Manufacturing method for imprinting stamper

Abstract

A manufacturing method for imprinting stamper is disclosed. The manufacturing method includes forming a plurality of concave patterns on an insulation layer, forming a stamper by filling copper in the concave patterns, separating the stamper from the insulation layer, providing roughness on the surface of the stamper, can separate the stamper from the insulation layer, can prevent the deformation of the stamper and can manufacture pluralities of stampers repeatedly.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is flow chart presenting a manufacturing method for imprinting stamper according to the one embodiment of the present invention.

FIG. 2 is a cross-sectional view of an insulation layer and a conventional stamper in the manufacturing method for imprinting method according to one embodiment of the present invention.

FIG. 3 is a cross-sectional view of forming a plural of concave pattern on the insulation layer.

FIG. 4 is a cross-sectional view of completing the shape of the stamper by filling copper in the concave pattern.

FIG. 5 is a cross-sectional view of separating the stamper from the insulating layer in FIG. 4.

FIG. 6 is a cross-sectional view of separated stamper in FIG. 5.

FIG. 7A and FIG. 7B are cross-sectional view of explaining black oxide process providing roughness on the stamper.

Claims

1. A manufacturing method for imprinting stamper comprising: forming a plurality of concave patterns on an insulation layer,forming a stamper by filling copper in the concave patterns,separating the stamper from the insulation layer,providing roughness on the surface of the stamper.

2. The manufacturing method for imprinting stamper of claim 1, wherein the concave pattern comprising a first concave part and a second concave part which is in communication with the first concave part and having a smaller diameter than the first concave part.

3. The manufacturing method for imprinting stamper of claim 2, wherein the first concave part and the second concave part are penetrated through the insulation layer.

4. The manufacturing method for imprinting stamper of claim 3, wherein a base plate is layered on the bottom surface of the insulation layer.

5. The manufacturing method for imprinting stamper of claim 1, wherein the stamper having a protrusion part corresponding to the concave pattern and a body part formed integrally with the protrusion part.

6. The manufacturing method for imprinting stamper of claim 1, wherein the copper is filled by the copper plating or electric plating in the concave pattern.

7. The manufacturing method for imprinting stamper of claim 1, The roughness is given by a black oxide process on the surface of the stamper.