Patent Grant
11769832
The present invention relates to semiconductor memory technology. More specifically, the present invention relates to a semiconductor memory device comprising an electrically floating body transistor and an access transistor.
Semiconductor memory devices are used extensively to store data. Memory devices can be characterized according to two general types: volatile and non-volatile. Volatile memory devices such as static random access memory (SRAM) and dynamic random access memory (DRAM) lose data that is stored therein when power is not continuously supplied thereto.
A DRAM cell without a capacitor has been investigated previously. Such memory eliminates the capacitor used in the conventional 1T/1C memory cell, and thus is easier to scale to smaller feature size. In addition, such memory allows for a smaller cell size compared to the conventional 1T/1C memory cell. Chatterjee et al. have proposed a Taper Isolated DRAM cell concept in “Taper Isolated Dynamic Gain RAM Cell”, P. K. Chatterjee et al., pp. 698-699, International Electron Devices Meeting, 1978 (“Chatterjee-1”), “Circuit Optimization of the Taper Isolated Dynamic Gain RAM Cell for VLSI Memories”, P. K. Chatterjee et al., pp. 22-23, IEEE International Solid-State Circuits Conference, February 1979 (“Chatterjee-2”), and “dRAM Design Using the Taper-Isolated Dynamic RAM Cell”, J. E. Leiss et al., pp. 337-344, IEEE Journal of Solid-State Circuits, vol. SC-17, no. 2, April 1982 (“Leiss”), all of which are hereby incorporated herein, in their entireties, by reference thereto. The holes are stored in a local potential minimum, which looks like a bowling alley, where a potential barrier for stored holes is provided. The channel region of the Taper Isolated DRAM cell contains a deep n-type implant and a shallow p-type implant. As shown in “A Survey of High-Density Dynamic RAM Cell Concepts”, P. K. Chatterjee et al., pp. 827-839, IEEE Transactions on Electron Devices, vol. ED-26, no. 6, June 1979 (“Chatterjee-3”), which is hereby incorporated herein, in its entirety, by reference thereto, the deep n-type implant isolates the shallow p-type implant and connects the n-type source and drain regions.
Terada et al. have proposed a Capacitance Coupling (CC) cell in “A New VLSI Memory Cell Using Capacitance Coupling (CC) Cell”, K. Terada et al., pp. 1319-1324, IEEE Transactions on Electron Devices, vol. ED-31, no. 9, September 1984 (“Terada”), while Erb has proposed Stratified Charge Memory in “Stratified Charge Memory”, D. M. Erb, pp. 24-25, IEEE International Solid-State Circuits Conference, February 1978 (“Erb”), both of which are hereby incorporated herein, in their entireties, by reference thereto.
DRAM based on the electrically floating body effect has been proposed both in silicon-on-insulator (SOI) substrate (see for example “The Multistable Charge-Controlled Memory Effect in SOI Transistors at Low Temperatures”, Tack et al., pp. 1373-1382, IEEE Transactions on Electron Devices, vol. 37, May 1990 (“Tack”), “A Capacitor-less 1T-DRAM Cell”, S. Okhonin et al., pp. 85-87, IEEE Electron Device Letters, vol. 23, no. 2, February 2002 and “Memory Design Using One-Transistor Gain Cell on SOI”, T. Ohsawa et al., pp. 152-153, Tech. Digest, 2002 IEEE International Solid-State Circuits Conference, February 2002, all of which are hereby incorporated herein, in their entireties, by reference thereto) and in bulk silicon (see for example “A one transistor cell on bulk substrate (1T-Bulk) for low-cost and high density eDRAM”, R. Ranica et al., pp. 128-129, Digest of Technical Papers, 2004 Symposium on VLSI Technology, June 2004 (“Ranica-1”), “Scaled 1T-Bulk Devices Built with CMOS 90 nm Technology for Low-Cost eDRAM Applications”, R. Ranica et al., 2005 Symposium on VLSI Technology, Digest of Technical Papers (“Ranica-2”), “Further Insight Into the Physics and Modeling of Floating-Body Capacitorless DRAMs”, A. Villaret et al, pp. 2447-2454, IEEE Transactions on Electron Devices, vol. 52, no. 11, November 2005 (“Villaret”), “Simulation of intrinsic bipolar transistor mechanisms for future capacitor-less eDRAM on bulk substrate”, R. Pulicani et al., pp. 966-969, 2010 17th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) (“Pulicani”), all of which are hereby incorporated herein, in their entireties, by reference thereto).
Widjaja and Or-Bach describe a bi-stable SRAM cell incorporating a floating body transistor, where more than one stable state exists for each memory cell (for example as described in U.S. Pat. No. 8,130,548 to Widjaja et al., titled “Semiconductor Memory Having Floating Body Transistor and Method of Operating” (“Widjaja-1”), U.S. Pat. No. 8,077,536, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), U.S. Pat. No. 9,230,651, “Memory Device Having Electrically Floating Body Transistor” (“Widjaja-3”), all of which are hereby incorporated herein, in their entireties, by reference thereto). This bi-stability is achieved due to the applied back bias which causes impact ionization and generates holes to compensate for the charge leakage current and recombination.
In a memory array comprising rows and columns of memory cells, performing an operation on a memory cell of the array may trigger a change in its surrounding memory cells, a condition often referred to as disturb. There is a continuing need for improving disturb resistance in memory cells. Two-transistor memory cells, for example as described in “Capacitorless Twin-Transistor Random Access Memory (TTRAM) on SOI”, F. Morishita et al, Custom Integrated Circuits Conference, 2005, pp. 435-438, “A configurable enhanced TTRAM macro for system-level power management unified memory”, F. Morishita et al., Solid-State Circuits, IEEE Journal of, vol. 42 no. 4 (2007), pp. 853-861, “A high-density scalable twin transistor RAM (TTRAM) with verify control for SOI platform memory IPs”, K. Arimoto et al., Solid-State Circuits, IEEE Journal of, vol. 42, no. 11 (2007), pp. 2611-2619, and “A Scalable ET2RAM (SETRAM) with Verify Control for SoC Platform Memory IP on SOI”, K. Arimoto et al. pp. 429-432, Custom Integrated Circuits Conference, 2006, U.S. patent application Ser. No. 14/380,779, “Memory Cell Comprising First and Second Transistors and Methods of Operating” (“Widjaja-4”), all of which are hereby incorporated herein, in their entireties, by reference thereto, may improve the disturb resistance of the memory cells.
A semiconductor memory cell comprising an electrically floating body transistor and an access transistor is disclosed. A method of operating the memory cell is disclosed.
According to one aspect of the present invention, a semiconductor memory cell is provided that includes: a memory transistor comprising a bi-stable floating body transistor having a first floating body region and a back-bias region configured to generate impact ionization when the memory cell is in one of first and second states, and wherein the back-bias region is configured so as not to generate impact ionization when the memory cell is in the other of the first and second states; and an access device; wherein the access device comprises a second floating body region; and wherein the bi-stable floating body transistor and the access device are electrically connected in series.
In at least one embodiment, a capacitance of the first floating body region is different from a capacitance of the second floating body region.
In at least one embodiment, the memory transistor further comprises a first gate region, and the access device further comprises a second gate region.
In at least one embodiment, a length of the first gate region is less than a length of the second gate region.
In at least one embodiment, a length of the first gate region is greater than a length of the second gate region.
In at least one embodiment, a volume of the first floating body region is smaller than a volume of the second floating body region.
In at least one embodiment, a capacitance of the first gate region is different from a capacitance of the second gate region.
In at least one embodiment, at least one dummy gate region is provided between the memory transistor and the access device.
In at least one embodiment, the memory transistor comprises a first gate region; wherein a work function of the dummy gate region is higher than a work function of the first gate region.
In at least one embodiment, the semiconductor memory cell is a multi-port memory cell.
In at least one embodiment, the semiconductor memory cell comprises a fin structure.
According to another aspect of the present invention, a semiconductor memory cell includes: a first transistor having a first floating body; a second transistor having a second floating body; a buried layer underlying both of the first and second floating bodies; a first source line region contacting the first floating body; a first drain region separated from the first source line region and contacting the first floating body; a first gate insulated from the first floating body; an insulating member insulating the first floating body from the second floating body; a second source line region contacting the second floating body; a second drain region separated from the second source line region and contacting the second floating body; and a second gate insulated from the second floating body; wherein the first drain region is electrically connected to the second source line region; and wherein a capacitance of the first floating body is different from a capacitance of the second floating body.
In at least one embodiment, a volume of the first floating body is less than a volume of the second floating body.
In at least one embodiment, a length of the first gate is less than a length of the second gate.
In at least one embodiment, a length of the first gate is greater than a length of the second gate.
In at least one embodiment, the semiconductor memory cell further includes at least one dummy gate region between the first transistor and the second transistor.
In at least one embodiment, a work function of the dummy gate region is greater than a work function of the first gate.
In at least one embodiment, the first transistor and the second transistor have the same conductivity type.
In at least one embodiment, the semiconductor memory cell is a multi-port memory cell.
In at least one embodiment, the semiconductor memory cell includes a fin structure.
These and other advantages and features of the invention will become apparent to those persons skilled in the art upon reading the details of the memory cells, arrays and methods as more fully described below.
In the course of the detailed description to follow, reference will be made to the attached drawings. These drawings show different aspects of the present invention and, where appropriate, reference numerals illustrating like structures, components, materials and/or elements in different figures are labeled similarly. It is understood that various combinations of the structures, components, materials and/or elements, other than those specifically shown, are contemplated and are within the scope of the present invention.
Before the present memory cells, memory arrays and processes are described, it is to be understood that this invention is not limited to particular embodiments described, as such may, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting, since the scope of the present invention will be limited only by the appended claims.
Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed within the invention. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included in the invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Although any methods and materials similar or equivalent to those described herein can be used in the practice or testing of the present invention, the preferred methods and materials are now described. All publications mentioned herein are incorporated herein by reference to disclose and describe the methods and/or materials in connection with which the publications are cited.
It must be noted that as used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a cell” includes a plurality of such cells and reference to “the bit line” includes reference to one or more bit lines and equivalents thereof known to those skilled in the art, and so forth.
The publications discussed herein are provided solely for their disclosure prior to the filing date of the present application. The dates of publication provided may be different from the actual publication dates which may need to be independently confirmed.
Memory array 100 may comprise a plurality of memory cells 50, each of which comprises memory device 50M and access device 50A that are connected in series, as illustrated in
Referring to
Memory cell 502 also comprises a buried layer region 30 of a second conductivity type, such as n-type, for example; a floating body region 24 of the first conductivity type, such as p-type, for example; and source/drain regions 16 and 18 of the second conductivity type, such as n-type, for example. Buried layer 30 may be formed by an ion implantation process on the material of substrate 10. Alternatively, buried layer 30 can be grown epitaxially on top of substrate 10.
The floating body region 24 of the memory transistor 502M having a first conductivity type is bounded on top by surface 14, source line region 16, drain region 18, and insulating layer 62, on the sides by insulating layer 26, and on the bottom by buried layer 30, while the floating body region 24 of the access transistor 502A is bounded on top by surface 14, source region 20, bit line region 22, and insulating layer 66, on the sides by insulating layer 26, and on the bottom by buried layer 30. Floating body 24 may be the portion of the original substrate 10 above buried layer 30 if buried layer 30 is implanted. Alternatively, floating body 24 may be epitaxially grown. Depending on how buried layer 30 and floating body 24 are formed, floating body 24 may have the same doping as substrate 10 in some embodiments or a different doping, if desired in other embodiments.
