Number | Date | Country | Kind |
---|---|---|---|
7-081776 | Mar 1995 | JPX | |
7-212932 | Jul 1995 | JPX |
Number | Date | Country |
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A-2-16866 | Jun 1989 | JPX |
A-2-151031 | Jun 1990 | JPX |
A-6-291276 | Oct 1994 | JPX |
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Ikeda et al., Silicon Surface Damage Caused by Fluorocarbon Gas Plasma, Record of 45th Symposium of Semiconductor and Integrated Circuit Technique, pp. 76-81, Dec. 1993 (Abstract Considered Only). |
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