrogenated and completely or substantially completely free of carbon-carbon double and triple bonds.

3. A material system in accordance with claim 2, wherein the cationically curable material component of (i) is functionalized by at least one polymerizable terminal or pendant group selected from: cycloaliphatic epoxy, episulfide, epoxidized olefins, epoxy, glycidyl ether, oxirane, oxetane, propenyl ether, vinyl ether and compatible mixtures and/or combinations thereof.

4. A material system of claim 2, wherein component (i) is a polymer having a primary hydroxyl functionality at one end and an epoxidized diene functionality at the other end.

5. A material system in accordance with claim 3, wherein the cationically curable material component of (i) is functionalized by at least one epoxy terminal or pendant group.

6. A material system in accordance with claim 1, wherein the hydroxyl-containing component (ii) does not contain an alkaline group.

7. A material system in accordance with claim 1 wherein the ratio of the equivalents of the cationically polymerizable groups (Ec) in component (i) to the equivalents of hydroxyls (Eh) in the hydroxyl-containing component (ii) (Ec/Eh) is higher than 1.

8. A material system in accordance with claim 7, wherein the ratio of the equivalents of the cationically polymerizable groups (Ec) in component (i) to the equivalents of hydroxyls (Eh) in the hydroxyl-containing component (ii) (Ec/Eh) is between 1.5 and 10.

9. A material system in accordance with claim 1, wherein the initiator component (iii) is selected from the following compounds and/or mixtures in purified and/or diluted form: triarylcyclopropenylium salts;tetrakis(pentafluorophenyl) borate, gallate, aluminate and indate salts;

10. A material system in accordance with claim 1, wherein the initiator component consists essentially of triphenylcyclopropenylium hexafluoro antimonate.

11. A material system in accordance with claim 1, wherein the non-alkali inert filler is an inorganic filler selected from the group consisting of alumina, crystobalite, clay, mullite, zircon, zirconia, quartz, silica, with or without surface modification, and compatible mixtures and combinations thereof.

12. A material system in accordance with claim 1, which is thermally cured at around room temperature.

13. A material system in accordance with claim 1, which is also photo and/or electron beam curable.

14. A material system in accordance with claim 1, which forms a cured polymer after thermal curing at around room temperature having a Tg of equal to or lower than 25° C.

15. A material system in accordance with claim 1, which comprises two separate parts, with component (i) comprised in the first part, and components (ii) and (iii) comprised in the second part.

16. A process for producing a cured material system having low outgassing rate and low modulus between 25 and 10,000 psi (1.7×105 to 6.8×107 Pa) and essentially free of silicone, comprising the following steps of: (A) providing a cationically polymerizable material (i), said material comprising the backbone of a completely or substantially completely hydrogenated hydrocarbon rubber material completely or substantially completely free of carbon-carbon double bond and triple bond;(B) mixing the material (i) with an initiator (ii) having essentially no volatility at room temperature and also yielding products after polymerization that have minimal or no volatility at room temperature; a hydroxyl-containing component (iii) comprising at least two hydroxyls per molecule; and an optional non-alkaline inert filler (iv); and(C) thermally curing the mixture resulting from step (B) to form a material system having low outgassing rate and low modulus.

17. A process in accordance with claim 16, wherein step (A) comprises the following steps: (A1) providing a material (i′) having reactive terminal and/or pendant groups, wherein said material (i′) comprises the backbone of a completely or substantially completely hydrogenated hydrocarbon-based rubber completely or substantially completely free of carbon-carbon double bond and triple bond; and(A2) modifying the rubber material (i′) into material (i) by introducing cationically polymerizable terminal and/or pendant groups to the rubber material (i′) by allowing the reactive terminal and/or pendant groups of (i′) to react with agents capable of producing cationically-polymerizable groups at the location of the reactive terminal and/or pendant groups.

18. A device comprising, as an adhesive or sealant material, a cured material system which is rubbery and low-outgassing at room temperature, where said cured material system is essentially free of silicone and consists essentially of a mixture, a blend or a reaction product of the following components: (i) a cationically curable material component comprising the backbone of a completely or substantially completely hydrogenated hydrocarbon-based rubber material completely or substantially free of carbon-carbon double and triple bonds;(ii) a hydroxyl-containing component having at least two hydroxyl groups per molecule;(iii) an initiator component having essentially no volatility at room temperature and also yield products after polymerization that have minimal or no volatility at room temperature;(iv) an optional viscosity adjustment component either homopolymerizable or capable of copolymerizing with the photo or electron beam curable material component of (i); and(v) an optional non-alkaline inert filler.

