Number | Date | Country | Kind |
---|---|---|---|
56-16613 | Feb 1981 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3412456 | Ebisawa | Nov 1968 | |
4276368 | Heller et al. | Jun 1981 | |
4320191 | Yoshikawa et al. | Mar 1982 | |
4339526 | Baise et al. | Jul 1982 |
Entry |
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"Bilevel High Resolution Photolithographic Technique . . . " by Tai et al., J. Vac. Sci. Technol., 16(6), Nov./Dec. 1979. |
"Submicron Optical Lithography Using an Inorganic Resist/Polymer Bilevel Scheme" by Tai et al., J. Vac. Sci. Technol., 17(5), Sep./Oct. 1980. |