Number | Date | Country | Kind |
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54-92676 | Jul 1979 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3782834 | Fujimori et al. | Jan 1974 | |
3806252 | Harris et al. | Apr 1974 | |
4277175 | Karasaki et al. | Jul 1981 |
Entry |
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Habegger, M. A., "Optical Determination of Semiconductor Device Profiles", SPIE vol. 80, Developments in Semiconductor Microlithography, 1976, pp. 95-99. |
Habegger, M. A., "Optical Determination of Semiconductor Device Edge Profiles", IBM Tech. Disc. Bull. vol. 19, #2, 7/1976, pp. 474-477. |