Number | Date | Country | Kind |
---|---|---|---|
53-122626 | Oct 1978 | JPX | |
53-122627 | Oct 1978 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3950187 | Kirkpatrick | Apr 1976 | |
4204894 | Komeda et al. | May 1980 | |
4214918 | Gat et al. | Jul 1980 |
Entry |
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A. L. Robinson, "Laser Annealing Processing Semiconductors Without a Furnace", Science, vol. 201, pp. 333-335 (1978). |