Number | Name | Date | Kind |
---|---|---|---|
3373357 | Keenan et al. | Mar 1968 | |
4101411 | Suzuki et al. | Jul 1978 | |
4401054 | Matsuo et al. | Aug 1983 | |
4507588 | Asmussen et al. | Mar 1985 | |
4585668 | Asmussen et al. | Apr 1986 | |
4630566 | Asmussen et al. | Dec 1986 | |
4691662 | Roppel et al. | Sep 1987 | |
4727293 | Asmussen et al. | Feb 1988 | |
4745337 | Pichot et al. | May 1988 | |
4810935 | Boswell | Mar 1989 | |
4876983 | Fukuda et al. | Oct 1989 | |
4990229 | Campbell et al. | Feb 1991 | |
5003225 | Dandl | Mar 1991 | |
5081398 | Asmussen et al. | Jan 1992 |
Entry |
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Plasma Processing of Materials: Scientific Opportunities and Technological Challenges; National Academy Press, pp. 13-36, (Washington, D.C. 1991). |