Number | Date | Country | Kind |
---|---|---|---|
99-23949 | Jun 1999 | KR |
Number | Name | Date | Kind |
---|---|---|---|
5563104 | Jang et al. | Oct 1996 | A |
Number | Date | Country |
---|---|---|
893824 | Jan 1999 | EP |
Entry |
---|
K. Fujino et al., “Surface Modification of Base Materials for TEOS/03 Atmospheric Pressure Chemical Vapor Deposition,” J. Electrochem. Soc. vol. 139, No. 6, Jun. 1992. |