Number | Name | Date | Kind |
---|---|---|---|
3748015 | Offner | Jul 1973 | |
3819265 | Feldman et al. | Jun 1974 | |
3936184 | Tanaka et al. | Feb 1976 | |
4103989 | Rosin | Aug 1978 | |
4171870 | Bruning et al. | Oct 1979 | |
4171871 | Dill et al. | Oct 1979 | |
4293186 | Offner | Oct 1981 | |
4302079 | White | Nov 1981 | |
4391494 | Hershel | Jul 1983 | |
4425037 | Hershel et al. | Jan 1984 | |
4598242 | Hayashi et al. | Jul 1986 | |
4655584 | Tanaka et al. | Apr 1987 | |
4708466 | Isohata et al. | Nov 1987 | |
4719705 | Laganza et al. | Jan 1988 | |
4748477 | Isohata et al. | May 1988 | |
4757355 | Iizuka et al. | Jul 1988 | |
4758864 | Endo et al. | Jul 1988 | |
4769680 | Resor, III et al. | Sep 1988 | |
4864360 | Isohata et al. | Sep 1989 | |
4894303 | Wu | Jan 1990 | |
4924257 | Jain | May 1990 | |
4958160 | Ito et al. | Sep 1990 | |
5031977 | Gibson | Jul 1991 | |
5117254 | Kawashima et al. | May 1992 | |
5130747 | Kikuiri et al. | Jul 1992 | |
5160957 | Ina et al. | Nov 1992 | |
5160961 | Marumo et al. | Nov 1992 | |
5187519 | Takabayashi et al. | Feb 1993 | |
5204711 | Tabuko et al. | Apr 1993 | |
5281996 | Bruning et al. | Jan 1994 | |
5285236 | Jain | Feb 1994 | |
5291240 | Jain | Mar 1994 | |
5448336 | Shiraishi | Sep 1995 | |
5489966 | Kawashima et al. | Feb 1996 | |
5502313 | Nakamura et al. | Mar 1996 | |
5657130 | Shirasu et al. | Aug 1997 | |
5677090 | Marumoto et al. | Oct 1997 |
Number | Date | Country |
---|---|---|
1095078 | Dec 1967 | GBX |
Entry |
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Telefax Message dated Jun. 15, 1990 from Dr. R. Wijnaendts to Mr. Bill Tobey ACT; Telefax Message dated Jun. 13, 1990 from Dr. Wijnaendts to Mr. A.C. Tobey; Patent Specification, including 4 sheets of drawing, for application entitled, "Process for Producing or Inspecting Micropatterns on Large-area Substrates". |