Number | Name | Date | Kind |
---|---|---|---|
3976524 | Feng | Aug 1976 | |
4073054 | Kaji et al. | Feb 1978 | |
4092210 | Hoepfner | May 1978 | |
4139442 | Bondur et al. | Feb 1979 | |
4211582 | Horng et al. | Jul 1980 | |
4222792 | Lever et al. | Sep 1980 | |
4234362 | Riseman | Nov 1980 | |
4307179 | Chang et al. | Dec 1981 | |
4309812 | Horng et al. | Jan 1982 | |
4318751 | Horng | Mar 1982 | |
4338138 | Caualiere | Jun 1982 |
Entry |
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T. A. Bartush et al., "Dielectric Isolation Planarization", IBM Technical Disclosure Bulletin, vol. 21, No. 5, Oct. 1978, pp. 1868-1869. |