“Real-Time Etch Plasma Monitor System,” IBM Technical Disclosure Bulletin, vol. 24, No. 11A, pp. 5721-5723, H.A. Khoury (Apr. 1983). |
“A Plasma process Monitor/Control system,” Surface and Interface Analysis, vol. 24, pp. 124-133, Joel O. Stevenson, Pamela P. Ward, Michael L. Smith, and Richard J. Markle (Feb. 1998). |
“Process Uniformity for Plasma Etchback and Desmear in Printed Wiring Board Manufacturing,” Sandia Report, SAND96-1954; UC-706, pp. 1-5, Pamela P. Ward, Michael L. Smith, Joel O. Stevenson, Rick Smedley (Aug. 1996). |
“Sandia Computer Program Saves Money for Microchip and Circuit Board Makers,” Handout at Ceremony at Sandia National Laboratories, pp. 1-3 (Oct. 1997). |
U.S. application No. 09/065,203, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,966, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,245, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,006, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,359, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,793, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,957, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,680, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,991, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,257, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,307, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,274, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,970, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,247, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,965, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,195, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,362, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,972, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,358, Smith, Jr. et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,245, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,991, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,307, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,274, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,970, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,965, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/064,972, Smith et al., filed Apr. 23, 1998. |
U.S. application No. 09/065,358, Smith et al., filed Apr. 23, 1998. |