A gate 60 of the memory transistor 502M is positioned in between the source line region 16 and the drain region 18, above the floating body region 24. The gate 60 is insulated from the floating body region 24 by an insulating layer 62. Insulating layer 62 may be made of silicon oxide and/or other dielectric materials, including high-K dielectric materials, such as, but not limited to, tantalum peroxide, titanium oxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate 60 may be made of, for example, polysilicon material or metal gate electrode, such as tungsten, tantalum, titanium and their nitrides.
A gate 64 of the access transistor 502A is positioned in between the source region 20 and the bit line region 22. The gate 64 is insulated from the floating body region 24 by an insulating layer 66. Insulating layer 66 may be made of silicon oxide and/or other dielectric materials, including high-K dielectric materials, such as, but not limited to, tantalum peroxide, titanium oxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate 64 may be made of, for example, polysilicon material or metal gate electrode, such as tungsten, tantalum, titanium and their nitrides.
Insulating layers 26 (like, for example, shallow trench isolation (STI)), may be made of silicon oxide, for example, though other insulating materials may be used. Insulating layers 26 insulate floating body transistor 40 from adjacent floating body transistor 40 and adjacent access transistor 42. The bottom of insulating layer 26 may reside inside the buried region 30 allowing buried region 30 to be continuous as shown in
The drain region 18 of the memory transistor 502M is connected to the source region 20 of the access transistor 502A through a conductive element 96, 94a, 94b. Conductive element 90 connects the source line region 16 of the memory transistor 502M (which may be referred to as the source line region 16 of the memory device 502 interchangeably) to the source line (SL) terminal 74, while conductive element 92 connects the bit line region 22 of the access transistor 502A (which may be referred to as the bit line region 22 of the memory device 502 interchangeably) to the bit line (BL) terminal 76. The conductive elements 90, 92, 96, 94a, 94b may be formed of, but not limited to, cobalt, tungsten or silicided silicon.
In addition to the SL terminal 74 and BL terminal 76, memory cell 502 also includes word line 1 (WL1) terminal 70, which is electrically connected to the gate 60 of the memory transistor 502M, word line 2 (WL2) terminal 72, which is electrically connected to the gate 64 of the access transistor 502A, buried well (BW) terminal 78, which is electrically connected to the buried well region 30 of the floating body transistor 502M, and substrate (SUB) terminal 80, which is connected to the substrate region 10.
The memory cell 502 comprises memory transistor 502M and access transistor 502A having the same conductivity type. For example, both memory transistor 502M and access transistor 502A may be n-channel transistors. The access transistor 502A may have different gate and gate insulating layer stacks from the memory transistor 502M such that the capacitive coupling from the gate region 64 to the floating body region 24 of the access transistor 502A is lower than that of the memory transistor 502M. For example, the gate 64 of the access transistor may be made of different materials from the gate 60 of the memory transistor. Similarly the gate insulating layer 66 of the access transistor may be made of different materials or may have different thickness from the gate insulating layer 62.
In an alternative embodiment shown in
Several operations can be performed to memory cell 502, such as: holding, read, write logic-1 and write logic-0 operations and have been described, for example, in Widjaja-4.
During the operation of memory cell 502, to prevent a positive charge accumulation in the floating body region 24 of access transistor 502A, a negative voltage may be applied to the bit line region 22. A negative voltage may also be applied to the gate region 64 of the access transistor 502A, to prevent the negative voltage applied to the bit line region 22 to propagate to the memory transistor 502M. The level of the negative voltage applied to the bit line region 22 may be decided to conditionally remove the positive charges only when the floating body is positively charged but not cause to flow a forward biased junction current when the floating body is neutrally charged. Such voltage may range from −0.05V to −0.6V.
Memory cells 502, 504, and 506 may also comprise a fin structure.
Referring to the layout view shown in
Referring to the layout view shown in
In another embodiment illustrated in the layout view in
Conductive element 90 connects the source line region 16 of the memory device 502M (which may be referred to as the source line region 16 of the memory device 502 interchangeably) to the source line (SL) terminal 74 (through another conductive element similar to conductive element 96 defined by layer MTL1 180, shown separately in
Referring to both the layout view shown in
For a three-dimensional memory cell structure, for example memory cell 502F comprising a fin structure 52 extending substantially perpendicular to, and above the top surface of the substrate 10, the fin 52 as shown in
Memory cell 502 is used as an illustrative example to describe the layout view in
Memory cell 502 is used as an illustrative example to describe the layout view in
Referring to the layout view shown in
Memory array 1512 may be implemented in three-dimensional structure similar to what is shown in
The bi-stable floating body transistor 310M also comprises regions 116, 118, and 120 having a second conductivity type, and gate regions 160 and 162 insulated from the floating body region 124 by insulating layers 130 and 132, respectively.
Memory cell 310 also comprises an access transistor 310A having a well region 112 having a second conductivity type, for example n-type, regions 117 and 119 having a first conductivity type, for example p-type, and a gate region 164 insulated from the well region 112 by an insulating layer 134. The region 119 of the access transistor is connected to the region 120 of the bi-stable floating body transistor 120 through a conductive element 94, forming a series connection between the access transistor 310A and the bi-stable floating body transistor 310M.
Memory cell 310 includes word line #1 (WL1) terminal 190 electrically connected to gate 160, word line #2 (WL2) terminal 192 electrically connected to gate 162, a source line (SL) terminal 172 electrically connected to region 116, a bit line #1 (BL1) terminal 174 electrically connected to region 118, a select gate #2 (SG2) terminal 194 electrically connected to gate 164, bit line #2 (BL2) terminal 176 electrically connected to region 117, buried well (BW) terminal 178 electrically connected to the buried layer 122, and substrate (SUB) terminal 170 electrically connected to the substrate region 110. WL1 terminal 190 and BL1 terminal 174 may be referred to herein as ‘port #1’, while WL2 terminal 192, SG2 terminal 194, and BL2 terminal 176 may be referred to herein as ‘port #2’.
Several operations can be performed to memory cell 310, such as: holding, read, write logic-1 and write logic-0 operations. The read and write operations can be performed on memory cell 310 through port #1 and port #2.
The holding operation of the bi-stable floating body transistor has been described for example as described in U.S. Pat. No. 8,130,548 to Widjaja et al., titled “Semiconductor Memory Having Floating Body Transistor and Method of Operating” (“Widjaja-1”), U.S. Pat. No. 8,077,536, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), U.S. Pat. No. 9,230,651, “Memory Device Having Electrically Floating Body Transistor” (“Widjaja-3”), all of which are hereby incorporated herein, in their entireties, by reference thereto. The holding operation may be performed by applying a positive bias to the BW terminal 178, zero or negative bias on the WL1 terminal 190, WL2 terminal 192, a positive bias to the SG2 terminal 194, about zero potential on the BL1 terminal 174, BL2 terminal 176, SL terminal 172, and substrate terminal 78.
In one embodiment the bias conditions for the holding operation for memory cell 310 are: 0.0 volts is applied to WL1 terminal 190, 0.0 volts is applied to WL2 terminal 192, +1.2 volts is applied to SG2 terminal 194, about 0.0 volts is applied to the SL terminal 172, BL1 terminal 174, BL2 terminal 176, and SUB terminal 170, and a positive voltage like, for example, +1.2 volts is applied to BW terminal 178. In other embodiments, different voltages may be applied to the various terminals of memory cell 310 as a matter of design choice and the exemplary voltages described are not limiting in any way.
The read and write operations of memory cell 310 through port #1 have also been described in Widjaja-1, Widjaja-2, and Widjaja-3.
A read operation may be performed through port #1 for example by applying the following bias conditions: a positive voltage is applied to the BW terminal 178, zero voltage is applied to SL terminal 172, a positive voltage is applied to the selected BL1 terminal 174, and a positive voltage greater than the positive voltage applied to the selected BL1 terminal 174 is applied to the selected WL1 terminal 190, and zero voltage is applied to the SUB terminal 170. The unselected BL1 terminals will remain at zero voltage and the unselected WL1 terminals will remain at zero or negative voltage.
In one particular non-limiting embodiment, about 0.0 volts is applied to SL terminal 172, about +0.4 volts is applied to the selected BL1 terminal 174, about +1.2 volts is applied to the selected WL1 terminal 190, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to the SUB terminal. The unselected BL1 terminals 174 remain at 0.0 volts and the unselected WL1 terminals 190 remain at 0.0 volts. However, these voltage levels may vary.
A write “0” operation of the memory cell 310 may be performed by applying the following bias conditions: a negative bias is applied to SL terminal 172, zero or negative voltage is applied to WL1 terminal 190, and zero or positive voltage is applied to BW terminal 178, and zero voltage is applied to the BL1 terminal 174 and SUB terminal 170. The SL terminal 172 for the unselected cells will remain grounded. Under these conditions, the p-n junction between 124 and 116 is forward-biased, evacuating any holes from the floating body 124.
In one particular non-limiting embodiment, about −0.5 volts is applied to SL terminal 172, about −0.5 volts is applied to WL1 terminal 190, about 0.0 volts is applied to the BL1 terminal 174, and about +1.2 volts is applied to terminal 178. However, these voltage levels may vary, while maintaining the relative relationships between the charges applied, as described above.
An alternative write “0” operation that allows for individual bit writing may be performed by applying a positive voltage to WL1 terminal 190, a negative voltage to BL1 terminal 174, zero or positive voltage to SL terminal 172, and zero or positive voltage to BW terminal 178, and zero voltage to SUB terminal 170. Under these conditions, the floating body 124 potential will increase through capacitive coupling from the positive voltage applied to the WL1 terminal 190. As a result of the floating body 124 potential increase and the negative voltage applied to the BL1 terminal 174, the p-n junction between 124 and 118 is forward-biased, evacuating any holes from the floating body 124. To reduce undesired write “0” disturb to other memory cells 310 in a memory array, the applied potential can be optimized as follows: if the floating body 124 potential of state “1” is referred to as VFB1, then the voltage applied to the WL1 terminal 190 is configured to increase the floating body 124 potential by VFB1/2 while −VFB1/2 is applied to BL1 terminal 174. A positive voltage can be applied to SL terminal 172 to further reduce the undesired write “0” disturb on other memory cells 310 in a memory array. The unselected cells will remain at holding state, i.e. zero or negative voltage applied to WL1 terminal 190 and zero voltage applied to BL1 terminal 174.
In one particular non-limiting embodiment, the following bias conditions are applied to the selected memory cell 310: a potential of about 0.0 volts is applied to SL terminal 172, a potential of about −0.2 volts is applied to BL1 terminal 174, a potential of about +1.2 volts is applied to WL1 terminal 190, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to SUB terminal 170; while about 0.0 volts is applied to SL terminal 172, about 0.0 volts is applied to BL1 terminal 174, about 0.0 volts is applied to WL1 terminal 190, and about +1.2 volts is applied to BW terminal 178 of the unselected memory cells. However, these voltage levels may vary.
A write “1” operation may be performed by applying a positive voltage to WL1 terminal 190, a positive voltage to BL1 terminal 174, zero or positive voltage to SL terminal 172, and zero or positive voltage to BW terminal 178, and zero voltage to SUB terminal 170.
