Claims
- 1. A system for inspecting a specimen, comprising:a light generating device; a diffractive element receiving light energy transmitted by said light generating device and transmitting diffracted light energy; an optical arrangement receiving the diffracted light energy transmitted by said diffractive element; an objective receiving light energy from said optical arrangement; wherein said system produces an apparent plane of splitting of light; and wherein said system further comprises: a focusing lens receiving light energy from said objective, said focusing lens having a focal plane, said focusing lens receiving light energy from said objective; wherein the focusing lens focal plane substantially coincides with the apparent plane of splitting of light.
- 2. The system of claim 1, wherein said diffractive element splits light energy received from said light generating device thereby providing multiple light beams, and wherein multiple light beams contact said specimen.
- 3. The system of claim 1, wherein said diffractive element comprises a diffractive element from the group including a one dimensional grating and a two dimensional grating.
- 4. The system of claim 1, wherein said detector arrangement comprises a detector from the group comprising a CCD detector, a photodiode array, and a multiple PMT array.
- 5. The system of claim 1, wherein said diffractive element comprises an optical element from the group including a diffraction grating and a digital optical element.
- 6. The system of claim 1, wherein inspection comprises linear scanning.
- 7. The system of claim 1, further comprising a detector arrangement receiving light energy from said focusing lens.
- 8. The system of claim 1, wherein the optical arrangement comprises at least one from a group comprising:a beamsplitter; and a telescoping lens group.
- 9. The system of claim 1, wherein the optical arrangement comprises a telescope having at least one lens.
- 10. The system of claim 1, wherein the optical arrangement comprises a telescopic lensing arrangement.
- 11. The system of claim 1, wherein the optical arrangement comprises a lensing arrangement.
Parent Case Info
This is a continuation of U.S. patent application Ser. No. 09/161,864, filed Sep. 28, 1998 now U.S. Pat. No. 6,208,411.
US Referenced Citations (4)
Continuations (1)
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Number |
Date |
Country |
Parent |
09/161864 |
Sep 1998 |
US |
Child |
09/819347 |
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US |