19. A device in accordance with claim 18, wherein the cationically curable material component of (i) is a functionalized material selected from the group consisting of: functionalized polybutadiene, functionalized polyisoprene, functionalized polyethylene propylene rubber and combinations thereof, which material is completely hydrogenated or substantially completely hydrogenated and completely or substantially completely free of carbon-carbon double and triple bonds.

20. A device in accordance with claim 18, wherein the cationically curable material component of (i) is functionalized by at least one polymerizable terminal or pendant group selected from: cycloaliphatic epoxy, episulfide, epoxidized olefins, epoxy, glycidyl ether, oxirane, oxetane, propenyl ether, vinyl ether and compatible mixtures and/or combinations thereof.

21. A device in accordance with claim 16, wherein the cationically curable material component of (i) is functionalized by at least one epoxy terminal or pendant group.

22. A device in accordance with claim 18, wherein the photoinitiator/photosensitizer in the material system is selected from the following compounds and/or mixtures in purified and/or diluted form: triarylcyclopropenylium salts;tetrakis(pentafluorophenyl) borate, gallate, aluminate and indate salts;

23. A device in accordance with claim 18, wherein the initiator component consists essentially of triphenylcyclopropenylium hexafluoro antimonate.

24. A device in accordance with claim 18, wherein the non-alkali inert filler is an inorganic filler selected from the group consisting of alumina, crystobalite, clay, mullite, zircon, zirconia, quartz, silica, and compatible mixtures and combinations thereof.

25. A device in accordance with claim 18, wherein the cured material system has a Tg of equal to or lower than 25° C.

26. A device in accordance with claim 18, which is an optical device.

27. A device in accordance with claim 18, which is for use in connection with electromagnetic irradiation at a high fluence.

28. A device in accordance with claim 18, which is for use in connection with electromagnetic irradiation having a wavelength less than 500 nm.

29. A device in accordance with claim 24 which is a lithographic device involving using deep and/or vacuum ultraviolet irradiation.

30. A device in accordance with claim 24 wherein the wavelength of the lithographic radiation is approximately 157 nm or shorter.

31. A device in accordance with claim 25, wherein the lens material is doped or undoped high purity fused silica or crystalline CaF2, optionally coated with antireflective material selected from the group consisting of: magnesium fluoride, aluminum fluoride, calcium fluoride, gadolinium fluoride, thorium fluoride, lanthanum fluoride, yttrium fluoride, neodymium fluoride, dysprosium fluoride, sodium aluminum fluoride, alumina, silica, fluorine-containing silica, hafnia, scandium oxide, thorium oxide, zirconia, yttria, and compatible combinations thereof.

32. A device in accordance with claim 18 having at least one lens element and the cured material system is used as lens potting material.

33. A device in accordance with claim 18, wherein minimal or no purging of the light path is required.

34. A device in accordance with claim 18, which is selected from the group consisting of stepper lens, stepper lens assembly, semiconductor inspection device, etalon and laser generator.

35. A material system thermally curable at around room temperature when mixed together comprising the following parts: (1) a first part essentially free of cationic initiator comprising (1i) a cationically curable material component; and(2) a second part comprising the mixture of (2ii) a hydroxyl-containing component having at least two hydroxyl groups per molecule and (2iii) a cationic initiator component.

36. A material system according to claim 35, wherein in the first part (1), the cationically curable material component (1i) comprises the backbone of a completely or substantially completely hydrogenated hydrocarbon based rubber material completely or substantially free of carbon-carbon double and triple bonds.

37. A material system according to claim 35, wherein in the second part (2), the cationic initiator component (2iii) has essentially no volatility at room temperature and also yielding products after polymerization that have minimal or no volatility at room temperature.

38. A material system according to claim 35, wherein either the first part (1) or the second part (2) or both parts comprises an inert filler.

39. A material system according to claim 35, wherein the first part (1) further comprises (2ii) a hydroxyl-containing component having at least two hydroxyl groups per molecule.

40. A material system according to claim 35, wherein the first part (1) or the second part (2) or both parts comprises a viscosity adjustment component either homopolymerizable or capable of copolymerizing with the cationically curable material component of (1i).

41. A material system according to claim 31, wherein the first part (1) consists of (1i), and the second part consists of (2ii) and (2iii), and the material system consists of the first part (1) and the second part (2).