Number | Name | Date | Kind |
---|---|---|---|
2833680 | Kneeling | May 1958 | |
3537853 | Wessells et al. | Nov 1970 | |
3723120 | Hummel | Mar 1973 | |
3751250 | Moscony et al. | Aug 1973 | |
3922086 | Freericks | Nov 1975 | |
4069076 | Fickes | Jan 1978 |
Entry |
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Haininl et al., "Liquid Interface for Photoresist", IBM Tech. Disc. Bull., vol. 14, No. 9, Feb. 1972. |