Claims
- 1. A method of fabricating a tip portion of a high-frequency probe formed of a coaxial cable comprising a coaxial inner conductor, a coaxial outer conductor, and a dielectric interposed between said coaxial inner conductor and said coaxial outer conductor in a concentric relation, said method comprising:forming a cross section surface by cutting said coaxial cable at a plane perpendicular to the axial direction of said coaxial cable; forming a oblique cut surface by cutting said cross section surface from substantially the center thereof along at least one oblique plane with respect to the axial direction of said coaxial cable; fixing a ring made of a conductive material over a periphery of said coaxial outer conductor to establish electrical connection with said coaxial outer conductor; and bonding a contact bump to said coaxial inner conductor exposed in said cross section surface; said fixing of ring and said bonding contact bump being executed one after the other in this order or in the reversed order.
- 2. A method of fabricating a tip portion of a high-frequency probe according to claim 1, wherein said forming of the oblique cut surface further cuts said cross section surface to form oblique cut surfaces in the form of a pyramid while said coaxial inner conductor is left as a fore end.
- 3. A method of fabricating a tip portion of a high-frequency probe according to claim 1, wherein said forming the oblique cut surface is performed by cutting said cross section surface from substantially the center thereof along one oblique plane with respect to the axial direction of said coaxial cable, thereby forming a first oblique cut surface facing in the direction in which the tip portion of said high-frequency probe is pressed against a DUT.
- 4. A method of fabricating a tip portion of a high-frequency probe according to claim 3, wherein said forming the oblique cut surface further includes, subsequent to said forming the first oblique cut surface, cutting said cross section surface from substantially the center thereof along one oblique cut surface with respect to the axial direction of said coaxial cable, thereby forming a second oblique cut surface facing in the direction opposed to said first oblique cut surface.
- 5. A method of fabricating a tip portion of a high frequency probe according to claim 4, wherein said forming the oblique end surface further includes, subsequent to said forming the second oblique cut surface, cutting said cross section surface from substantially the center thereof along two oblique cut surface with respect to the axial direction of said coaxial cable, thereby forming third oblique cut surfaces to form a rectangular pyramid with said coaxial inner conductor exposed in said oblique cut surface being an apex of said rectangular pyramid.
- 6. A method of fabricating a tip portion of a high-frequency probe according to claim 1, wherein the step of forming said oblique cut includes cutting a portion of said coaxial inner conductor to expose an angled surface thereof and wherein said bonding step includes bonding said contact bump to said angled surface.
Priority Claims (4)
Number |
Date |
Country |
Kind |
10-161021 |
Jun 1998 |
JP |
|
10-167991 |
Jun 1998 |
JP |
|
10-168248 |
Jun 1998 |
JP |
|
11-048325 |
Feb 1999 |
JP |
|
Parent Case Info
This is a Divisional Application of Application No. 09/328,362, filed Jun. 9, 1999.
US Referenced Citations (2)
Number |
Name |
Date |
Kind |
5506515 |
Godshalk et al. |
Apr 1996 |
A |
5565788 |
Burr et al. |
Oct 1996 |
A |
Foreign Referenced Citations (15)
Number |
Date |
Country |
62-141741 |
Jun 1987 |
JP |
62-279650 |
Dec 1987 |
JP |
63-152141 |
Jun 1988 |
JP |
63-124668 |
Aug 1988 |
JP |
64-21309 |
Feb 1989 |
JP |
64-46755 |
Mar 1989 |
JP |
3-158764 |
Jul 1991 |
JP |
4-206845 |
Jul 1992 |
JP |
7-191058 |
Jul 1995 |
JP |
7-311220 |
Nov 1995 |
JP |
7-318585 |
Dec 1995 |
JP |
8-233860 |
Sep 1996 |
JP |
8-233861 |
Sep 1996 |
JP |
8-248063 |
Sep 1996 |
JP |
10-104275 |
Apr 1998 |
JP |