Inorganic layers

Industry

CPC
H01L21/314

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/314Inorganic layers

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 11,935,842
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 11,094,646
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,964,534
- Issue date Mar 30, 2021
- ASM International
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulator, capacitor with the same and fabrication method thereof,...
- Patent number 10,916,419
- Issue date Feb 9, 2021
- KEY FOUNDRY CO., LTD.
- Kwan-Soo Kim
- B32 - LAYERED PRODUCTS
Information Patent Grant
Atomic layer deposition method
- Patent number 10,858,736
- Issue date Dec 8, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Yi Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SONOS ONO stack scaling
- Patent number 10,699,901
- Issue date Jun 30, 2020
- LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Frederick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,297,444
- Issue date May 21, 2019
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 10,269,730
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming dielectric films, new precursors and their use in...
- Patent number 10,217,629
- Issue date Feb 26, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulator, capacitor with the same and fabrication method thereof,...
- Patent number 10,199,214
- Issue date Feb 5, 2019
- MagnaChip Semiconductor, Ltd.
- Kwan-Soo Kim
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma assisted atomic layer deposition metal oxide for patterning...
- Patent number 10,043,657
- Issue date Aug 7, 2018
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for forming film including at least...
- Patent number 10,026,607
- Issue date Jul 17, 2018
- Hitachi Kokusai Electric, Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SONOS ONO stack scaling
- Patent number 9,997,641
- Issue date Jun 12, 2018
- Cypress Semiconductor Corporation
- Fredrick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,251
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,252
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
- Patent number 9,905,414
- Issue date Feb 27, 2018
- President and Fellows of Harvard College
- Roy Gerald Gordon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma assisted atomic layer deposition of multi-layer films for pa...
- Patent number 9,892,917
- Issue date Feb 13, 2018
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication technique for high frequency, high power group III nitr...
- Patent number 9,882,039
- Issue date Jan 30, 2018
- University of South Carolina
- M. Asif Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of vapor deposition with multiple vapor sources
- Patent number 9,873,942
- Issue date Jan 23, 2018
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,831,094
- Issue date Nov 28, 2017
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 9,806,096
- Issue date Oct 31, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiko Hayakawa
- G02 - OPTICS
Information Patent Grant
High κ gate stack on III-V compound semiconductors
- Patent number 9,805,949
- Issue date Oct 31, 2017
- GLOBALFOUNDRIES Inc.
- Jean Fompeyrine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming a semiconductor device by thermally treating a c...
- Patent number 9,799,523
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui OuYang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a gate dielectric for high-k metal gate devices
- Patent number 9,711,373
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Hao Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 9,698,236
- Issue date Jul 4, 2017
- Kabushiki Kaisha Toshiba
- Daisuke Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon nitride film, and semiconductor device
- Patent number 9,679,918
- Issue date Jun 13, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Toru Takayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma assisted atomic layer deposition titanium oxide for patterni...
- Patent number 9,673,041
- Issue date Jun 6, 2017
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 9,633,954
- Issue date Apr 25, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graded dielectric structures
- Patent number 9,627,501
- Issue date Apr 18, 2017
- Micron Technology, Inc.
- F. Daniel Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20190035678
- Publication date Jan 31, 2019
- Renesas Electronics Corporation
- Junji NOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SONOS ONO STACK SCALING
- Publication number 20180351003
- Publication date Dec 6, 2018
- CYPRESS SEMICONDUCTOR CORPORATION
- Fredrick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20180130666
- Publication date May 10, 2018
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR INTEGRATION OF PORE STUFFING MATERIAL
- Publication number 20140353802
- Publication date Dec 4, 2014
- GLOBALFOUNDRIES INC.
- Nicholas Vincent LICAUSI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY WITH CARBON-CONTAINING SILICON CHANNEL
- Publication number 20140339572
- Publication date Nov 20, 2014
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DIFFERENT FINS OF FINFETS
- Publication number 20140332824
- Publication date Nov 13, 2014
- Chin-Fu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...
- Publication number 20140327064
- Publication date Nov 6, 2014
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS
- Publication number 20140327065
- Publication date Nov 6, 2014
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- Publication number 20140322920
- Publication date Oct 30, 2014
- Young Soo KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140322923
- Publication date Oct 30, 2014
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20140312499
- Publication date Oct 23, 2014
- RENESAS ELECTRONICS CORPORATION
- Junji NOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE-NITRIDE-OXIDE STACK HAVING MULTIPLE OXYNITRIDE LAYERS
- Publication number 20140284696
- Publication date Sep 25, 2014
- CYPRESS SEMICONDUCTOR CORPORATION
- Sagy Charel Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM FILM FORMATION METHOD AND STORAGE MEDIUM
- Publication number 20140287585
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Hiroaki ASHIZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANISOTROPIC CONDUCTOR AND METHOD OF FABRICATION THEREOF
- Publication number 20140264900
- Publication date Sep 18, 2014
- ROBERT BOSCH GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PASSIVATION LAYER FOR HARSH ENVIRONMENTS AND METHODS OF FABRICATION...
- Publication number 20140264781
- Publication date Sep 18, 2014
- ROBERT BOSCH GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CVD PRECURSORS
- Publication number 20140256159
- Publication date Sep 11, 2014
- Dow Corning Corporation
- XIAOBING ZHOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS
- Publication number 20140246784
- Publication date Sep 4, 2014
- Micron Technology, Inc.
- Luan C. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD FILMS FOR EUV LITHOGRAPHY
- Publication number 20140239462
- Publication date Aug 28, 2014
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON-DOPED CARBON-BASED HARDMASK ETCH PROCESSING
- Publication number 20140213059
- Publication date Jul 31, 2014
- Kenny Linh Doan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING A SIDEWALL SPACER HAVING A GENERALLY TRIANGULAR...
- Publication number 20140167119
- Publication date Jun 19, 2014
- GLOBALFOUNDRIES INC.
- Peter Javorka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
- Publication number 20140154414
- Publication date Jun 5, 2014
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Chia-Yi CHUANG
- C30 - CRYSTAL GROWTH
Information Patent Application
NANOCRYSTAL FORMATION USING ATOMIC LAYER DEPOSITION
- Publication number 20140148002
- Publication date May 29, 2014
- Micron Technology, Inc.
- Prashant MAJHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same
- Publication number 20140139776
- Publication date May 22, 2014
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Masahiko Hayakawa
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20140091468
- Publication date Apr 3, 2014
- Renesas Electronics Corporation
- Junji NOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM
- Publication number 20140084355
- Publication date Mar 27, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS
- Publication number 20140065806
- Publication date Mar 6, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140065840
- Publication date Mar 6, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K LAYERS, TRANSISTORS, AND FABRICATION METHOD
- Publication number 20140042559
- Publication date Feb 13, 2014
- SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
- YONG CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140035101
- Publication date Feb 6, 2014
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Novel Fabrication Technique for High Frequency, High Power Group II...
- Publication number 20140015011
- Publication date Jan 16, 2014
- M. Asif Khan
- H01 - BASIC ELECTRIC ELEMENTS

