Claims
- 1. A method for manufacturing a via interconnection of a glass-ceramic wiring board, comprising the steps of:
blending copper powder with a vehicle comprising a high-polymer organic substance; adding a metal oxide powder to said vehicle and blending them; adjusting the viscosity of said vehicle by adding said high-polymer organic substance and filling them to a via; and sintering said via and forming said via interconnection.
- 2. A method for manufacturing a via interconnection of a glass-ceramic wiring board, comprising the steps of:
blending a copper powder with a vehicle comprising a cellulose derivative, adding a high-polymer organic substance to said vehicle and blending them; adjusting the viscosity of said vehicle by adding said cellulose derivative and filling them to a via; and sintering said via and forming said via interconnection.
- 3. A method for manufacturing a via interconnection of a glass-ceramic wiring board, comprising the steps of:
blending a copper powder to a vehicle comprising a cellulose derivative; adding a metal oxide powder having a mean particle diameter of from at least 1 μm to at most 4 μm to said vehicle and blending them; adjusting the viscosity of said vehicle by adding said cellulose derivative and filling them to a via; and sintering said via at a temperature of at least 900° C. to at most 1060° C., and forming said via interconnection.
- 4. A method for manufacturing a via interconnection of a glass-ceramic wiring board according to claim 3, wherein, in the step of adding said metal oxide powder and blending them, said metal oxide existing in said via after sintering is added to said vehicle such that the number of said metal oxide powders existing in said via is more than 4.2×10−4/μm3.
- 5. A method for manufacturing a via interconnection of a glass-ceramic wiring board, comprising the steps of:
blending a copper powder to a vehicle comprising a cellulose derivative; adding a metal oxide powder having a mean particle diameter of from at least 1 μm to at most 4 μm to said vehicle and blending them; adjusting the viscosity of said vehicle by adding said cellulose derivative and filling them to a via; and sintering said via at a temperature of from at least 900° C. to at most 1060° C. and forming said via interconnection, wherein said metal oxide is dispersed in said via such that the mean interval of said metal oxide is at most 7.4 μm.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-041042 |
Feb 1999 |
JP |
|
Parent Case Info
[0001] This application is a Divisional application of application Ser. No. 09/501,683, filed Feb. 10, 2000.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09501683 |
Feb 2000 |
US |
Child |
09835407 |
Apr 2001 |
US |