In one particular non-limiting embodiment, the following bias conditions are applied to the selected memory cell 310: a potential of about 0.0 volts is applied to SL terminal 172, a potential of about +1.2 volts is applied to BL1 terminal 174, a potential of about +1.2 volts is applied to WL1 terminal 190, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to SUB terminal 170; while about 0.0 volts is applied to SL terminal 172, about 0.0 volts is applied to BL1 terminal 174, about 0.0 volts is applied to WL1 terminal 190, and about +1.2 volts is applied to BW terminal 178 of the unselected memory cells. However, these voltage levels may vary.
Read and write operations through port #2 can be performed by first turning on the access transistor connected in series with the bi-stable floating body transistor, for example as described in U.S. Patent Application Publication No. 2015/0023105, “Memory Cell Comprising First and Second Transistors and Method of Operating”, which is hereby incorporated herein, in its entirety, by reference thereto.
A read operation may be performed through port #2 for example by applying the following bias conditions: a positive voltage is applied to the BW terminal 178, zero voltage is applied to SL terminal 172, a positive voltage is applied to the selected BL2 terminal 176, and zero or a positive voltage is applied to the selected WL2 terminal 192, and zero voltage is applied to the SUB terminal 170. For p-type transistor illustrated in
In one particular non-limiting embodiment, about 0.0 volts is applied to SL terminal 172, about +0.4 volts is applied to the selected BL2 terminal 176, about 0.0 volts is applied to the selected WL2 terminal 192, about −0.5 volts is applied to SG2 terminal 194, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to the SUB terminal. The unselected BL2 terminals 176 remain at 0.0 volts, the unselected WL2 terminals 192 remain at 0.0 volts, and the unselected SG2 terminals 194 remain at about +1.2 volts. However, these voltage levels may vary.
A write “0” operation may be performed through port #2 for example by applying the following bias conditions: a positive voltage is applied to the BW terminal 178, zero voltage is applied to SL terminal 172, a negative voltage is applied to the selected BL2 terminal 176, and a positive voltage is applied to the selected WL2 terminal 192, and zero voltage is applied to the SUB terminal 170. For p-type transistor illustrated in
In one particular non-limiting embodiment, about 0.0 volts is applied to SL terminal 172, about −0.2 volts is applied to the selected BL2 terminal 176, about +1.2 volts is applied to the selected WL2 terminal 192, about −0.5 volts is applied to SG2 terminal 194, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to the SUB terminal. The unselected BL2 terminals 176 remain at 0.0 volts, the unselected WL2 terminals 192 remain at 0.0 volts, and the unselected SG2 terminals 194 remain at about +1.2 volts. However, these voltage levels may vary.
A write “1” operation may be performed through port #2 for example by applying the following bias conditions: a positive voltage is applied to the BW terminal 178, zero voltage is applied to SL terminal 172, a positive voltage is applied to the selected BL2 terminal 176, a positive voltage is applied to the selected WL2 terminal 192, and zero voltage is applied to the SUB terminal 170. For p-type transistor illustrated in
In one particular non-limiting embodiment, about 0.0 volts is applied to SL terminal 172, about +1.2 volts is applied to the selected BL2 terminal 176, about +1.2 volts is applied to the selected WL2 terminal 192, about −0.5 volts is applied to SG2 terminal 194, about +1.2 volts is applied to BW terminal 178, and about 0.0 volts is applied to the SUB terminal. The unselected BL2 terminals 176 remain at 0.0 volts, the unselected WL2 terminals 192 remain at 0.0 volts, while the unselected SG2 terminals 194 remain at about +1.2 volts. However, these voltage levels may vary.
From the foregoing it can be seen that memory cell 310 may function as a multi-port memory cell. Port #1 and port #2 can both be used as read and access port. It may also be configured, for example, such that port #1 is used only for read operation and port #2 is used for both read and write operations.
Referring to the layout views shown in
Multi-port memory cells 310 and 320 may also be implemented in three-dimensional structure similar to what is shown in
A memory array of the present invention may comprise a plurality of memory cells 520 according to another embodiment of the present invention.
Memory cell 520 also includes a buried layer region 22 of a second conductivity type, such as n-type, for example; a floating body region 24 of the first conductivity type, such as p-type, for example; and source/drain regions 16 and 18 of the second conductivity type, such as n-type, for example.
Buried layer 22 may be formed by an ion implantation process on the material of substrate 12. Alternatively, buried layer 22 can be grown epitaxially on top of substrate 12 or formed through a solid state diffusion process.
The floating body region 24 of the first conductivity type is bounded on top by source line region 16, drain region 18, and insulating layer 62 (or by surface 14 in general), on the sides by insulating layer 26, and on the bottom by buried layer 22. Floating body 24 may be the portion of the original substrate 12 above buried layer 22 if buried layer 22 is implanted. Alternatively, floating body 24 may be epitaxially grown. Depending on how buried layer 22 and floating body 24 are formed, floating body 24 may have the same doping as substrate 12 in some embodiments or a different doping, if desired in other embodiments.
A source line region 16 having a second conductivity type, such as n-type, for example, is provided in floating body region 24, so as to bound a portion of the top of the floating body region in a manner discussed above, and is exposed at surface 14. Source line region 16 may be formed by an implantation process on the material making up substrate 12, according to any implantation process known and typically used in the art. Alternatively, a solid state diffusion or a selective epitaxial growth process could be used to form source line region 16.
A bit line region 18, also referred to as drain region 18, having a second conductivity type, such as n-type, for example, is also provided in floating body region 24, so as to bound a portion of the top of the floating body region in a manner discussed above, and is exposed at cell surface 14. Bit line region 18 may be formed by an implantation process on the material making up substrate 12, according to any implantation process known and typically used in the art. Alternatively, a solid state diffusion or a selective epitaxial growth process could be used to form bit line region 18.
A gate 60 is positioned in between the source line region 16 and the drain region 18, above the floating body region 24. The gate 60 is insulated from the floating body region 24 by an insulating layer 62. Insulating layer 62 may be made of silicon oxide and/or other dielectric materials, including high-K dielectric materials, such as, but not limited to, tantalum peroxide, titanium oxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate 60 may be made of, for example, polysilicon material or metal gate electrode, such as tungsten, tantalum, titanium and their nitrides.
Insulating layers 26 (like, for example, shallow trench isolation (STI)), may be made of silicon oxide, for example, though other insulating materials may be used. Insulating layers 26 insulate memory cell 50 from adjacent memory cell 50. The bottom of insulating layer 26 may reside inside the buried region 22 allowing buried region 22 to be continuous as shown in
Cell 520 includes several terminals: word line (WL) terminal 70 electrically connected to gate 60, bit line (BL) terminal 74 electrically connected to bit line region 18, source line (SL) terminal 72 electrically connected to source line region 16, buried well (BW) terminal 76 electrically connected to buried layer 22, and substrate terminal 78 electrically connected to the substrate 12. Alternatively, the SL terminal 72 may be electrically connected to region 18 and BL terminal 74 may be electrically connected to region 16.
As shown in
Several operations can be performed by memory cell 530 such as holding, read, write logic-1 and write logic-0 operations, and have been described in U.S. Pat. No. 9,230,651 to Widjaja et al., titled “Memory Device Having Floating Body Transistor” (“Widjaja-3”) and U.S. Pat. No. 8,077,536, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), which are both hereby incorporated herein, in their entireties, by reference thereto.
In the shared BL architecture of memory array 1530 shown in
In one embodiment the bias conditions for the read operation on memory cell 530 are: +1.0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminal 70, +0.2 volts is applied to the first selected BL terminals 74 (BL terminals 74b and 74c in
In the shared BL architecture of memory 1530 shown in
In one embodiment the bias conditions for the write logic-1 operation on memory cell 530 are: +1.0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminal 70, +0.5 volts is applied to the selected BL terminals 74 (BL terminals 74b and 74c connected to the selected cell 530a in FIG. 31), 0 volts is applied to unselected BL terminal 74, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, and 0 volts is applied to the substrate terminal 78. In other embodiments, different voltages may be applied to the various terminals of memory cell 530 and the exemplary voltages described are not limiting.
Applying +0.5 volts to the selected BL terminals 74 will avoid writing to the adjacent memory cells 530 sharing the same BL terminal 74 (for example compared to applying +1.0 volts to both WL terminal 70 and BL terminals 74). The selected memory cell 530 will receive capacitive coupling from both source line region 16 and bit line region 18 connected to the selected BL terminals 74 (e.g. BL terminals 74b and 74c in
In the shared BL architecture of memory 1530 shown in
In one embodiment the bias conditions for the write logic-0 operation on memory cell 530 are: +1.0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminal 70, −0.3 volts is applied to the selected BL terminals 74 (BL terminals 74b and 74c connected to the selected cell 530a in
Applying −0.3 volts to the selected BL terminals 74 will avoid writing logic-0 to the adjacent memory cells 530 sharing the same BL terminal 74 (for example compared to applying −0.5 volts to both BL terminals 74). The charge stored in selected memory cell 530 will be evacuated through forward-biasing both source line region 16 and bit line region 18 connected to the selected BL terminals 74 (e.g. BL terminals 74b and 74c in
In one embodiment the bias conditions for the write logic-0 operation on memory cell 530 are: 0 volts is applied to WL terminal 70, −0.6 volts is applied to the selected BL terminals 74, 0 volts is applied to unselected BL terminals 74, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, and 0 volts is applied to the substrate terminal 78. In other embodiments, different voltages may be applied to the various terminals of memory cell 530 and the exemplary voltages described are not limiting.
If desired, write logic-0 can be performed on three columns simultaneously. For example, by applying −1.0 volts to BL terminals 74b and 74c, three columns of memory cells (the first 3 left columns in
In the shared BL architecture of memory 1540 shown in
In one embodiment the bias conditions for the write logic-1 operation on memory cell 540 are: +1.0 volts is applied to selected WL terminal 70, 0 volt is applied to unselected WL terminal 70, +0.5 volts is applied to the selected BL terminal 74, +0.5 volts is applied to the selected SL terminal 72, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, and 0 volts is applied to the substrate terminal 78. In other embodiments, different voltages may be applied to the various terminals of memory cell 540 and the exemplary voltages described are not limiting.
Applying +0.5 volts to the selected BL terminals 74 will avoid writing to the adjacent memory cells 540 sharing the same BL terminal 74 (for example compared to applying +1.0 volts to both WL terminal 70 and BL terminals 74). The selected memory cell 540 will receive capacitive coupling from both source line region 16 and bit line region 18 connected to the selected BL terminals 74 (e.g. BL terminal 74a and SL terminal 72a in
In one embodiment the bias conditions for the write logic-0 operation on memory cell 540 are: +1.0 volts is applied to selected WL terminal 70, 0 volts is applied to unselected WL terminal 70, −0.3 volts is applied to the selected BL terminal 74, −0.3 volts is applied to selected SL terminal 74, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, and 0 volts is applied to the substrate terminal 78. In other embodiments, different voltages may be applied to the various terminals of memory cell 540 and the exemplary voltages described are not limiting.
