Number | Name | Date | Kind |
---|---|---|---|
4401054 | Matsuo et al. | Apr 1981 | |
4615756 | Tsujii et al. | Oct 1986 | |
4664747 | Sekiguchi et al. | May 1987 | |
4689112 | Bersin | Aug 1987 | |
4898118 | Murakami et al. | Feb 1990 |
Entry |
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IBM Technical Disclosure; "Method of Preparing Hydrogenated Amorphous Silicon"; vol. 22 No. 8A-1/1/80. |