The present invention relates generally to electronic component inspection apparatus and more particularly, to an inspection apparatus which integrates macro inspection and micro inspection, and an inspection method thereof.
In the conventional wafer inspection process, macro inspection is usually performed first. That is, a quality inspector observes the wafer by naked eyes and determines whether the appearance of the wafer is flawed. If the appearance of the wafer is flawless, micro inspection is then performed. That is, an inspection instrument is used to inspect the appearance, the electrical properties and/or optical characteristics of the dies of the wafer. However, the macro inspection performed manually may not only cause missed inspection or false inspection due to visual fatigue of the quality inspector, but also may cause wafer falling or wafer collision due to transporting negligence of the quality inspector, so as to cause material loss. In addition, between the macro inspection and the micro inspection, wafers need to be transferred, classified, and collected to wait. These procedures not only take up space, but also increase the time required for the overall inspection process.
US Patent Publication No. 2008/0285022 A1 disclosed an inspection apparatus which integrates macro inspection and micro inspection. Although the inspection apparatus can reduce the distance and time for transferring the device under test between the macro inspection and the micro inspection, the inspection apparatus needs a transferring robot to transfer the device under test to the inspection station, and also needs a rotary mechanism disposed in the inspection station to receive the device under test transferred by the transferring robot and rotate the device under test to a macro inspection part and a micro inspection part. In other words, the devices provided in the inspection apparatus for moving the device under test include the aforementioned transferring robot and rotary mechanism, which also quite take up space. Besides, the inspection station is equipped therein with the rotary mechanism, the macro inspection part and the micro inspection part, thereby complicated and crowded in its spatial arrangement. Furthermore, the macro inspection part needs two mechanisms to clamp the device under test when manual visual inspection is performed to the front and the back of the device under test, respectively. In other words, after the manual visual inspection is performed to the front of the device under test clamped by one of the mechanisms, it needs to change into the other mechanism to clamp the device under test so as to turn over the device under test, so that the manual visual inspection can be performed to the hack of the device under test. Therefore, the macro inspection part is also quite complicated in its structure and spatial arrangement.
The present invention has been accomplished in view of the above-noted circumstances. It is an objective of the present invention to provide a macro and micro inspection apparatus and an inspection method thereof, which can avoid problems caused by manual inspection, and the inspection apparatus is structurally simple, space-saving, and brings high inspection efficiency.
To attain the above objective, the present invention provides a macro and micro inspection apparatus which includes a macro inspection station, a device under test storage station disposed on a side of the macro inspection station, and a micro inspection station disposed on another side of the macro inspection station. The macro inspection station includes a housing, a robot arm, and a visual recognition system. The robot arm includes an end effector adapted for carrying and turning over a device under test. The robot arm is disposed in the housing in a way that the end effector enables to enter the device under test storage station and the micro inspection station. The visual recognition system includes at least one image capturing device disposed in the housing to enable shooting toward the end effector for capturing the image of the device under test.
To attain the above objective, the present invention further provides an inspection method using the aforementioned macro and micro inspection apparatus, which includes the steps of:
taking out a said device under test from the device under test storage station to the macro inspection station by the end effector of the robot arm;
capturing the image of the device under test by the image capturing device of the visual recognition system to perform a macro inspection;
rotating the device under test by the robot arm, and capturing the image of the device under test which has been rotated by the image capturing device of the visual recognition system to perform another macro inspection; and if the result of the macro inspections performed by the visual recognition system is the device under test is unqualified, putting the device under test back to the device under test storage station by the robot arm; if the result of the macro inspections performed by the visual recognition system is the device under test is qualified, transferring the device under test to the micro inspection station by the robot arm for performing a micro inspection to the device under test in the micro inspection station.
As a result, the macro and micro inspection apparatus and the inspection method of the present invention only need a robot arm to transfer the device under test between the device under test storage station, the macro inspection station and the micro inspection station. Besides, the various actions the quality inspector performs for the macro inspection can be simulated in the macro inspection station by the robot arm performing various actions to the device under test, such as displacing, tilting, rotating, and so on, and cooperating with the visual recognition system, so as to attain the front inspection, back inspection, lateral inspection, oblique inspection, rotary inspection, light refection inspection, and so on. Therefore, the present invention doesn't need human labor to transfer the device under test or inspect the appearance of the device under test by the naked eyes, thereby prevented from the problems of missed inspection, false inspection, wafer falling, wafer collision, and so on, which may be caused by manual inspection. Besides, the present invention can steadily repeat the same macro inspection actions to attain great inspecting effect. Furthermore, the macro and micro inspection apparatus of the present invention is quite simple in structure and space-saving, and can connect the macro inspection with different micro inspection procedures or with device under test storage stations for the devices under test of different sizes. Therefore, according to the inspection requirements and the use environment, the most appropriate arrangement can be made to improve the machine utilization and reduce the transferring distance and waiting time between different procedures, thereby bringing high inspection efficiency.