Applying −0.3 volts to the selected BL terminal 74 and selected SL terminal 72 will avoid writing to the adjacent memory cells 540 sharing the same BL terminal 74 (for example compared to applying −0.5 volts to the selected BL terminal 74). The charge stored in selected memory cell 540 will be evacuated through forward-biasing both source line region 16 and bit line region 18 connected to the selected BL terminal 74 and SL terminal 72 (e.g. BL terminal 74a and SL terminal 72a in
In one embodiment the bias conditions for the write logic-0 operation on memory cell 540 are: 0 volts is applied to WL terminal 70, −1.0 volts is applied to the selected SL terminal 72, 0 volts is applied to all BL terminals 74, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, and 0 volts is applied to the substrate terminal 78. In other embodiments, different voltages may be applied to the various terminals of memory cell 540 and the exemplary voltages described are not limiting.
If desired, write logic-0 can be performed on two rows simultaneously. For example, by applying −1.0 volts to SL terminals 72a and 72b as shown in
As illustrated in
The exemplary memory cell 550 illustrated in
The memory cell 660 illustrated in
Referring to
After this process step, device also includes a buried layer region 22 of a second conductivity type, such as n-type, for example (or p-type, when the first conductivity type is n-type); a well region 24 of the first conductivity type, such as p-type, for example. Some portion of the well region 24 will be floating body region of memory device when the process is completed.
Buried layer region 22 may be formed by an ion implantation process on the material of substrate 12. Alternatively, buried layer region 22 and the well region 24 can be grown epitaxially on top of substrate 12 or formed through a solid state diffusion process.
Floating body 24 may be the portion of the original substrate 12 above buried layer 22 if buried layer 22 is implanted. Alternatively, floating body 24 may be epitaxially grown. Depending on how buried layer 22 and floating body 24 are formed, floating body 24 may have the same doping as substrate 12 in some embodiments or a different doping, if desired in other embodiments.
A source line region 16, also referred to as source region 16, having a second conductivity type, such as n-type, for example (or p-type, when the first conductivity type is n-type), is provided in floating body region 24, so as to bound a portion of the top of the floating body region in a manner discussed above, and is exposed at surface 14. Source line region 16 may be formed by an implantation process on the material making up substrate 12, according to any implantation process known and typically used in the art. Alternatively, a solid state diffusion or a selective epitaxial growth process could be used to form source line region 16.
A bit line region 18, also referred to as drain region 18, having a second conductivity type, such as n-type, for example (or p-type, when the first conductivity type is n-type), is also provided in floating body region 24, so as to bound a portion of the top of the floating body region in a manner discussed above, and is exposed at cell surface 14. Bit line region 18 may be formed by an implantation process on the material making up substrate 12, according to any implantation process known and typically used in the art. Alternatively, a solid state diffusion or a selective epitaxial growth process could be used to form bit line region 18.
A gate 60 is positioned in between the source line region 16 and the drain region 18, above the floating body region 24. The gate 60 is insulated from the floating body region 24 by an insulating layer 62. Insulating layer 62 may be made of silicon oxide and/or other dielectric materials, including high-K dielectric materials, such as, but not limited to, tantalum peroxide, titanium oxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate 60 may be made of, for example, polysilicon material or metal gate electrode, such as tungsten, tantalum, titanium and their nitrides.
Cell 520 includes several terminals: word line (WL) terminal 70 electrically connected to gate 60, bit line (BL) terminal 74 electrically connected to bit line region 18, source line (SL) terminal 72 electrically connected to source line region 16, buried well (BW) or deep n-well (DNWL) terminal 76 electrically connected to buried layer 22, and substrate terminal 78 electrically connected to the substrate 12. Alternatively, the SL terminal 72 may be electrically connected to region 18 and BL terminal 74 may be electrically connected to region 16.
Referring to
As shown in
Each memory cell 850 in memory array 800 is insulated from neighboring memory cells 850 by the insulating layer 26 in one direction along the word line direction, orthogonal to the I-I′ direction, and by turning off the dummy transistor in the other direction along the bit line direction. In the operations of the memory cell 850, the dummy transistor is turned off by applying about 0.0V or a negative voltage, for example about −0.2V (where the dummy transistor is n-channel transistor).
Several operations can be performed by memory cells 850 and 850F such as holding, read, write logic-1 and write logic-0 operations, and have been described in U.S. Pat. No. 9,230,651 to Widjaja et al., titled “Memory Device Having Floating Body Transistor” (“Widjaja-3”) and U.S. Pat. No. 8,077,536, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), which are both hereby incorporated herein, in their entireties, by reference thereto.
In one embodiment the bias conditions for the standby operation on memory cell 850F in an array of memory cells are: 0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminal 70, 0 volts is applied to the selected BL terminals 74, 0 volts is applied to unselected BL terminal 74, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, 0 volts is applied to the substrate terminal 78, and 0 volts is applied to the dummy WLD terminal 70D. In other embodiments, different voltages may be applied to the various terminals of memory cell 850F and the exemplary voltages described are not limiting.
In one embodiment the bias conditions for the read operation on a selected memory cell 850F in an array of memory cells 850F are: +1.0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminals 70, +0.2 volts is applied to the selected BL terminals 74, 0 volts is applied to unselected BL terminals 74, 0 volts is applied to the selected SL terminal 72, 0 volts is applied to unselected SL terminals 72, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, 0 volts is applied to the substrate terminal 78, and 0 volts is applied to the dummy WLD terminal 70D. In other embodiments, different voltages may be applied to the various terminals of memory cell 850F and the exemplary voltages described are not limiting.
In one embodiment the bias conditions for a write logic-1 operation on memory cell 850F in an array of memory cells 850F are: +1.0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminals 70, +1.0 volts is applied to the selected BL terminals 74, 0 volts is applied to unselected BL terminals 74, 0 volts is applied to the selected SL terminal 72, 0 volts is applied to unselected SL terminals 72, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, 0 volts is applied to the substrate terminal 78, and 0 volts is applied to the dummy WLD terminal 70D. In other embodiments, different voltages may be applied to the various terminals of memory cell 850F and the exemplary voltages described are not limiting.
In one embodiment the bias conditions for a write logic-0 operation on memory cell 850F in an array of memory cells 850F are: 0 volts is applied to selected WL terminal 70, 0 V is applied to unselected WL terminals 70, 0 volts is applied to the selected BL terminals 74, 0 volts is applied to unselected BL terminals 74, −0.5 volts is applied to the selected SL terminal 72, 0 volts is applied to the unselected SL terminals 72, a positive voltage, for example, +1.0 volts is applied to BW terminal 76, 0 volts is applied to the substrate terminal 78, and 0 volts is applied to the dummy WLD terminal 70D. In other embodiments, different voltages may be applied to the various terminals of memory cell 850F and the exemplary voltages described are not limiting.
In one particular non-limiting embodiment, about −1.2 volts is applied to the selected WL2 terminal 72, about +1.2 volts is applied to the selected WL1 terminal 70, about +1.2 volts and about −0.2 volts is applied to the selected BL terminal 76 for write logic-1 and write logic-0 operations, respectively, about +1.2 volts is applied to the selected BW terminal 78, and about 0.0 volts is applied to the SUB terminal 80. For the unselected cells, about +1.2 volts is applied to the unselected WL2 terminal 72, about 0.0 volts is applied to the unselected WL1 terminal 70, about 0.0 volts is applied to the unselected BL terminal 76, about +1.2 volts is applied to the selected BW terminal 78, and about 0.0 volts is applied to the SUB terminal 80.
