This relates generally to the fabrication of touch sensor panels, and more particularly, to a system and method for improving the touch sensor panel fabrication process using a resist which serves as both a mask during a lithography/etch (litho/etch) patterning process and a passivation layer during the subsequent passivation process.
In recent years, touch sensor panels, touch screens, and the like have become available as input devices. Touch screens, in particular, are becoming increasingly popular because of their ease and versatility of operation as well as their declining price. Touch screens can include a touch sensor panel, which can be a clear panel with a touch-sensitive surface, and a display device, such as an LCD panel, that can be positioned partially or fully behind the touch sensor panel so that the touch-sensitive surface can cover at least a portion of the viewable area of the display device. In some devices, the touch screen is protected by a cover glass. Touch screens can allow a user to perform various functions by touching the touch sensor panel using a finger, stylus or other object at a location often dictated by a user interface (UI) being displayed by the display device. In general, touch screens can recognize a touch event and the position of the touch event on the touch sensor panel, and a computing system can then interpret the touch event in accordance with the display appearing at the time of the touch event, and thereafter can perform one or more actions based on the touch event.
Like LCD panels, touch sensor panels in touch screens may be made of glass or other suitable transparent substrate. In some configurations, touch sensor panels can be implemented as an array of pixels formed by multiple drive lines (e.g. rows) crossing over multiple sense lines (e.g. columns), where the drive and sense lines are separated by a dielectric material. In some touch sensor panels, the drive and sense lines can be formed on the top and bottom sides of the same transparent substrate. In other touch sensor panels, the drive and sense lines may be formed on one side of the transparent substrate. The sense lines and drive lines can be formed from a substantially transparent material such as Indium Tin Oxide (ITO), although other materials can also be used. The ITO layer(s) can be deposited on one or both sides of the transparent substrate. Touch sensor panels with double or single sided ITO layers are referred to as double-sided ITO (DITO) touch sensor panels and single-sided ITO (SITO) touch sensor panels, respectively, in this document. DITO and SITO touch sensor panels are widely used in a wide-range of electronic devices, such as tablet PCs, digital music players, cellular telephones, and other wireless handheld devices.
The existing methods of fabricating touch sensor panels require multiple printing steps during the litho/etch patterning process and the subsequent passivation process. The traditional litho/etch process can be expensive because of high equipment and material cost. Thus, it is desirable to reduce the number of printing steps in the fabrication process to reduce the overall manufacturing cost of a touch sensor panel.
This relates to methods for fabricating touch sensor panels. In some touch sensor panel fabrication processes, a photoresist is applied to the panel during a litho/etch patterning process. The photoresist is stripped after the completion of the litho/etching patterning process. A separate passivation layer is then applied for the subsequent passivation process. Thus, the overall fabrication process is lengthy and inefficient. The equipment and material cost is also relatively high due to the multiple printing and etching steps. Embodiments of the present disclosure seek to eliminate some of those steps by applying a resist that can serve as a mask during etching process and remain permanently as a passivation layer after the etching process. This improved process can eliminate a number of steps of the existing fabrication process and reduce equipment and material cost.
In one embodiment of the disclosure, first, an ITO (or other conductive material) layer and a metal layer can be deposited on one or both surfaces of a base substrate. Next, a litho/etch process can be performed to pattern both the ITO and metal layers to form drive and sense elements of the touch sensor panel, although in other embodiments processes other than litho/etch may also be used to remove the patterns. These first two steps can be the same as those in the existing fabrication process. Then, a resist/passivation material can be placed over the edge area of the touch sensor panel to protect metal patterns in that area during the subsequent litho/etch process. This resist/passivation material can be different from the photoresist typically used in that this particular material may act not only as a mask during litho/etching but also as a passivation layer during passivation. After this dual-purpose material is put in place, a second litho/etch process can be performed to remove metal from the viewing area of the panel, although in other embodiments processes other than litho/etch may also be used to remove the metal. Because the same material can also serve as the passivation layer, passivation can be carried out without requiring additional steps of removing the photoresist and placing a passivation layer over the edge area or the entire surface first.
