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5395782 | Ohkoda et al. | Mar 1995 | |
5397729 | Kayanuma et al. | Mar 1995 | |
5399890 | Okada et al. | Mar 1995 | |
5406512 | Kagenishi | Apr 1995 | |
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5420816 | Ogihara et al. | May 1995 | |
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5550769 | Hidaka et al. | Aug 1996 | |
5563762 | Leung et al. | Oct 1996 | |
5583068 | Jones, Jr. et al. | Dec 1996 | |
5586072 | Longway et al. | Dec 1996 | |
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5615156 | Yoshida et al. | Mar 1997 | |
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Entry |
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Lee et al, "A Process Technology for 1 Giga-Bit DRAM", IEDM, IEEE 1995, pp. 907-910, Jan. 1995. |