Number | Name | Date | Kind |
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4960613 | Cole et al. | Oct 1990 | |
4988423 | Yamamato et al. | Jan 1991 | |
5066612 | Ohba et al. | Nov 1991 |
Entry |
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Sauter et al., "Finite Element Calculations of Thermal Stresses Passivated and Unpassivated Lines Bonded to Substrates" Mat. Res. Soc. Symp. Proc., V.188, Material Research Society, 1990. |
Tanikawa, A., "A1 Diffusion into Glass Films Used for the Passivation of Fine A1 Metallization," Journal of the Electrochemical Society, V. 138, No. 10, 1991, pp. 3047-3049. |