Wolf, Silicon Processing for the VLSI Era, vol. 2, Lattic Press, Sunset Beach, Calif., 1990, pp. 229-236, 280-281. |
Tompkins et al., "Desorption from Spin-On Glass," J. Electrochem. Soc., vol. 136, No. 8, Aug. 1989, pp. 2331-2335. |
Nishida et al., "Multilevel Interconnection for Half-Micron ULSI's," VMIC Conference, 1989 IEEE, Jun. 12-13, 1989, pp. 19-25. |
J. L. Vossen, "A Sputtering Technique for Coating the Inside Walls of Through-Holes in Substrates", J. Vac. Sci. Technol., vol. 11, No. 5, Sep./Oct. 1974, pp. 875-877 |