Number | Name | Date | Kind |
---|---|---|---|
4076860 | Kuroda | Feb 1978 | |
4510016 | Chi et al. | Apr 1985 | |
4533431 | Dargent | Aug 1985 | |
4584761 | Wu | Apr 1986 | |
4586980 | Hirai et al. | Apr 1986 | |
4597826 | Majima et al. | Jul 1986 | |
4619037 | Taguchi et al. | Oct 1986 | |
4648939 | Maa et al. | Mar 1987 | |
4661204 | Mathur et al. | Apr 1987 | |
4662989 | Casey et al. | Apr 1987 |
Number | Date | Country |
---|---|---|
0090742 | May 1983 | JPX |
0116751 | Jul 1983 | JPX |
0145327 | Sep 1983 | JPX |
Entry |
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Sachdev et al., "Tungsten Interconnects in VLSI", Proceedings of the 1985 Workshop, Oct. 7-9, 1985, Albuquerque, NM, pp. 161 & 171. |