Further scope of applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
The present invention will become more fully understood from the detailed description given herein below and the accompanying drawings which are given by way of illustration only, and thus are not limitative of the present invention; and wherein:
First of all, it is to be mentioned that same or similar reference numerals used in the following embodiments and the appendix drawings designate same or similar elements or the structural features thereof throughout the specification for the purpose of concise illustration of the present invention. It should be noticed that for the convenience of illustration, the components and the structure shown in the figures are not drawn according to the real scale and amount, and the features mentioned in each embodiment can be applied in the other embodiments if the application is possible in practice.
Referring to
The macro inspection station 20 includes a housing 21, and a robot arm 22 and a visual recognition system 23 disposed in the housing 21. It should be mentioned here that
The micro inspection station 30 and the device under test storage station 40 each include a housing 31 and 41, and the housings 21, 31 and 41 communicate with each other. Specifically speaking, the macro and micro inspection apparatus 10 is defined with a first horizontal axis (X-axis and a second horizontal axis (Y-axis) perpendicular to the first horizontal axis (X-axis), The macro inspection station 20 has a first side 24 and a second side 25, which face toward two opposite directions of the first horizontal axis, i.e. the positive direction of X-axis and the negative direction of X-axis, and a third side 26 and a fourth side 27, which face toward two opposite directions of the second horizontal axis, i.e. the positive direction of Y-axis and the negative direction of Y-axis. The housing 41 of the device under test storage station 40 is connected to the first side 24 of the macro inspection station 20, and they communicate with each other at the connection thereof. The housing 31 of the micro inspection station 30 is connected to the second side 25 of the macro inspection station 20, and they communicate with each other at the connection thereof.
The device under test storage station 40 is primarily used for storing a plurality of devices under test to be inspected, and may be also used for storing the devices under test having to be reclaimed. The device under test storage station 40 in this embodiment is provided therein with two supply cassettes 42 and a reclaim cassette 43. The supply cassettes 42 and reclaim cassette 43 may be the conventional wafer cassettes, so the structure thereof needs not be specified hereinafter. The supply cassettes 42 and reclaim cassette 43 are the same in structure, but the two supply cassettes 42 are used for storing a plurality of devices under test to be inspected, enabling the macro and micro inspection apparatus 10 to continuously inspect a plurality of devices under test and thereby raising the inspection efficiency. The reclaim cassette 43 is used for storing the devices under test unqualified by the inspection result and thereby having to be reclaimed, which will be specified in the following. As shown in
The micro inspection station 30 may, but unlimited to, be an automated optical inspection system, also called AOI, for inspecting the optical characteristics of the dies of the wafer 53, such as LED dies. As described above, the technical features of the present invention primarily lie in the macro inspection station 20, and the arrangement relation between the stations. The inner structure of the micro inspection station 30 is less related to the technical features of the present invention and thereby will not be specified hereinafter, and therefore the inner structure of the micro inspection station 30 is not shown in the figures.
Referring to
The end effector 226 shown in
For the devices under test of different shapes and inspection requirements, the robot arm 22 may use the end effector of different types, such as the end effector 226′ as shown in
By the aforementioned six-axial motion, the end effector 226 of the robot arm 22 can reach into various storage positions at different heights of each supply cassette 42 or reclaim cassette 43 of the device under test storage station 40, and the end effector 226 of the robot atm 22 can also reach into the micro inspection station 30 to place the device under test 50 at the position for the micro inspection. Besides, the end effector 226 of the robot atm 22 can also carry the device under test 50 and move to the position for being shot by the visual recognition system 23, that will be specified in the following.
As shown in
The macro and micro inspection apparatus 10 of the present invention is adapted to implement an inspection method as shown in
a) A device under test 50 is taken out from a supply cassette 42 of the device under test storage station 40 to the macro inspection station 20 by the end effector 226 of the robot arm 22.
b) The image of the device under test 50 is captured by the image capturing devices 231 and 232 of the visual recognition system 23 for a macro inspection to be performed.
c) The device under test 50 is rotated by the robot arm 22, and the image of the device under test 50 which has been rotated is captured by the image capturing devices 231 and 232 of the visual recognition system 23 for another macro inspection to be performed.
