Claims
- 77. (New) A method of manufacturing a vacuum chuck, said method comprising:
forming a plurality of through holes extending between a first surface and a second surface positioned opposite to each other, wherein said first surface and said second surface are disposed on a chuck body; patterning said first surface to produce a plurality of recesses, wherein a through hole of said plurality of through holes lies within said recess; and etching said first surface to produce a desired formation upon said chuck body.
- 78. (New) The method as recited in claim 77 wherein said chuck body comprises an optical flat glass, wherein said second surface of said optical flat glass is substantially flat.
- 79. (New) The method as recited in claim 77 wherein said desired formation comprises. a plurality of pins disposed on said first surface.
- 80. (New) The method as recited in claim 77 wherein said desired formation comprises an annular recess disposed on said first surface.
- 81. (New) The method as recited in claim 77 wherein said desired formation comprises a plurality of concentric annular recesses disposed on said first surface.
- 82. (New) A method of manufacturing a vacuum chuck, said method comprising:
forming a plurality of through holes extending between a first surface and a second surface positioned opposite to each other, wherein said first surface and said second surface are disposed on a chuck body; patterning said first surface to produce a plurality of recesses, wherein a through hole of said plurality of through holes lies within said recess; etching said first surface to produce a desired formation upon said chuck body; and wherein said second surface is substantially flat.
- 83. (New) The method as recited in claim 82 wherein said chuck body comprises an optical flat glass..
- 83. (New) The method as recited in claim 82 wherein said desired formation comprises a plurality of pins disposed on said first surface.
- 84. (New) The method as recited in claim 82 wherein said desired formation comprises an annular recess disposed on said first surface.
- 86. (New) The method as recited in claim 82 wherein said desired formation comprises a plurality of concentric annular recesses disposed on said first surface.
- 87. (New) A method of manufacturing a vacuum chuck, said method comprising:
forming a plurality of through holes extending between a first surface and a second surface positioned opposite to each other, wherein said first surface and said second surface are disposed on a chuck body; patterning said first surface to produce a plurality of recesses, wherein a through hole of said plurality of through holes lies within said recess; and etching said first surface to produce a desired formation upon said chuck body; and wherein said chuck body comprises an optical flat glass, wherein said second surface of said optical flat glass is substantially flat.
- 89. (New) The method as recited in claim 87 wherein said desired formation comprises a plurality of pins disposed on said first surface.
- 90. (New) The method as recited in claim 87 wherein said desired formation comprises an annular recess disposed on said first surface.
- 91. (New) The method as recited in claim 87 wherein said desired formation comprises a plurality of concentric annular recesses disposed on said first surface.
CLAIM OF PRIORITY
[0001] This application claims the benefit of provisional application serial No. 60/162,392 entitled “Method and Device for Precise Gap Control and Overlay Alignment During Semiconductor Manufacturing” filed Oct. 29, 1999, by Byung J. Choi, Sidlgata V. Sreenivasan, and Steven C. Johnson, and U.S. patent application Ser. No. 09/698,317 entitled “High Precision Orientation Alignment and Gap Control Stages for Imprint Lithography Process” field Oct. 27, 2000, by Byung J. Choi, Sidlgata V. Sreenivasan, and Steven C. Johnson, which is incorporated by reference herein.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60162392 |
Oct 1999 |
US |
Divisions (1)
|
Number |
Date |
Country |
Parent |
09698317 |
Oct 2000 |
US |
Child |
10616799 |
Jul 2003 |
US |