In general, embodiments of the disclosure can reduce the number of steps required in the fabrication process of a touch sensor panel. More importantly, by using a single material as both the photoresist mask during the litho/etch process and the passivation layer during passivation, it can reduce material cost and operation cost associated with the printing and removing of extra material in the fabrication process. As a result, the overall fabrication process can be more efficient and the overall cost of the finished device including the touch sensor panel can be reduced.
a illustrates an exemplary digital media player having a SITO or DITO touch sensor panel fabricated according to embodiments of the disclosure.
b illustrates an exemplary mobile telephone having a SITO or DITO touch sensor panel fabricated according to embodiments of the disclosure.
c illustrates an exemplary mobile computer having a SITO or DITO touch sensor panel fabricated according to embodiments of the disclosure.
d illustrates an exemplary desktop computer having a SITO or DITO touch sensor panel fabricated according to embodiments of the disclosure.
In the following description of preferred embodiments, reference is made to the accompanying drawings which form a part hereof, and in which it is shown by way of illustration specific embodiments which can be practiced. It is to be understood that other embodiments can be used and structural changes can be made without departing from the scope of the embodiments of this disclosure.
This relates to methods for fabricating touch sensor panels. In some touch sensor panel fabrication processes, a photoresist is applied to the panel during a litho/etch patterning process. The photoresist is stripped after the completion of the litho/etching patterning process. A separate passivation layer is then applied for the subsequent passivation process. Thus, the overall fabrication process is lengthy and inefficient. The equipment and material cost is also relatively high due to the multiple printing and etching steps. Embodiments of the present disclosure seek to eliminate some of those steps by applying a resist that can serve as a mask during etching process and remain permanently as a passivation layer after the etching process. This improved process can eliminate a number of steps of the existing fabrication process and reduce equipment and material cost.
The structure of a capacitive touch sensor panel is illustrated in
A SITO touch sensor panel can be fabricated using the above-described stacked structure including a metal layer 106 and an ITO (or other conductive material) layer 104 deposited on top of the base substrate 102. Optionally, additional layers (shown in dotted lines in
In the some touch sensor panel fabrication processes, a number of additional patterning and passivation steps must be carried out to further process the laminate of
In the next step illustrated in
In the next step, as illustrated in
Then, the touch sensor panel undergoes a passivation step. Before passivation can be performed, a passivation layer 122 can be laid either over the edge area 118 on top of the metal traces 106 (as shown in
As detailed above, the above-described touch sensor panel fabrication process requires a number of steps which could make the process lengthy and inefficient. Another drawback of the above-described method is that the equipment and material cost may be high at least due to the fact that the photoresist has to be applied and removed and the passivation layer is then separately applied. Embodiments of the present disclosure simplify the above-described process by reducing the number of steps and the associated material cost by using a single material to serve as both the resist in the litho/etch process and as the passivation layer during passivation.
In one embodiment, the fabrication process starts with the same litho/etch patterning step of the metal layer and ITO (or other conductive material) layer on one or both surfaces of the layer structure as shown in
In the next step, as shown in
With the method described above, the next two steps as shown in
In general, embodiments of the disclosure can reduce the number of steps required in the fabrication process of a touch sensor panel. More importantly, by using a single material as both the photoresist mask during the litho/etch process and the passivation layer during passivation, it can reduce material cost and operation cost associated with the printing and removing of extra material in the fabrication process. As a result, the overall fabrication process can be more efficient and the overall cost of the finished device including the touch sensor panel can be reduced.
As previously mentioned, the signals detected by touch sensor panel can be routed to a flex circuit for further processing to determine, for example, the properties and locations of the one or more touches detected on the touch sensor panel. In one embodiment, the signals can be routed to a flex circuit bonded to a region near or within the edge area of the panel. The flex circuit can typically be bonded to either the metal layer or the ITO (or other conductive material) layer of the panel. However, it may be difficult or impossible to bond the flex circuit to the panel once the surface of the touch sensor panel is subject to passivation and a passivation layer has been deposited on top of the metal layer and the ITO layer. In the embodiment described above, the material being used as both the resist and the passivation layer can remain permanently over the edge area once it is deposited. That is, the material may not be removed or replaced prior to passivation to allow the potential bonding areas to be preserved. Consequently, there may be an issue with bonding the flex circuit with the metal/ITO layers underneath the resist. Three different solutions are provided below to resolve this issue by ensuring that the bonding area is preserved in the process even though the resist/passivation layer is permanently placed over the edge area of the panel.
