Number | Date | Country | Kind |
---|---|---|---|
59-239560 | Nov 1984 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4478679 | Chang et al. | Oct 1984 | |
4511430 | Chen et al. | Apr 1985 | |
4523975 | Groves et al. | Jun 1985 | |
4545852 | Barton | Oct 1985 |
Entry |
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Adams et al., "Planarization of Phosphorus-Doped Silicon Dioxide", J. Electrochem. Soc.: Solid-State Science and Technology, vol. 128, No. 2. |
M. Inoue et al., "Smooting Technique by Etching Back," Semiconductor World, Oct. 1984. |