Number | Name | Date | Kind |
---|---|---|---|
4619839 | Lehrer | Oct 1986 | |
4721548 | Morimoto | Jan 1988 | |
4775550 | Chu et al. | Oct 1988 | |
4826709 | Ryan et al. | May 1989 | |
4885262 | Ting et al. | Dec 1989 | |
5003062 | Yen | Mar 1991 |
Entry |
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Grupta et al., "Interlevel Dielectric Planarization with Spin-On-Glass Films", V-MIC Conference; Jun. 1986, pp. 506-515. |
Yen et al., "Defect Integration with Spin-On-Glass Sandwich as an Intermetal Dielectric Layer for 1.2 Micrometer CMOS DLM Process", V-MIC Conference, Jun. 13-14, 1988, pp. 85-94. |
Forester et al., "SOG Planarization for Polysilicon and First Metal Interconnect in a One Micron CMOS Process", V-MIC Confer., Jun./88, pp. 72-79. |