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Number | Date | Country |
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Entry |
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R. S. Bennet, et al.., “Fabrication of Narrow Self-Aligned Trenches and Isolated N-type Silicon Region with Buried N+ Layer”, IBM Disclosure Bulletin, vol. 34, No. 10A, Mar. 1992 (pp. 397-399).* |
R.S. Bennet, et al., “Fabrication of Narrow Self-Aligned Trenches and Isolated N-type Silicon Region with Buried N+ Layer”, IBM Disclosure Bulletin, vol. 34, No. 10A, Mar. 1992 (pp. 397-399). |