Inorganic layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of manufacturing an integrated circuit having stress tuning...

Methods of manufacturing an integrated circuit having stress tuning...

Enhanced thin film deposition

Insulator, capacitor with the same and fabrication method thereof,...

Atomic layer deposition method

SONOS ONO stack scaling

Enhanced thin film deposition

Methods of manufacturing an integrated circuit having stress tuning...

Method of forming dielectric films, new precursors and their use in...

Insulator, capacitor with the same and fabrication method thereof,...

Plasma assisted atomic layer deposition metal oxide for patterning...

Substrate processing apparatus for forming film including at least...

SONOS ONO stack scaling

Durable, heat-resistant multi-layer coatings and coated articles

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device and substrate processi...

Vapor deposition of metal oxides, silicates and phosphates, and sil...

Plasma assisted atomic layer deposition of multi-layer films for pa...

Fabrication technique for high frequency, high power group III nitr...

Methods of vapor deposition with multiple vapor sources

Enhanced thin film deposition

Semiconductor device and method for manufacturing the same

High κ gate stack on III-V compound semiconductors

Methods of forming a semiconductor device by thermally treating a c...

Method of fabricating a gate dielectric for high-k metal gate devices

Semiconductor device and method for manufacturing the same

Silicon nitride film, and semiconductor device

Plasma assisted atomic layer deposition titanium oxide for patterni...

Methods of manufacturing an integrated circuit having stress tuning...

Graded dielectric structures

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SONOS ONO STACK SCALING

ENHANCED THIN FILM DEPOSITION

METHODS FOR INTEGRATION OF PORE STUFFING MATERIAL

MEMORY WITH CARBON-CONTAINING SILICON CHANNEL

SEMICONDUCTOR STRUCTURE WITH DIFFERENT FINS OF FINFETS

METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...

CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

OXIDE-NITRIDE-OXIDE STACK HAVING MULTIPLE OXYNITRIDE LAYERS

RUTHENIUM FILM FORMATION METHOD AND STORAGE MEDIUM

ANISOTROPIC CONDUCTOR AND METHOD OF FABRICATION THEREOF

PASSIVATION LAYER FOR HARSH ENVIRONMENTS AND METHODS OF FABRICATION...

CVD PRECURSORS

SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS

PECVD FILMS FOR EUV LITHOGRAPHY

BORON-DOPED CARBON-BASED HARDMASK ETCH PROCESSING

METHODS OF FORMING A SIDEWALL SPACER HAVING A GENERALLY TRIANGULAR...

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD

NANOCRYSTAL FORMATION USING ATOMIC LAYER DEPOSITION

Semiconductor Device and Method for Manufacturing the Same

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM

ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

HIGH-K LAYERS, TRANSISTORS, AND FABRICATION METHOD

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

Novel Fabrication Technique for High Frequency, High Power Group II...