Number | Date | Country | Kind |
---|---|---|---|
8101200 | Mar 1981 | NLX |
Number | Name | Date | Kind |
---|---|---|---|
3402044 | Steinhoff et al. | Sep 1968 | |
3900325 | Christensen et al. | Aug 1975 | |
3996393 | Cortellino et al. | Dec 1976 | |
4141733 | Guild | Feb 1979 | |
4272603 | Chenevert et al. | Jun 1981 |
Entry |
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Brault et al., "A Method for Rapidly Screening Polymers as Electron Beam Resists" J. Electrochem. Soc. May 1981, pp. 1158-1161. |