Number | Date | Country | Kind |
---|---|---|---|
4-197047 | Jul 1992 | JPX | |
4-346396 | Dec 1992 | JPX |
This application is a division of application Ser. No. 08/092,782 filed Jul. 19, 1993.
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4555389 | Soneta et al. | Nov 1985 | |
4650539 | Irvine et al. | Mar 1987 | |
4735633 | Chiusu et al. | Apr 1988 | |
4817558 | Itoh | Apr 1989 | |
4911101 | Ballingal, III et al. | Mar 1990 | |
4940213 | Ohmine et al. | Jul 1990 | |
5033407 | Mizuno et al. | Jul 1991 | |
5151305 | Matsumoto et al. | Sep 1992 | |
5190913 | Higashiyama et al. | Mar 1993 | |
5204314 | Kirlin et al. | Apr 1993 | |
5261961 | Takasu et al. | Nov 1993 |
Number | Date | Country |
---|---|---|
0176295 | Apr 1986 | EPX |
3839153 | May 1986 | DEX |
Entry |
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O'Hanlon et al., "American Vacuum Society Recommended Practices for Pumping Hazarous Gases", vol. 6, No. 3, Jun. 1988, pp. 1226-1254. |
Patent Abstracts of Japan, vol. 13, No. 115, Mar. 1989 and JP A-63 290 279. |
Patent Abstracst of Japan, vol. 16, No. 285, Jun. 1992 and JP A-04 072 731. |
Number | Date | Country | |
---|---|---|---|
Parent | 092782 | Jul 1993 |