It can be known from the aforementioned steps b) and c) that the macro inspection station 20 is used for performing at least two different macro inspections to the device under test 50, In the step b), the device under test 50 is shot by the image capturing devices 231 and 232 right after entering the macro inspection station 20. At this time, it is usually, but unlimited to be, the front of the device under test 50 to be shot by the image capturing devices 231 and 232 for performing a front inspection, that is the status as shown in
d) If the result of the macro inspections performed by the visual recognition system 23 is the device under test 50 is determined to be unqualified, the device under test 50 is put back to the reclaim cassette 43 of the device under test storage station 40 by the robot arm 22. If the result of the macro inspections performed by the visual recognition system 23 is the device under test 50 is determined to be qualified, the device under test 50 is transferred to the micro inspection station 30 by the robot arm 22, for a micro inspection to be performed to the device under test 50 in the micro inspection station 30. The end effector 226 of the robot arm 22 will take out the device under test 50 after the micro inspection is accomplished, and the robot arm 22 will send the inspected device under test 50 back into the supply cassette 42 of the device under test storage station 40.
As a result, the robot arm 22 can simulate the conventional macro inspection actions the quality inspector performs to the device under test 50, such as displacing, tilting, rotating, and so on, and cooperate with the visual recognition system 23 to perform the macro inspections to the device under test 50. That can not only avoid the problems of missed inspection, false inspection, wafer falling, wafer collision, and so on, which may be caused by manual inspection, but also steadily repeat the same macro inspection actions to attain great inspection effect. Besides, the macro and micro inspection apparatus 10 of the present invention only needs the robot arm 22 to transfer the device under test 50 for connecting the procedures of supplying, reclaiming, macro inspection and micro inspection, thereby saving time for transferring, classification, collection and waiting between different procedures. The device under test 50 qualified by the macro inspections can be quickly transferred to the micro inspection station 30 by the robot arm 22 for the micro inspection, without the requirement of additional classification, collection and waiting, so the transferring time is reduced, Besides, without the requirement of classifying, collecting and waiting stations, it takes up relatively less space. The device under test 50 unqualified by the macro inspections can be also quickly transferred by the robot arm 22 to the reclaim cassette 43, without the requirement of additional classification, collection and waiting, so the transferring time is reduced. Besides, without the requirement of classifying, collecting and waiting stations, it takes up relatively less space. Therefore, the macro and micro inspection apparatus 10 of the present invention is simple in structure, space-saving, and capable of bringing high inspection efficiency and machine utilization.
As shown in
Further speaking, the position of the visual recognition system 23 in this embodiment is primarily arranged in a way that the robot arm requires the least time for movement. In
In the present invention, the amount of the image capturing devices of the visual recognition system 23 is unlimited. It is unlimited to arrange three or four image capturing devices as shown in
In the present invention, the amount of the micro inspection station 30 and the amount of the device under test storage station 40 are also unlimited. In this embodiment, the macro inspection station 20 has first to fourth sides 24-27, so the macro inspection station 20 can serve as the center of the apparatus to connect the micro inspection station 30 and device under test storage station 40 totaling up to four at most, such as the arrangements in second and third preferred embodiments of the present invention as shows in
In the second preferred embodiment as shown in
Further speaking, the visual recognition system 23 in this embodiment is arranged in a concept of the position certainly on the path of the robot arm 22. In
The macro and micro inspection apparatus 10 of the present invention may be provided with the micro inspection station 30 and device under test storage station 40 on any two sides, any three sides or all the four sides of the macro inspection station 20, as long as at least one side of the first to four sides 24-27 is provided with the device under test storage station 40 and at least another side of the first to fourth sides 24-27 is provided with the micro inspection station 30. According to different amounts and different positional arrangement, there are many possible constitutions. Therefore, according to the use requirements and the use environment, the most appropriate arrangement can be made to improve the machine utilization and production capacity. For the arrangements with a plurality of device under test storage stations 40, the device under test storage stations 40 may store the devices under test of different sizes, so that the devices under test of the same kind but different sizes can be mixed and supplied at the same time, which can save the time of stopping and waiting for changing the supply cassette.
The invention being thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.
Number | Date | Country | Kind |
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110130725 | Aug 2021 | TW | national |
Number | Date | Country | |
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63075835 | Sep 2020 | US |