From the foregoing it can be seen that a memory cell having an electrically floating body has been described. While the foregoing written description of the invention enables one of ordinary skill to make and use what is considered presently to be the best mode thereof, those of ordinary skill will understand and appreciate the existence of variations, combinations, and equivalents of the specific embodiment, method, and examples herein. The invention should therefore not be limited by the above described embodiment, method, and examples, but by all embodiments and methods within the scope and spirit of the invention as claimed.
This application is a continuation of co-pending application Ser. No. 17/092,659, filed Nov. 9, 2020, which is a continuation of application Ser. No. 16/682,259, filed Nov. 13, 2019, now U.S. Pat. No. 10,854,745, which is a continuation of application Ser. No. 16/105,579, filed Aug. 20, 2018, now U.S. Pat. No. 10,529,853, which is a continuation of application Ser. No. 15/798,342, filed Oct. 30, 2017, now U.S. Pat. No. 10,079,301, which applications and patents are hereby incorporated herein, in their entireties, by reference thereto, and to which applications we claim priority. Application Ser. No. 15/798,342 claims the benefit of U.S. Provisional Application No. 62/415,511, filed Nov. 1, 2016, which application is hereby incorporated herein, in its entirety, by reference thereto. Application Ser. No. 15/798,342 claims the benefit of U.S. Provisional Application No. 62/451,439, filed Jan. 27, 2017, which application is hereby incorporated herein, in its entirety, by reference thereto. Application Ser. No. 15/798,342 claims the benefit of U.S. Provisional Application No. 62/461,160, filed Feb. 20, 2017, which application is hereby incorporated herein, in its entirety, by reference thereto. Application Ser. No. 15/798,342 claims the benefit of U.S. Provisional Application No. 62/552,048, filed Aug. 30, 2017, which application is hereby incorporated herein, in its entirety, by reference thereto.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4300212 | Simko | Nov 1981 | A |
| 4959812 | Momodomi et al. | Sep 1990 | A |
| 4975764 | Hsu | Dec 1990 | A |
| 5304833 | Shigeki et al. | Apr 1994 | A |
| 5365477 | Cooper, Jr. et al. | Nov 1994 | A |
| 5465249 | Cooper, Jr. et al. | Nov 1995 | A |
| 5519831 | Holzhammer | May 1996 | A |
| 5581504 | Chang | Dec 1996 | A |
| 5767549 | Chen et al. | Jun 1998 | A |
| 5999444 | Fujiwara et al. | Dec 1999 | A |
| 6005818 | Ferrant et al. | Dec 1999 | A |
| 6141248 | Forbes et al. | Oct 2000 | A |
| 6163048 | Hirose et al. | Dec 2000 | A |
| 6166407 | Ohta | Dec 2000 | A |
| 6277689 | Wong | Aug 2001 | B1 |
| 6341087 | Kunikiyo et al. | Jan 2002 | B1 |
| 6356485 | Proebsting et al. | Mar 2002 | B1 |
| 6376876 | Shin et al. | Apr 2002 | B1 |
| 6433391 | En et al. | Aug 2002 | B1 |
| 6542411 | Tanikawa et al. | Apr 2003 | B2 |
| 6614684 | Shukuri et al. | Sep 2003 | B1 |
| 6661042 | Hsu | Dec 2003 | B2 |
| 6686624 | Hsu | Feb 2004 | B2 |
| 6724657 | Shukuri et al. | Apr 2004 | B2 |
| 6791882 | Seki et al. | Sep 2004 | B2 |
| 6801452 | Miwa et al. | Oct 2004 | B2 |
| 6835979 | Liu et al. | Dec 2004 | B1 |
| 6885581 | Nemati et al. | Apr 2005 | B2 |
| 6913964 | Hsu | Jul 2005 | B2 |
| 6925006 | Fazan et al. | Aug 2005 | B2 |
| 6954377 | Choi et al. | Oct 2005 | B2 |
| 6969662 | Fazan et al. | Nov 2005 | B2 |
| 7030435 | Gnadinger | Apr 2006 | B2 |
| 7085156 | Ferrant et al. | Aug 2006 | B2 |
| 7118986 | Steigerwalt et al. | Oct 2006 | B2 |
| 7170807 | Fazan et al. | Jan 2007 | B2 |
| 7208795 | Carver et al. | Apr 2007 | B2 |
| 7224019 | Hieda et al. | May 2007 | B2 |
| 7259420 | Anderson et al. | Aug 2007 | B2 |
| 7259992 | Shirota | Aug 2007 | B2 |
| 7285820 | Park et al. | Oct 2007 | B2 |
| 7301803 | Okhonin et al. | Nov 2007 | B2 |
| 7329580 | Cho et al. | Feb 2008 | B2 |
| 7376006 | Bednorz et al. | May 2008 | B2 |
| 7440333 | Hsia et al. | Oct 2008 | B2 |
| 7447068 | Tsai et al. | Nov 2008 | B2 |
| 7450423 | Lai et al. | Nov 2008 | B2 |
| 7473611 | Cho et al. | Jan 2009 | B2 |
| 7504302 | Mathew et al. | Mar 2009 | B2 |
| 7541636 | Ranica et al. | Jun 2009 | B2 |
| 7542345 | Okhonin et al. | Jun 2009 | B2 |
| 7579241 | Hieda et al. | Aug 2009 | B2 |
| 7609551 | Shino et al. | Oct 2009 | B2 |
| 7622761 | Park et al. | Nov 2009 | B2 |
| 7701763 | Roohparvar | Apr 2010 | B2 |
| 7733693 | Ferrant et al. | Jun 2010 | B2 |
| 7759715 | Bhattacharyya | Jul 2010 | B2 |
| 7760548 | Widjaja | Jul 2010 | B2 |
| 7847338 | Widjaja | Dec 2010 | B2 |
| 7924630 | Carman | Apr 2011 | B2 |
| 7933140 | Wang et al. | Apr 2011 | B2 |
| 8014200 | Widjaja | Sep 2011 | B2 |
| 8036033 | Widjaja | Oct 2011 | B2 |
| 8059459 | Widjaja | Nov 2011 | B2 |
| 8077536 | Widjaja | Dec 2011 | B2 |
| 8130547 | Widjaja et al. | Mar 2012 | B2 |
| 8130548 | Widjaja et al. | Mar 2012 | B2 |
| 8159878 | Widjaja | Apr 2012 | B2 |
| 8174886 | Widjaja et al. | May 2012 | B2 |
| 8194451 | Widjaja | Jun 2012 | B2 |
| 8208302 | Widjaja et al. | Jun 2012 | B2 |
| 8243499 | Widjaja | Aug 2012 | B2 |
| 8294193 | Widjaja | Oct 2012 | B2 |
| 8391066 | Widjaja | Mar 2013 | B2 |
| 8472249 | Widjaja | Jun 2013 | B2 |
| 8514622 | Widjaja | Aug 2013 | B2 |
| 8514623 | Widjaja et al. | Aug 2013 | B2 |
| 8531881 | Widjaja | Sep 2013 | B2 |
| 8559257 | Widjaja | Oct 2013 | B2 |
| 8570803 | Widjaja | Oct 2013 | B2 |
| 8582359 | Widjaja | Nov 2013 | B2 |
| 8654583 | Widjaja | Feb 2014 | B2 |
| 8711622 | Widjaja | Apr 2014 | B2 |
| 8767458 | Widjaja | Jul 2014 | B2 |
| 8787085 | Widjaja | Jul 2014 | B2 |
| 8837247 | Widjaja | Sep 2014 | B2 |
| 8923052 | Widjaja | Dec 2014 | B2 |
| 8934296 | Widjaja | Jan 2015 | B2 |
| 8937834 | Widjaja et al. | Jan 2015 | B2 |
| 8957458 | Widjaja | Feb 2015 | B2 |
| 8995186 | Widjaja | Mar 2015 | B2 |
| 9001581 | Widjaja | Apr 2015 | B2 |
| 9025358 | Widjaja | May 2015 | B2 |
| 9029922 | Han et al. | May 2015 | B2 |
| 9030872 | Widjaja et al. | May 2015 | B2 |
| 9087580 | Widjaja | Jul 2015 | B2 |
| 9153309 | Widjaja et al. | Oct 2015 | B2 |
| 9153333 | Widjaja | Oct 2015 | B2 |
| 9208840 | Widjaja et al. | Dec 2015 | B2 |
| 9208880 | Louie et al. | Dec 2015 | B2 |
| 9209188 | Widjaja | Dec 2015 | B2 |
| 9230651 | Widjaja et al. | Jan 2016 | B2 |
| 9230965 | Widjaja | Jan 2016 | B2 |
| 9236382 | Widjaja et al. | Jan 2016 | B2 |
| 9257179 | Widjaja | Feb 2016 | B2 |
| 9275723 | Louie et al. | Mar 2016 | B2 |
| 9281022 | Louie et al. | Mar 2016 | B2 |
| 9368625 | Louie et al. | Jun 2016 | B2 |
| 9391079 | Widjaja | Jul 2016 | B2 |
| 9401206 | Widjaja | Jul 2016 | B2 |
| 9431401 | Han et al. | Aug 2016 | B2 |
| 9455262 | Widjaja | Sep 2016 | B2 |
| 9460790 | Widjaja | Oct 2016 | B2 |
| 9484082 | Widjaja | Nov 2016 | B2 |
| 9490012 | Widjaja | Nov 2016 | B2 |
| 9496053 | Han et al. | Nov 2016 | B2 |
| 9514803 | Widjaja et al. | Dec 2016 | B2 |
| 9524970 | Widjaja | Dec 2016 | B2 |
| 9536595 | Louie et al. | Jan 2017 | B2 |
| 9548119 | Han et al. | Jan 2017 | B2 |
| 9576962 | Widjaja et al. | Feb 2017 | B2 |
| 9589963 | Widjaja | Mar 2017 | B2 |
| 9601493 | Widjaja | Mar 2017 | B2 |
| 9614080 | Widjaja | Apr 2017 | B2 |
| 9646693 | Widjaja | May 2017 | B2 |
| 9653467 | Widjaja et al. | May 2017 | B2 |
| 9666275 | Widjaja | May 2017 | B2 |
| 9679648 | Widjaja | Jun 2017 | B2 |
| 9704578 | Louie et al. | Jul 2017 | B2 |
| 9704870 | Widjaja | Jul 2017 | B2 |
| 9715932 | Widjaja | Jul 2017 | B2 |
| 9747983 | Widjaja | Aug 2017 | B2 |
| 9761311 | Widjaja | Sep 2017 | B2 |
| 9761589 | Widjaja | Sep 2017 | B2 |
| 9793277 | Widjaja et al. | Oct 2017 | B2 |
| 9799392 | Han et al. | Oct 2017 | B2 |
| 9812203 | Widjaja | Nov 2017 | B2 |
| 9812456 | Widjaja | Nov 2017 | B2 |
| 9831247 | Han et al. | Nov 2017 | B2 |
| 9847131 | Widjaja | Dec 2017 | B2 |
| 9865332 | Louie et al. | Jan 2018 | B2 |
| 9881667 | Han et al. | Jan 2018 | B2 |
| 9893067 | Widjaja et al. | Feb 2018 | B2 |
| 9905564 | Widjaja et al. | Feb 2018 | B2 |
| 9922711 | Widjaja | Mar 2018 | B2 |
| 9922981 | Widjaja | Mar 2018 | B2 |
| 9928910 | Widjaja | Mar 2018 | B2 |
| 9947387 | Louie et al. | Apr 2018 | B2 |
| 9960166 | Widjaja | May 2018 | B2 |
| 9978450 | Widjaja | May 2018 | B2 |
| 10008266 | Widjaja | Jun 2018 | B1 |
| 10026479 | Louie et al. | Jul 2018 | B2 |
| 10032514 | Widjaja | Jul 2018 | B2 |
| 10032776 | Widjaja et al. | Jul 2018 | B2 |
| 10056387 | Widjaja | Aug 2018 | B2 |
| 10074653 | Widjaja | Sep 2018 | B2 |
| 10079236 | Widjaja | Sep 2018 | B2 |
| 10079301 | Han et al. | Sep 2018 | B2 |
| 10103148 | Louie et al. | Oct 2018 | B2 |
| 10103149 | Han et al. | Oct 2018 | B2 |
| 10109349 | Widjaja | Oct 2018 | B2 |
| 10115451 | Han et al. | Oct 2018 | B2 |
| 10141046 | Han et al. | Nov 2018 | B2 |
| 10141315 | Widjaja et al. | Nov 2018 | B2 |
| 10157663 | Louie et al. | Dec 2018 | B2 |
| 10163907 | Widjaja et al. | Dec 2018 | B2 |
