Number | Name | Date | Kind |
---|---|---|---|
3430109 | Chou | Feb 1969 | A |
3585714 | Chou | Jun 1971 | A |
4256514 | Pogge | Mar 1981 | A |
4639288 | Price et al. | Jan 1987 | A |
4851361 | Schumann et al. | Jul 1989 | A |
4916513 | Li | Apr 1990 | A |
4946800 | Li | Aug 1990 | A |
4965221 | Dennison et al. | Oct 1990 | A |
4992390 | Chang | Feb 1991 | A |
5151381 | Liu et al. | Sep 1992 | A |
5296094 | Shan et al. | Mar 1994 | A |
5334861 | Pfiester et al. | Aug 1994 | A |
5393679 | Yang | Feb 1995 | A |
5431778 | Dahm et al. | Jul 1995 | A |
5443998 | Meyer | Aug 1995 | A |
5447884 | Fahey et al. | Sep 1995 | A |
5498577 | Fulford, Jr. et al. | Mar 1996 | A |
5672521 | Barsan et al. | Sep 1997 | A |
5679483 | Maurer | Oct 1997 | A |
5688701 | Kobayashi et al. | Nov 1997 | A |
5702988 | Liang | Dec 1997 | A |
5739056 | Dennison et al. | Apr 1998 | A |
5750428 | Chang | May 1998 | A |
5792680 | Sung et al. | Aug 1998 | A |
5795803 | Takamura et al. | Aug 1998 | A |
5869385 | Tang et al. | Feb 1999 | A |
5900658 | Lee et al. | May 1999 | A |
Number | Date | Country |
---|---|---|
53-65086 | Oct 1978 | JP |
54124986 | Sep 1979 | JP |
60-116146 | Jun 1985 | JP |
61-135136 | Jun 1986 | JP |
Entry |
---|
US 5,679,486, 10/1997, Maurer (withdrawn)* |
Silicon Processing for the VLSI Era, Wolf Stanley, vol. 1, pp. 280-282, 1986.* |
Silicon Processing for the VLSI Era, Wolf Stanley, vol. 2, pp. 331-332, 1990.* |
Silico Processing for the VLSI Era, Wolf Stanley, vol. 1, pp. 280-282, 1986.* |
Silicon Processing for the VLSI Era, Wolf Stanley, vol. 1, pp. 219-220, 1986.* |
Wolf “Silicon Processing for the VLSI Era” pp. 331-332, vol. 2, 1990.* |
Wolf“silicon processing for the VLSI Era” pp. 280-282, vol. 1, 1986.* |
Stanley Wolf Ph.D, “Silicon Processing For the VLSI ERA”, Process Technology, vol. 1, pp. 528-534, (1986). |