The first embodiment involves printing a temporary bond mask over the bonding area prior to printing the resist/passivation material over the same area.
The second method to ensure that the bonding area is preserved during and after passivation is to avoid printing the resist/passivation material over the bonding area altogether. As illustrated in
In the third embodiment, the flex bonding area can be preserved in an extended area 1050 of the touch sensor panel 1000″ instead of within the edge area 1040 as in the previous embodiments. As shown in
The three embodiments discussed above can allow the resist/passivation material to be permanently placed over the touch sensor panel while still preserving at least an area on the surface of the panel (or an extended area of the panel) for flex bonding.
a illustrates exemplary digital media player 2010 that can include a touch sensor panel 2015 fabricated according to embodiments of the disclosure.
b illustrates exemplary mobile telephone 2020 that can include a touch sensor panel 2025 fabricated according to embodiments of the disclosure.
c illustrates an exemplary personal computer 2044 that can include touch sensor panel 524 and display device 2030. The touch sensor panel 2024 can be a SITO/DITO or other panel fabricated according to embodiments of the disclosure. The display device 2030 can also include a SITO/DITO or other panel fabricated according to embodiments of the disclosure.
d illustrates a desktop computer 2090 including a display device 2092. The display device 2092 may include a SITO/DITO or other panel fabricated according to embodiments of the disclosure. The desktop computer 2090 may also include a virtual keyboard 2094 which incorporates a SITO/DITO or other panel fabricated according to embodiments of the disclosure.
Touch sensor panel 2124 can include a capacitive sensing medium having a plurality of drive lines and a plurality of sense lines, although other sensing media can also be used. Either or both of the drive and sense lines can be coupled to a thin glass sheet according to embodiments of the disclosure. Each intersection of drive and sense lines can represent a capacitive sensing node and can be viewed as picture element (pixel) 2126, which can be particularly useful when touch sensor panel 2124 is viewed as capturing an “image” of touch. (In other words, after panel subsystem 2106 has determined whether a touch event has been detected at each touch sensor in the touch sensor panel, the pattern of touch sensors in the multi-touch panel at which a touch event occurred can be viewed as an “image” of touch (e.g. a pattern of fingers touching the panel).) Each sense line of touch sensor panel 2124 can drive sense channel 2108 (also referred to herein as an event detection and demodulation circuit) in panel subsystem 2106.
Computing system 2100 can also include host processor 2128 for receiving outputs from panel processor 2102 and performing actions based on the outputs that can include, but are not limited to, moving an object such as a cursor or pointer, scrolling or panning, adjusting control settings, opening a file or document, viewing a menu, making a selection, executing instructions, operating a peripheral device coupled to the host device, answering a telephone call, placing a telephone call, terminating a telephone call, changing the volume or audio settings, storing information related to telephone communications such as addresses, frequently dialed numbers, received calls, missed calls, logging onto a computer or a computer network, permitting authorized individuals access to restricted areas of the computer or computer network, loading a user profile associated with a user's preferred arrangement of the computer desktop, permitting access to web content, launching a particular program, encrypting or decoding a message, and/or the like. Host processor 2128 can also perform additional functions that may not be related to panel processing, and can be coupled to program storage 2132 and display device 2130 such as an LCD panel for providing a UI to a user of the device. Display device 2130 together with touch sensor panel 2124, when located partially or entirely under the touch sensor panel, can form touch screen 2118.
Note that one or more of the functions described above can be performed by firmware stored in memory (e.g. one of the peripherals 2104 in
The firmware can also be propagated within any transport medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. In the context of this document, a “transport medium” can be any medium that can communicate, propagate or transport the program for use by or in connection with the instruction execution system, apparatus, or device. The transport readable medium can include, but is not limited to, an electronic, magnetic, optical, electromagnetic or infrared wired or wireless propagation medium.
Although embodiments of this disclosure have been fully described with reference to the accompanying drawings, it is to be noted that various changes and modifications will become apparent to those skilled in the art. Such changes and modifications are to be understood as being included within the scope of embodiments of this disclosure as defined by the appended claims.
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