| 10181471 | Widjaja et al. | Jan 2019 | B2 |
| 10192872 | Widjaja et al. | Jan 2019 | B2 |
| 10204684 | Widjaja | Feb 2019 | B2 |
| 10204908 | Widjaja | Feb 2019 | B2 |
| 10210934 | Widjaja | Feb 2019 | B2 |
| 10211209 | Widjaja | Feb 2019 | B2 |
| 10242739 | Widjaja | Mar 2019 | B2 |
| 10249368 | Widjaja | Apr 2019 | B2 |
| 10340006 | Widjaja | Jul 2019 | B2 |
| 10340276 | Widjaja et al. | Jul 2019 | B2 |
| 10347636 | Widjaja | Jul 2019 | B2 |
| 10354718 | Louie et al. | Jul 2019 | B2 |
| 10373685 | Louie et al. | Aug 2019 | B2 |
| 10388378 | Widjaja | Aug 2019 | B2 |
| 10403361 | Widjaja | Sep 2019 | B2 |
| 10453847 | Widjaja et al. | Oct 2019 | B2 |
| 10461083 | Han et al. | Oct 2019 | B2 |
| 10461084 | Widjaja | Oct 2019 | B2 |
| 10468102 | Widjaja | Nov 2019 | B2 |
| 10497443 | Widjaja | Dec 2019 | B2 |
| 10504585 | Louie et al. | Dec 2019 | B2 |
| 10515968 | Widjaja | Dec 2019 | B2 |
| 10522213 | Han et al. | Dec 2019 | B2 |
| 10529424 | Widjaja | Jan 2020 | B2 |
| 10529853 | Han et al. | Jan 2020 | B2 |
| 10546860 | Louie et al. | Jan 2020 | B2 |
| 10553281 | Widjaja | Feb 2020 | B2 |
| 10553683 | Han et al. | Feb 2020 | B2 |
| 10580482 | Han et al. | Mar 2020 | B2 |
| 10593675 | Widjaja et al. | Mar 2020 | B2 |
| 10615163 | Widjaja | Apr 2020 | B2 |
| 10622069 | Widjaja | Apr 2020 | B2 |
| 10629599 | Widjaja et al. | Apr 2020 | B2 |
| 10644001 | Widjaja et al. | May 2020 | B2 |
| 10644002 | Widjaja | May 2020 | B2 |
| 10707209 | Widjaja | Jul 2020 | B2 |
| 10734076 | Widjaja | Aug 2020 | B2 |
| 10748904 | Widjaja et al. | Aug 2020 | B2 |
| 10783952 | Louie et al. | Sep 2020 | B2 |
| 10797055 | Widjaja et al. | Oct 2020 | B2 |
| 10804276 | Widjaja | Oct 2020 | B2 |
| 10818354 | Widjaja | Oct 2020 | B2 |
| 10825520 | Widjaja | Nov 2020 | B2 |
| 10839905 | Louie et al. | Nov 2020 | B2 |
| 10854745 | Han et al. | Dec 2020 | B2 |
| 10861548 | Widjaja | Dec 2020 | B2 |
| 10867676 | Widjaja | Dec 2020 | B2 |
| 10916297 | Han et al. | Feb 2021 | B2 |
| 10923183 | Han et al. | Feb 2021 | B2 |
| 10978455 | Widjaja et al. | Apr 2021 | B2 |
| 10991697 | Louie et al. | Apr 2021 | B2 |
| 10991698 | Widjaja | Apr 2021 | B2 |
| 11004512 | Widjaja | May 2021 | B2 |
| 11011232 | Widjaja | May 2021 | B2 |
| 11018136 | Widjaja et al. | May 2021 | B2 |
| 11031401 | Han et al. | Jun 2021 | B2 |
| 11037929 | Widjaja | Jun 2021 | B2 |
| 11063048 | Widjaja | Jul 2021 | B2 |
| 11100994 | Louie et al. | Aug 2021 | B2 |
| 11133313 | Widjaja | Sep 2021 | B2 |
| 11183498 | Widjaja et al. | Nov 2021 | B2 |
| 11201215 | Han et al. | Dec 2021 | B2 |
| 11211125 | Widjaja | Dec 2021 | B2 |
| 11217300 | Louie et al. | Jan 2022 | B2 |
| 11250905 | Han et al. | Feb 2022 | B2 |
| 11295813 | Widjaja | Apr 2022 | B2 |
| 11328765 | Han et al. | May 2022 | B2 |
| 11342018 | Louie et al. | May 2022 | B2 |
| 11348922 | Widjaja et al. | May 2022 | B2 |
| 11348923 | Widjaja | May 2022 | B2 |
| 11404420 | Widjaja | Aug 2022 | B2 |
| 11417657 | Widjaja et al. | Aug 2022 | B2 |
| 11417658 | Louie et al. | Aug 2022 | B2 |
| 11488665 | Widjaja | Nov 2022 | B2 |
| 11488955 | Widjaja | Nov 2022 | B2 |
| 11489073 | Han et al. | Nov 2022 | B2 |
| 20020018366 | Von Schwerin et al. | Feb 2002 | A1 |
| 20020048193 | Tanikawa et al. | Apr 2002 | A1 |
| 20050024968 | Lee et al. | Feb 2005 | A1 |
| 20050032313 | Forbes | Feb 2005 | A1 |
| 20050124120 | Du et al. | Jun 2005 | A1 |
| 20060044915 | Park et al. | Mar 2006 | A1 |
| 20060125010 | Bhattacharyya | Jun 2006 | A1 |
| 20060157679 | Scheuerlein | Jul 2006 | A1 |
| 20060227601 | Bhattacharyya | Oct 2006 | A1 |
| 20060237770 | Huang et al. | Oct 2006 | A1 |
| 20060278915 | Lee et al. | Dec 2006 | A1 |
| 20070004149 | Tews | Jan 2007 | A1 |
| 20070090443 | Choi et al. | Apr 2007 | A1 |
| 20070164351 | Hamamoto | Jul 2007 | A1 |
| 20070164352 | Padilla | Jul 2007 | A1 |
| 20070210338 | Orlowski | Sep 2007 | A1 |
| 20070215954 | Mouli | Sep 2007 | A1 |
| 20070284648 | Park et al. | Dec 2007 | A1 |
| 20080048239 | Huo et al. | Feb 2008 | A1 |
| 20080080248 | Lue et al. | Apr 2008 | A1 |
| 20080123418 | Widjaja | May 2008 | A1 |
| 20080224202 | Young et al. | Sep 2008 | A1 |
| 20080265305 | He et al. | Oct 2008 | A1 |
| 20080303079 | Cho et al. | Dec 2008 | A1 |
| 20090034320 | Ueda | Feb 2009 | A1 |
| 20090065853 | Hanafi | Mar 2009 | A1 |
| 20090081835 | Kim et al. | Mar 2009 | A1 |
| 20090085089 | Chang et al. | Apr 2009 | A1 |
| 20090108322 | Widjaja | Apr 2009 | A1 |
| 20090108351 | Yang et al. | Apr 2009 | A1 |
| 20090109750 | Widjaja | Apr 2009 | A1 |
| 20090173985 | Lee et al. | Jul 2009 | A1 |
| 20090190402 | Hsu et al. | Jul 2009 | A1 |
| 20090251966 | Widjaja | Oct 2009 | A1 |
| 20090316492 | Widjaja | Dec 2009 | A1 |
| 20100008139 | Bae | Jan 2010 | A1 |
| 20100034041 | Widjaja | Feb 2010 | A1 |
| 20100046287 | Widjaja | Feb 2010 | A1 |
| 20100246277 | Widjaja | Sep 2010 | A1 |
| 20100246284 | Widjaja | Sep 2010 | A1 |
| 20110032756 | Widjaja | Feb 2011 | A1 |
| 20110042736 | Widjaja | Feb 2011 | A1 |
| 20110044110 | Widjaja | Feb 2011 | A1 |
| 20110228591 | Widjaja | Sep 2011 | A1 |
| 20110305085 | Widjaja | Dec 2011 | A1 |
| 20120012915 | Widjaja et al. | Jan 2012 | A1 |
| 20120014180 | Widjaja | Jan 2012 | A1 |
| 20120014188 | Widjaja et al. | Jan 2012 | A1 |
| 20120069652 | Widjaja | Mar 2012 | A1 |
| 20120106234 | Widjaja | May 2012 | A1 |
| 20120113712 | Widjaja | May 2012 | A1 |
| 20120120752 | Widjaja | May 2012 | A1 |
| 20120217549 | Widjaja | Aug 2012 | A1 |
| 20120230123 | Widjaja et al. | Sep 2012 | A1 |
| 20130015517 | Widjaja et al. | Jan 2013 | A1 |
| 20130148422 | Widjaja | Jun 2013 | A1 |
| 20130250685 | Widjaja | Sep 2013 | A1 |
| 20130264656 | Widjaja et al. | Oct 2013 | A1 |
| 20130292635 | Widjaja | Nov 2013 | A1 |
| 20130301349 | Widjaja | Nov 2013 | A1 |
| 20140021549 | Widjaja | Jan 2014 | A1 |
| 20140159156 | Widjaja | Jun 2014 | A1 |
| 20140160868 | Widjaja et al. | Jun 2014 | A1 |
| 20140198551 | Louie et al. | Jul 2014 | A1 |
| 20140307501 | Louie et al. | Oct 2014 | A1 |
| 20140328128 | Louie et al. | Nov 2014 | A1 |
| 20140332899 | Widjaja | Nov 2014 | A1 |
| 20140340972 | Widjaja et al. | Nov 2014 | A1 |
| 20140355343 | Widjaja | Dec 2014 | A1 |
| 20150016207 | Louie et al. | Jan 2015 | A1 |
| 20150023105 | Widjaja | Jan 2015 | A1 |
| 20150092486 | Widjaja | Apr 2015 | A1 |
| 20150109860 | Widjaja | Apr 2015 | A1 |
| 20150155284 | Widjaja | Jun 2015 | A1 |
| 20150170743 | Widjaja | Jun 2015 | A1 |
| 20150187776 | Widjaja | Jul 2015 | A1 |
| 20150200005 | Han et al. | Jul 2015 | A1 |
| 20150213892 | Widjaja | Jul 2015 | A1 |
| 20150221650 | Widjaja et al. | Aug 2015 | A1 |
| 20150221653 | Han et al. | Aug 2015 | A1 |
| 20150310917 | Widjaja | Oct 2015 | A1 |
| 20150371707 | Widjaja | Dec 2015 | A1 |
| 20160005741 | Widjaja | Jan 2016 | A1 |
| 20160005750 | Widjaja | Jan 2016 | A1 |
| 20160049190 | Han et al. | Feb 2016 | A1 |
| 20160078921 | Widjaja et al. | Mar 2016 | A1 |
| 20160086655 | Widjaja | Mar 2016 | A1 |
| 20160086954 | Widjaja et al. | Mar 2016 | A1 |
| 20160111158 | Widjaja | Apr 2016 | A1 |
| 20160148674 | Louie et al. | May 2016 | A1 |
| 20160148675 | Louie et al. | May 2016 | A1 |
| 20160267982 | Louie et al. | Sep 2016 | A1 |
| 20160300613 | Widjaja | Oct 2016 | A1 |
| 20160300841 | Widjaja | Oct 2016 | A1 |
| 20160336326 | Han et al. | Nov 2016 | A1 |
| 20160365444 | Widjaja | Dec 2016 | A1 |
| 20170025164 | Han et al. | Jan 2017 | A1 |
| 20170025534 | Widjaja | Jan 2017 | A1 |
| 20170032842 | Widjaja | Feb 2017 | A1 |
| 20170040326 | Widjaja | Feb 2017 | A1 |
| 20170053919 | Widjaja et al. | Feb 2017 | A1 |
| 20170076784 | Louie et al. | Mar 2017 | A1 |
| 20170092351 | Han et al. | Mar 2017 | A1 |
| 20170092359 | Louie et al. | Mar 2017 | A1 |
| 20170092648 | Widjaja | Mar 2017 | A1 |
| 20170125421 | Widjaja et al. | May 2017 | A1 |
| 20170133091 | Widjaja | May 2017 | A1 |
| 20170133382 | Widjaja | May 2017 | A1 |
| 20170154888 | Widjaja | Jun 2017 | A1 |
| 20170169887 | Widjaja | Jun 2017 | A1 |
| 20170213593 | Widjaja | Jul 2017 | A1 |
| 20170221900 | Widjaja et al. | Aug 2017 | A1 |
| 20170229178 | Widjaja | Aug 2017 | A1 |
| 20170229466 | Widjaja et al. | Aug 2017 | A1 |
| 20170271339 | Widjaja | Sep 2017 | A1 |
| 20170294230 | Widjaja | Oct 2017 | A1 |
| 20170294438 | Louie et al. | Oct 2017 | A1 |
| 20170365340 | Widjaja | Dec 2017 | A1 |
| 20170365607 | Widjaja | Dec 2017 | A1 |
| 20180012646 | Han et al. | Jan 2018 | A1 |
| 20180012893 | Widjaja et al. | Jan 2018 | A1 |
| 20180025780 | Widjaja | Jan 2018 | A1 |
| 20180047731 | Widjaja | Feb 2018 | A1 |
| 20180069008 | Han et al. | Mar 2018 | A1 |
| 20180075907 | Widjaja | Mar 2018 | A1 |
| 20180096721 | Louie et al. | Apr 2018 | A1 |
| 20180122457 | Han et al. | May 2018 | A1 |
| 20180122943 | Han et al. | May 2018 | A1 |
| 20180158825 | Widjaja et al. | Jun 2018 | A1 |
| 20180158912 | Han et al. | Jun 2018 | A1 |
| 20180166446 | Widjaja | Jun 2018 | A1 |
| 20180174654 | Widjaja | Jun 2018 | A1 |
| 20180182458 | Widjaja | Jun 2018 | A1 |
| 20180182460 | Widjaja | Jun 2018 | A1 |
| 20180204611 | Louie et al. | Jul 2018 | A1 |
| 20180219013 | Widjaja | Aug 2018 | A1 |
| 20180233199 | Widjaja | Aug 2018 | A1 |
| 20180301191 | Widjaja | Oct 2018 | A1 |
| 20180301192 | Louie et al. | Oct 2018 | A1 |
| 20180308848 | Widjaja et al. | Oct 2018 | A1 |
| 20180330790 | Widjaja | Nov 2018 | A1 |
| 20180331109 | Widjaja | Nov 2018 | A1 |
| 20180358360 | Han et al. | Dec 2018 | A1 |
| 20180374854 | Widjaja | Dec 2018 | A1 |
| 20190006367 | Widjaja | Jan 2019 | A1 |
| 20190006516 | Han et al. | Jan 2019 | A1 |
| 20190027220 | Widjaja | Jan 2019 | A1 |
| 20190027476 | Louie et al. | Jan 2019 | A1 |
| 20190043554 | Han et al. | Feb 2019 | A1 |
| 20190066768 | Han et al. | Feb 2019 | A1 |
| 20190067289 | Widjaja et al. | Feb 2019 | A1 |
| 20190080746 | Louie et al. | Mar 2019 | A1 |
| 20190096889 | Widjaja et al. | Mar 2019 | A1 |
| 20190131305 | Widjaja et al. | May 2019 | A1 |
| 20190139962 | Widjaja | May 2019 | A1 |
| 20190148381 | Widjaja et al. | May 2019 | A1 |
| 20190156889 | Widjaja | May 2019 | A1 |
| 20190156890 | Widjaja | May 2019 | A1 |
| 20190164974 | Widjaja | May 2019 | A1 |
| 20190180820 | Widjaja | Jun 2019 | A1 |
| 20190189212 | Widjaja | Jun 2019 | A1 |
| 20190259763 | Widjaja et al. | Aug 2019 | A1 |
| 20190267089 | Widjaja | Aug 2019 | A1 |
| 20190267382 | Widjaja | Aug 2019 | A1 |
| 20190295629 | Louie et al. | Sep 2019 | A1 |
| 20190295646 | Widjaja | Sep 2019 | A1 |
| 20190311769 | Louie et al. | Oct 2019 | A1 |
| 20190355419 | Widjaja | Nov 2019 | A1 |
| 20200013780 | Widjaja | Jan 2020 | A1 |
| 20200013781 | Widjaja et al. | Jan 2020 | A1 |
| 20200035682 | Han et al. | Jan 2020 | A1 |
| 20200051633 | Widjaja | Feb 2020 | A1 |
| 20200075091 | Louie et al. | Mar 2020 | A1 |
| 20200083373 | Han et al. | Mar 2020 | A1 |
| 20200090734 | Han et al. | Mar 2020 | A1 |
| 20200091155 | Widjaja | Mar 2020 | A1 |
| 20200111792 | Louie et al. | Apr 2020 | A1 |
| 20200118627 | Widjaja | Apr 2020 | A1 |
| 20200118628 | Widjaja | Apr 2020 | A1 |
| 20200135863 | Han et al. | Apr 2020 | A1 |
| 20200168267 | Han et al. | May 2020 | A1 |
| 20200168609 | Widjaja et al. | May 2020 | A1 |
| 20200203346 | Widjaja | Jun 2020 | A1 |
| 20200227415 | Widjaja et al. | Jul 2020 | A1 |
| 20200243529 | Widjaja et al. | Jul 2020 | A1 |
| 20200243530 | Widjaja | Jul 2020 | A1 |
| 20200312855 | Widjaja | Oct 2020 | A1 |
| 20200335156 | Louie et al. | Oct 2020 | A1 |
| 20200335503 | Widjaja et al. | Oct 2020 | A1 |
| 20200342939 | Widjaja | Oct 2020 | A1 |
| 20200411521 | Widjaja et al. | Dec 2020 | A1 |
| 20210005608 | Widjaja | Jan 2021 | A1 |
| 20210050059 | Widjaja | Feb 2021 | A1 |
| 20210057027 | Louie et al. | Feb 2021 | A1 |
| 20210074358 | Widjaja | Mar 2021 | A1 |
| 20210083110 | Han et al. | Mar 2021 | A1 |
| 20210151097 | Han et al. | May 2021 | A1 |
| 20210183432 | Han et al. | Jun 2021 | A1 |
| 20210217754 | Louie et al. | Jul 2021 | A1 |
| 20210225844 | Widjaja et al. | Jul 2021 | A1 |
| 20210249078 | Widjaja | Aug 2021 | A1 |
| 20210257025 | Widjaja | Aug 2021 | A1 |
| 20210257365 | Widjaja | Aug 2021 | A1 |
| 20210288051 | Han et al. | Sep 2021 | A1 |
| 20210327880 | Widjaja | Oct 2021 | A1 |
| 20210358547 | Louie et al. | Nov 2021 | A1 |
| 20210375870 | Widjaja | Dec 2021 | A1 |
| 20210398981 | Widjaja | Dec 2021 | A1 |
| 20220059537 | Widjaja et al. | Feb 2022 | A1 |
| 20220085168 | Han et al. | Mar 2022 | A1 |
| 20220093175 | Widjaja | Mar 2022 | A1 |
| 20220115061 | Louie et al. | Apr 2022 | A1 |
| 20220130451 | Han et al. | Apr 2022 | A1 |
| 20220199160 | Widjaja | Jun 2022 | A1 |
| 20220246205 | Han et al. | Aug 2022 | A1 |
| 20220262430 | Louie et al. | Aug 2022 | A1 |
| 20220262800 | Widjaja | Aug 2022 | A1 |
| 20220278104 | Widjaja et al. | Sep 2022 | A1 |
| 20220352168 | Widjaja | Nov 2022 | A1 |
| 20220359522 | Widjaja et al. | Nov 2022 | A1 |
| 20220367472 | Louie et al. | Nov 2022 | A1 |
| Entry |
|---|
| Ban et al., A Scaled Floating Body Cell (FBC) Memory with High-k+Metal Gate on Thin-Silicon and Thin-BOX for 16-nm Technology Node and Beyond, Symposium on VLSI Technology, 2008, pp. 92-93. |
| Campardo G. et al., VLSI Design of Non-Volatile Memories, 2005. |
| Han et al. Programming/Erasing Characteristics of 45 nm NOR-Type Flash Memory Based on SOI FinFET Structure. vol. 47, Nov. 2005, pp. S564-S567. |
| Headland. Hot electron injection, Feb. 19, 2004. |
| Lanyon, et al., “Bandgap Narrowing in Moderately to Heavily Doped Silicon”, ppl 1014-1018, No. 7, vol. ED-26, 1979. |
| Lin, et al., A new 1T DRAM Cell with enhanced Floating Body Effect, pp. 1-5, 2006. |
| Oh, et al., a 4-Bit Double SONOS memory (DSM) with 4 Storage Nodes Per Cell for Ultimate Multi-Bit Operation, pp. 1-2, 2006. |
| Ohsawa et al., An 18.5ns 128Mb SOI DRAM with a Floating body Cell, IEEE International Solid-State Circuits Conference, 2005, pp. 458-459, 609. |
| Ohsawa, et al. Autonomous refresh of floating body cell (FBC), 2008, pp. 801-804. |
| Ohsawa, et al. Autonomous refresh of floating-body cell due to current Anomaly of Impact Ionization, 2009, pp. 2302-2311. |
| Ohsawa et al., Memory Design Using One-Transistor Gain Cell on SOI, Tech. Digest, IEEE International Solid-State Circuits, vol. 37, No. 11, 2002, pp. 1510-1522. |
| Ohsawa, et al, “A Novel Capacitor-less DRAM Cell: Floating Body Cell”, CRC Press, Taylor & Francis Group, 2012, pp. 1-7. |
| Okhonin, et al. A Capicitor-Less IT-DRAM Cell, vol. 23, No. 2, Feb. 2002, pp. 85-87. |
| Okhonin et al. A SOI Capacitor-less 1T-DRAM Concept. 2001, pp. 153-154. |
| Okhonin, et al., Principles of Transient Charge Pumping on Partially Depleted SOI MOSFETs, IEEE Electron Device Letters, vol. 23, No. 5, May 2002, pp. 279-281. |
| Rodriguez, et al. “A-RAM: Novel capacitor-less DRAM memory.” In SOI Conference, 2009 IEEE International, pp. 1-2. IEEE, 2009. |
| Rodriguez, et al. “Novel capacitorless 1T-DRAM cell for 22-nm node compatible with bulk and SOI substrates.” Electron Devices, IEEE Transactions on, vol. 58, No. 8 (2011), pp. 2371-2377. |
| Rodriguez, et al. “A-RAM memory cell: concept and operation.” Electron Device Letters, IEEE, vol. 31, No. 9 (2010), pp. 972-974. |
| Robert F. Pierret. Semiconductor Device Fundamentals, ISBN: 0-201-54393-1, 1996, by Addison-Wesley Publishing Company, Inc. PNPN Devices 463-476. |
| Romanjek, et al., “Compact (Wg/Lg=80/85nm) FDSOI 1T-DRAM programmed by Meta Stable Dip”, Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, Mar. 6, 2012, pp. 199-202. |
| Rothemund, et al., The importance of being modular, vol. 485, May 2012 pp. 584-585. |
| Sakui, Koji, et al. “A new static memory cell based on reverse base current (RBC) effect of bipolar transistor.” Electron Devices Meeting, 1988. IEDM'88 Technical Digest., International. IEEE, 1988, pp. 44-47. |
| Sakui, K., et al. “A new static memory cell based on the reverse base current effect of bipolar transistors.” Electron Devices, IEEE Transactions on 36.6 (1989): 1215-1217. |
| Shim, Kyung-Suk, In-Young Chung, and Young June Park. “A BJT-Based Heterostructure 1T-DRAM for Low-Voltage Operation.” Electron Device Letters, vol. 33, No. 1, 2012, pp. 14-16. |
| Shin, et al. “Vertical-Gate Si/SiGe Double-HBT-Based Capacitorless 1T DRAM Cell for Extended Retention Time at Low Latch Voltage.” Electron Device Letters, vol. 33, No. 2, 2012, pp. 134-136. |
| Shin, et al. “A novel double HBT-based capacitorless 1T DRAM cell with Si/SiGe heterojunctions.” Electron Device Letters, vol. 32, No. 7, 2011, pp. 850-852. |
| Sze, et al. Physics of Semiconductor Devices, 2007, pp. 1-4. |
| Tack, et al. “The multistable charge-controlled memory effect in SOI MOS transistors at low temperatures.” Electron Devices, IEEE Transactions on 37.5 (1990): 1373-1382. |
| Terada, et al. “A new VLSI memory cell using capacitance coupling (CC cell).” Electron Devices, IEEE Transactions on 31.9 (1984): pp. 319-1324. |
| Ventrice, et al. “Analytical model of deeply-scaled thyristors for memory applications.” Microelectronics and Electron Devices (WMED), 2012 IEEE Workshop on. IEEE, 2012, pp. 1-4. |
| Villaret, et al. “Further insight into the physics and modeling of floating-body capacitorless DRAMs.” Electron Devices, IEEE Transactions on 52.11 (2005): pp. 2447-2454. |
| Waser, Rainer, Resistive non-volatile memory devices (Invited Paper), 2009, pp. 1925-1928. |
| Wu, et al. “Experimental Demonstration of the High-Performance Floating-Body/Gate DRAM Cell for Embedded Memories”, IEEE Elec. Dev. Letter, vol. 33, No. 6, Jun. 2012, pp. 743-745. |
| Yoshida et al., A Design of a Capacitorless 1T-DRAM Cell Using Gate-Induced Drain Leakage (GIDL) Current for Low-power and High-speed Embedded Memory , International Electron Devices Meeting, 2003, pp. 1-4. |
| Zhang, et al. “Total Ionizing Dose Effects on FinFET-Based Capacitor-Less 1T-DRAMs.” Nuclear Science, IEEE Transactions on, vol. 57, No. 6, 2010, pp. 3298-3304. |
| Villaret et al., “Mechanisms of charge modulation in the floating body of triple-well nMOSFET capacitor-less DRAMs”, Microelectronic Engineering 72 (2004) 434-439. |
| International Preliminary Report on Patentability re PCT/US2016/029436, dated Oct. 31, 2017. |
| Almeida, et al., “Comparison between low and high read bias in FB-RAM on UTBOX FDSOI devices”, Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, Mar. 6, 2012, pp. 61-64. |
| Andrade, et al., “The Impact of Back Bias on the Floating Body Effect in UTBOX SOI Devices for 1T-FBRAM Memory Applications”, Devices, Circuits and Systems (ICCDCS), 2012 8th International Caribbean Conference on. IEEE, 2012, pp. 1-4. |
| Aoulaiche, et al. “Junction Field Effect on the Retention Time for One-Transistor Floating-Body RAM.” Electron Devices, IEEE Transactions on, vol. 59, No. 8, 2012, pp. 2167-2172. |
| Aoulaiche, et al. “Hot hole induced damage in 1T-FBRAM on bulk FinFET.” Reliability Physics Symposium (IRPS), 2011 IEEE International. IEEE, 2011, pp. 99-104. |
| Avci, et al. “Floating-Body Diode—A Novel DRAM Device.” Electron Device Letters, IEEE, vol. 33, No. 2, 2012, pp. 161-163. |
| Bawedin, et al., “Floating-Body SOI Memory: Concepts, Physics, and Challenges”, ECS Transactions 19.4 (2009), pp. 243-256. |
| Ban, et al. “Integration of Back-Gate doping for 15-nm node floating body cell (FBC) memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 159-160. |
| Cho, et al. “Variation-aware study of BJT-based capacitorless DRAM cell scaling limit.” Silicon Nanoelectronics Workshop (SNW), 2012 IEEE. IEEE, 2012, pp. 1-2. |
| Cho, et al. “Variation Study and Implications for BJT-Based Thin-Body Capacitorless DRAM.” Electron Device Letters, IEEE, vol. 33, No. 3, 2012, pp. 312-314. |
| Chiu, et al. “Characteristics of a new trench-oxide thin-film transistor and its 1T-DRAM applications.” Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on. IEEE, 2010, pp. 1106-1108. |
| Chiu, et al. “A simple process of thin-film transistor using the trench-oxide layer for improving 1T-DRAM performance.” Next-Generation Electronics (ISNE), 2010 International Symposium on. IEEE, 2010, pp. 254-257. |
| Chun, et al. “A 1.1 V, 667MHz random cycle, asymmetric 2T gain cell embedded DRAM with a 99.9 percentile retention time of 110μsec.” VLSI Circuits (VLSIC), 2010 IEEE Symposium on. IEEE, 2010, pp. 191-192. |
| Chun, et al. “A 667 MHz Logic-Compatible Embedded DRAM Featuring an Asymmetric 2T Gain Cell for High Speed On-Die Caches.” Solid-State Circuits, IEEE Journal of, vol. 47, No. 2, 2012, pp. 547-559. |
| Cao, et al. “A Novel 1T-1D DRAM Cell for Embedded Application.” Electron Devices, IEEE Transactions on, vol. 59, No. 5, 2012, pp. 1304-1310. |
| Collaert, et al. “Substrate bias dependency of sense margin and retention in bulk FinFET 1T-DRAM cells.” Solid-State Electronics 65 (2011, pp. 205-210. |
| Collaert, et al. “A low-voltage biasing scheme for aggressively scaled bulk FinFET 1T-DRAM featuring 10s retention at 85 C.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 161-162. |
| Chatterjee, et al. “Taper isolated dynamic gain RAM cell.” Electron Devices Meeting, 1978 International. vol. 24. IEEE, 1978, pp. 698-699. |
| Chatterjee, et al. Circuit Optimization of the Paper Isolated Dynamic Gain RAM Cell for VLSI Memories, pp. 22-23, 1979. |
| Chatterjee, et al. “a survey of high-density dynamic RAM cell concepts.” Electron Devices, IEEE Transactions on 26.6 (1979): 827-839. |
| Erb, D. “Stratified charge memory.” Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International. vol. 21. IEEE, 1978, pp. 24-25. |
| Galeti, M., et al. “BJT effect analysis in p-and n-SOI MuGFETs with high-k gate dielectrics and TiN metal gate electrode for a 1T-DRAM application.” SOI Conference (SOI), 2011 IEEE International. IEEE, 2011, pp. 1-2. |
| Gamiz, et al. “3D Trigate 1T-DRAM Memory Cell for 2x nm Nodes.” Memory Workshop (IMW), 2012 4th IEEE International. IEEE, 2012, pp. 1-4. |
| Gamiz, et al. “A 20nm low-power triple-gate multibody 1T-DRAM cell.” VLSI Technology, Systems, and Applications (VLSI-TSA), 2012 International Symposium on. IEEE, 2012, pp. 1-2. |
| Giusi, et al. “Bipolar mode operation and scalability of double-gate capacitorless 1T-DRAM cells.” Electron Devices, IEEE Transactions on, vol. 57, No. 8 (2010), pp. 1743-1750. |
| Gupta, et al. “32nm high-density high-speed T-RAM embedded memory technology.” Electron Devices Meeting (IEDM), 2010 IEEE International. IEEE, 2010, pp. 12-1. |
| Han, et al. “Bistable resistor (biristor)-gateless silicon nanowire memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 171-172. |
| Han, et al. “Biristor—Bistable resistor based on a silicon nanowire.” Electron Device Letters, IEEE 31.8 (2010): 797-799. |
| Hubert, et al., “Experimental comparison of programming mechanisms in 1T-DRAM cells with variable channel length”, Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European, pp. 150-153, Sep. 14-16, 2010. |
| Hwang, et al. “Offset buried metal gate vertical floating body memory technology with excellent retention time for DRAM application.” VLSI Technology (VLSIT), 2011 Symposium on. IEEE, 2011, pp. 172-173. |
| Kim, et al. “Vertical double gate Z-RAM technology with remarkable low voltage operation for DRAM application.” VLSI Technology (VLSIT), 2010 Symposium on, 2010, pp. 163-164. |
| Kim, et al. “Silicon on replacement insulator (SRI) floating body cell (FBC) memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 165-166. |
| Kim, et al. “Optical charge-pumping: A universal trap characterization technique for nanoscale floating body devices.” VLSI Technology (VLSIT), 2011 Symposium on. IEEE, 2011, pp. 190-191. |
| Kim, et al. “Investigation of 1T DRAM cell with non-overlap structure and recessed channel.” Silicon Nanoelectronics Workshop (SNW), 2010. IEEE, 2010, pp. 1-2. |
| Kim, et al. Resistive-Memory Embedded Unified RAM (R-URAM, 2009, pp. 2670-2674. |
| Lu, et al., “A Floating-Body/Gate DRAM Cell Upgraded for Long Retention Time”, IEEE Elec. Dev. Letters, vol. 32, No. 6, pp. 731-733, Jun. 2011. |
| Lu, et al., “A Simplified Superior Floating-Body/Gate DRAM Cell”, IEEE Elec. Dev. Letters, vol. 30, No. 3, Mar. 2009, pp. 282-284. |
| Lee, et al. “A Novel Capacitorless 1T DRAM Cell for Data Retention Time Improvement.” Nanotechnology, IEEE Transactions on, vol. 10, No. 3, 2011, pp. 462-466. |
| Leiss, et al, “dRAM Design Using the Taper-Isolated Dynamic RAM Cell.” Solid-State Circuits, IEEE Journal of 17.2 (1982): 337-344. |
| Liu, Xuelian, et al. “A three-dimensional DRAM using floating body cell in FDSOI devices.” Design and Diagnostics of Electronic Circuits & Systems (DDECS), 2012 IEEE 15th International Symposium on. IEEE, 2012, pp. 159-162. |
| Mahatme, et al. “Total ionizing dose effects on ultra thin buried oxide floating body memories.” Reliability Physics Symposium (IRPS), 2012 IEEE International, 2012, pp. 1-5. |
| Moon, et al. “An optically assisted program method for capacitorless 1T-DRAM.” Electron Devices, IEEE Transactions on, vol. 57, No. 7, 2010, pp. 1714-1718. |
| Moon, et al. “Multi-functional universal device using a band-engineered vertical structure.” Electron Devices Meeting (IEDM), 2011 IEEE International. IEEE, 2011, pp. 24-26. |
| Moon, et al. “Fin-width dependence of BJT-based 1T-DRAM implemented on FinFET.” Electron Device Letters, vol. 31, No. 9 (2010): 909-911. |
| Moon, et al. “Ultimately scaled 20nm unified-RAM.” Electron Devices Meeting (IEDM), 2010 IEEE International. IEEE, 2010, pp. 12-2. |
| Nicoletti, et al. “The Dependence of Retention Time on Gate Length in UTBOX FBRAM With Different Source/Drain Junction Engineering.” Electron Device Letters, vol. 33, No. 7, 2012, pp. 940-942. |
| Pulicani, R., et al. “Simulation of intrinsic bipolar transistor mechanisms for future capacitor-less eDRAM on bulk substrate.” Electronics, Circuits, and Systems (ICECS), 2010 17th IEEE International Conference on. IEEE, 2010, pp. 966-969. |
| Pellizzer et al., A 90nm Phase Change Memory Technology for Stand-Alone Non-Volatile Memory Applications, pp. 1-1, 2006. |
| Ranica, et al. “A one transistor cell on bulk substrate (1T-Bulk) for low-cost and high density eDRAM.” VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on. IEEE, 2004, pp. 128-129. |
| Ranica et al. Scaled 1T-Bulk devices built with CMOS 90nm technology for low-cost eDRAM applications. Pascale. mazoyer@st.com, 2005, 38-39. |
| Reisch, “On bistable behavior and open-base breakdown of bipolar transistors in the avalanche regime-modeling and applications.” Electron Devices, IEEE Transactions on 39.6 (1992): 1398-1409. |
| Number | Date | Country | |
|---|---|---|---|
| 20230035384 A1 | Feb 2023 | US |
| Number | Date | Country | |
|---|---|---|---|
| 62552048 | Aug 2017 | US | |
| 62461160 | Feb 2017 | US | |
| 62451439 | Jan 2017 | US | |
| 62415511 | Nov 2016 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 17092659 | Nov 2020 | US |
| Child | 17963024 | US | |
| Parent | 16682259 | Nov 2019 | US |
| Child | 17092659 | US | |
| Parent | 16105579 | Aug 2018 | US |
| Child | 16682259 | US | |
| Parent | 15798342 | Oct 2017 | US |
| Child | 16105579 | US |
